Difference between revisions of "Template:Announcements"
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+ | =====Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10===== |
| + | We are postponing the Maintenance date to May 6th – 10th. |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| + | On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 09: |
+ | //[[User:Mehalana v|Vraj Mehalana]] 09:42, 5 April 2024 (PDT) |
| − | =====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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| − | We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow. |
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| − | Thanks, |
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| + | The tool is working properly at this time and is now available for use. Thank you for your patience in regard to this matter. |
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| + | =====DI and Waste Water systems===== |
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| − | -Aidan |
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| + | DI and Waste Water systems will be down for upgrade April 5th and 6th. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 11:55, 18 March 2024 (PDT) |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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| − | -Lee |
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| − | =====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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| − | EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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| − | Please plan accordingly. |
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| − | =====Oxford Cobra: Software bugs===== |
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| − | The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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| − | // [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST) |
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| − | =====ASML Maintenance: Jan 29th-31st===== |
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| − | The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. |
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| − | // [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST) |
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| − | =====Gowning Refresh: Jan 23rd===== |
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| − | Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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| − | // [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST) |
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| − | EBeam1 is UP. |
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| − | // [[User:John_d|Demis D. John]] 10:07, 17 January 2024 (PST) |
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| − | =====DUV Flood: UP with new procedure===== |
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| − | The new parts have been installed and the tool has been tested. |
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| − | We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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| − | // [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST) |
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=====Job Opening: Process Engineer===== |
=====Job Opening: Process Engineer===== |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Revision as of 20:15, 10 April 2024
Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10
We are postponing the Maintenance date to May 6th – 10th. On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.
//Vraj Mehalana 09:42, 5 April 2024 (PDT)
ALD Oxford UP
The tool is working properly at this time and is now available for use. Thank you for your patience in regard to this matter. //Vraj Mehalana 13:48, 19 March 2024 (PDT)
DI and Waste Water systems
DI and Waste Water systems will be down for upgrade April 5th and 6th. //Vraj Mehalana 11:55, 18 March 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)