Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Stepper #3 (ASML DUV) - Down for PM on April 15th-19th===== |
| + | ASML Engineers will be on-site to perform the Annual Periodic Maintenance on the tool from |
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| − | PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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| + | Monday April 15th through April 19th. The tool will be unavailable for use during this time. |
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| − | This will be an all day event starting at 8:00am. |
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| − | This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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| − | =====Raith Velion - Tool Up===== |
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| − | The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. |
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| − | - Dan |
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| + | All three chambers are operating properly. |
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| − | =====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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| − | Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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| − | Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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| − | Please plan your process accordingly. |
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| − | Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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| + | =====DI and Waste Water systems===== |
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| + | DI and Waste Water systems will be down for upgrade April 5th and 6th. |
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| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| − | ===== |
+ | =====Job Opening: Process Engineer===== |
| + | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| − | //[[User: |
+ | //[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
| − | ===== |
+ | =====Lab Access Changes: Symmetry App===== |
| + | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| − | The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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| ⚫ | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| − | -Lee |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| ⚫ | |||
| − | =====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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| − | The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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| − | |||
| ⚫ | |||
| − | |||
| − | =====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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| − | The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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| − | (1) 09-30-23 8:00am-5:00pm |
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| − | (2) 10-01-23 8:00am-5:00pm |
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| − | (3) 10-02-23 8:00am-12:00pm |
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| − | Please plan your work activities accordingly. |
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| − | We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next |
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| − | week and will update everyone at that time. |
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| − | |||
| − | -Lee |
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| − | |||
| − | //[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Revision as of 10:26, 25 March 2024
Stepper #3 (ASML DUV) - Down for PM on April 15th-19th
ASML Engineers will be on-site to perform the Annual Periodic Maintenance on the tool from Monday April 15th through April 19th. The tool will be unavailable for use during this time.
Please plan your work accordingly.
//Vraj Mehalana 10:26, 25 March 2024 (PDT)
ALD Oxford UP
All three chambers are operating properly. //Vraj Mehalana 13:48, 19 March 2024 (PDT)
DI and Waste Water systems
DI and Waste Water systems will be down for upgrade April 5th and 6th. //Vraj Mehalana 11:55, 18 March 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Job Opening: Process Engineer
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.
//Demis D. John 14:52, 30 October 2023 (PDT)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)