Difference between revisions of "Template:Announcements"
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+ | =====Stepper #3 (ASML DUV) - Down for PM on April 15th-19th===== |
| + | ASML Engineers will be on-site to perform the Annual Periodic Maintenance on the tool from |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| + | Monday April 15th through April 19th. The tool will be unavailable for use during this time. |
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| − | =====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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| − | We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 10:26, 25 March 2024 (PDT) |
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| − | Thanks, |
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| − | -Aidan |
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| + | All three chambers are operating properly. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 13:48, 19 March 2024 (PDT) |
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| + | =====DI and Waste Water systems===== |
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| + | DI and Waste Water systems will be down for upgrade April 5th and 6th. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 11:55, 18 March 2024 (PDT) |
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| − | ===== |
+ | =====ICP1 Down===== |
| − | The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | -Lee |
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| − | =====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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| − | EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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| − | =====Oxford Cobra: Software bugs===== |
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| − | The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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| − | // [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST) |
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| − | =====ASML Maintenance: Jan 29th-31st===== |
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| − | The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. |
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| − | // [[User:John_d|Demis D. John]] 17:00, 11 January 2024 (PST) |
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| − | =====Gowning Refresh: Jan 23rd===== |
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| − | Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. |
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| − | // [[User:John_d|Demis D. John]] 07:28, 11 January 2024 (PST) |
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| − | EBeam1 is UP. |
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| − | // [[User:John_d|Demis D. John]] 10:07, 17 January 2024 (PST) |
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| − | =====DUV Flood: UP with new procedure===== |
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| − | The new parts have been installed and the tool has been tested. |
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| − | We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on [https://wiki.nanofab.ucsb.edu/wiki/DUV_Flood_Expose#Documentation:~:text=Exposure%20System%20Spectra-,Documentation,-%5Bedit%20%7C its Wiki page]. |
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| − | |||
| − | // [[User:John_d|Demis D. John]] 17:18, 4 January 2024 (PST) |
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=====Job Opening: Process Engineer===== |
=====Job Opening: Process Engineer===== |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Revision as of 10:26, 25 March 2024
Stepper #3 (ASML DUV) - Down for PM on April 15th-19th
ASML Engineers will be on-site to perform the Annual Periodic Maintenance on the tool from Monday April 15th through April 19th. The tool will be unavailable for use during this time.
Please plan your work accordingly.
//Vraj Mehalana 10:26, 25 March 2024 (PDT)
ALD Oxford UP
All three chambers are operating properly. //Vraj Mehalana 13:48, 19 March 2024 (PDT)
DI and Waste Water systems
DI and Waste Water systems will be down for upgrade April 5th and 6th. //Vraj Mehalana 11:55, 18 March 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)