Difference between revisions of "Template:Announcements"
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair===== |
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| + | I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis |
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| − | We are still working to source a new Xenon supplier. We'll update you once we know more. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 13:42, 9 May 2024 (PDT) |
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| − | ===== |
+ | =====MA6 TSA is down - Update===== |
| − | Finetech will be on-site Monday late morning or early afternoon to work on our system. |
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| + | After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution. |
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| − | =====Plasma Activation (EVG 810)===== |
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| − | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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| + | I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down. |
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| + | -Lee |
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| + | =====Velion FIB Tool DOWN===== |
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| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| + | =====ASML optics replacement May 20th-22nd===== |
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| + | We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 09:40, 9 May 2024 (PDT) |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | =====Lab Access Changes: Symmetry App===== |
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| + | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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| − | Runs will still require Staff supervision until then. |
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| − | =====E-Beam #4 (CHA) - EB4 is down===== |
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| − | We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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| − | =====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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| − | S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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| − | =====FEI SEM#1 Replacement Project===== |
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| − | The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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| − | <!--feedBurner name="UCSBNanofab-Announcements" /--> |
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| − | <!-- Description of the RSS feed --> |
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| − | <!----------------------------------------------> |
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| − | <!------------- Equipment Status ----------------> |
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| − | ===== Unaxis Etch: Down ===== |
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| − | We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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| − | ===== Au Plating: UP===== |
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| − | only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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| − | // [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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| − | <!---------- end of Equipment Status ------------> |
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Latest revision as of 14:41, 13 May 2024
Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair
I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis
//Vraj Mehalana 13:42, 9 May 2024 (PDT)
MA6 TSA is down - Update
After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution.
I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down.
-Lee
//Vraj Mehalana 14:41, 13 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ASML optics replacement May 20th-22nd
We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e.
//Vraj Mehalana 09:40, 9 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)