Difference between revisions of "Template:Announcements"
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// [[User:John d|Posted: ]] 09:58, 4 January 2018 (PST) |
// [[User:John d|Posted: ]] 09:58, 4 January 2018 (PST) |
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− | ===== |
+ | ===== ICP#1: Down ===== |
+ | There is a problem with the backside He cooling. |
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− | + | [[User:John d|John d]] ([[User talk:John d|talk]]) 13:41, 14 February 2018 (PST) |
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− | ASML Stepper #3 periodic maintenance is complete. System is ready for use. |
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===== JEOL SEM #2: Down ===== |
===== JEOL SEM #2: Down ===== |
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Load Lock problem. |
Load Lock problem. |
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// [[User:John d|Posted:]] 13:40, 14 February 2018 (PST) |
// [[User:John d|Posted:]] 13:40, 14 February 2018 (PST) |
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===== Cary 500 Down ===== |
===== Cary 500 Down ===== |
Revision as of 14:41, 14 February 2018
UCSB NanoFab Announcements
Announcements
There are no general announcements at this time. // Posted: 09:58, 4 January 2018 (PST)
ICP#1: Down
There is a problem with the backside He cooling. John d (talk) 13:41, 14 February 2018 (PST)
JEOL SEM #2: Down
Load Lock problem. // Posted: 13:40, 14 February 2018 (PST)
Gasonics: Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)