Template:Announcements

UCSB NanoFab Announcements

EBeam #4: Down

Down through the week of Monday the 12th, installing new HV/Sweep controller.

Users will need retraining on these new components once the system is back up. // John d (talk) 09:50, 6 March 2018 (PST)

PECVD #2: High Particulates

Vacuum system restored. Particle cause identified but parts needed. You can use system but particle counts still extremely high. Do not use if process sensitive to particles. // Posted: 20:29, 3 March 2018 (PST)

Stepper #2 Maintenance

The vendor will be servicing the GCA Autostep on Thursday March 15, 2018 at 8:00AM. The system will be up and running later that afternoon. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)

Stepper #1 Maintenance

The vendor will be here to service the GCA 6300 starting Monday March 12, 2018 at 8:00AM. The system will be down for three days for this service. We will send out an email if the service is completed before expected. Please plan your process accordingly. // Posted: 07:40, 21 February 2018 (PST)

Gasonics: Up

The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to be repaired and returned. // Posted: 10:14, 12 February 2018 (PST)

Cary 500 Down

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)