Difference between revisions of "Template:Announcements"
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+ | =====Velion FIB Tool DOWN===== |
| + | Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present. |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 16:18, 23 April 2024 (PDT) |
| − | ===== |
+ | =====Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am===== |
| + | Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day |
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| − | We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow. |
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| + | -PECVD # 1 |
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| − | Thanks, |
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| + | -PECVD # 2 |
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| − | -Aidan |
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| + | -Fluorine ICP |
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| − | The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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| + | =====Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10===== |
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| − | -Lee |
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| + | We are postponing the Maintenance date to May 6th – 10th. |
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| + | On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 09: |
+ | //[[User:Mehalana v|Vraj Mehalana]] 09:42, 5 April 2024 (PDT) |
| − | =====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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| − | EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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| − | Please plan accordingly. |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
| − | =====Oxford Cobra: Software bugs===== |
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| − | The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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| − | // [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST) |
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| − | =====ASML Maintenance: Jan 29th-31st===== |
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| − | The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. |
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| − | // [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST) |
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| − | =====Gowning Refresh: Jan 23rd===== |
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| − | Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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| − | // [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST) |
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| − | =====EBeam#1: UP===== |
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| − | EBeam1 is UP. |
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| − | // [[User:John_d|Demis D. John]] 10:07, 17 January 2024 (PST) |
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| − | =====DUV Flood: UP with new procedure===== |
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| − | The new parts have been installed and the tool has been tested. |
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| − | We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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| − | |||
| − | // [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST) |
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=====Job Opening: Process Engineer===== |
=====Job Opening: Process Engineer===== |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Revision as of 16:18, 23 April 2024
Velion FIB Tool DOWN
Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present.
//Vraj Mehalana 16:18, 23 April 2024 (PDT)
Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am
Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day
-PECVD # 1
-PECVD # 2
-Fluorine ICP
//Vraj Mehalana 17:48, 19 April 2024 (PDT)
Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10
We are postponing the Maintenance date to May 6th – 10th. On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.
//Vraj Mehalana 09:42, 5 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)