Difference between revisions of "Template:Announcements"
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+ | =====Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair===== |
| + | I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis |
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| − | After extensive troubleshooting it looks like the cryo pump will need to be replaced. We are hopeful the system will be ready to run sometime tomorrow early afternoon. |
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| − | Tony |
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| + | After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution. |
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| − | The tool is up, intial film checks show same dep. rates as before. |
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| + | I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down. |
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| − | =====RIE 5 is up===== |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| − | =====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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| − | We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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| − | I'll send out an update in the next 2-3 days. |
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| − | Thanks, |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | Replacing the battery on the board did not resolve the tool issue. |
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| + | =====ASML optics replacement May 20th-22nd===== |
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| − | Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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| + | We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e. |
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+ | =====ICP1 Down===== |
| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | The transfer arm installation has been postponed until next week due to other equipment being down at this time. |
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| − | The work is now scheduled for 2/21/24 - 2/22/24. |
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| − | Please plan accordingly. |
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| − | //[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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| − | =====Job Opening: Process Engineer===== |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| − | //[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Latest revision as of 14:41, 13 May 2024
Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair
I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis
//Vraj Mehalana 13:42, 9 May 2024 (PDT)
MA6 TSA is down - Update
After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution.
I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down.
-Lee
//Vraj Mehalana 14:41, 13 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ASML optics replacement May 20th-22nd
We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e.
//Vraj Mehalana 09:40, 9 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)