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Revision as of 10:57, 16 March 2023
FEI SEM#2 Replacement Project
The FEI SEM will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)
E-Beam #5: Down
Chuck rotation motor damaged. // Vraj Mehalana 14:38, 13 March 2023 (PDT)
ICP #1: Down
One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer // Vraj Mehalana 12:36, 13 March 2023 (PDT)
Unaxis Etch: Down
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)
Dektak XT ready for training
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please contact the tool supervisor. // John d 10:08, 7 February 2023 (PST)
Au Plating: UP
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)