Difference between revisions of "Template:Announcements"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
 
(14 intermediate revisions by 3 users not shown)
Line 1: Line 1:
 
<startfeed />
 
<startfeed />
=====DSE is Up=====
+
=====Velion FIB Tool DOWN=====
  +
Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present.
We’ve run a day and a half of different recipes and haven’t seen a single issue. The standard DSE (Bosch) process has been qualified and everything is consistent with previous runs. For sensitive etches it’s recommended to do a test run to check for any process drift. Tool is free to use.
 
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
 
   
  +
//[[User:Mehalana v|Vraj Mehalana]] 16:18, 23 April 2024 (PDT)
=====ICP1 Down=====
 
  +
=====Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
 
  +
Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
 
   
  +
-PECVD # 1
=====PlasmaTherm DSEIII is down - Update=====
 
We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon.
 
//[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST)
 
   
  +
-PECVD # 2
=====ICP #1 is down - Update=====
 
Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date).
 
//[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST)
 
   
  +
-Fluorine ICP
=====RIE 5 is up=====
 
RIE 5 is up except for processes that use SiCl4.
 
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
 
   
 
//[[User:Mehalana v|Vraj Mehalana]] 17:48, 19 April 2024 (PDT)
=====EBeam3 Transfer Arm Upgrade - Postponed=====
 
The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues.
 
   
  +
=====Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10=====
I am waiting to hear back from the manufacturer so at this time I can not reschedule yet.
 
  +
We are postponing the Maintenance date to May 6th – 10th.
  +
On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.
   
 
//[[User:Mehalana v|Vraj Mehalana]] 09:42, 5 April 2024 (PDT)
I will send another notification when everything has been worked out, and I am ready to schedule the installation.
 
  +
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
 
 
=====ICP1 Down=====
 
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
 
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
   
 
=====Job Opening: Process Engineer=====
 
=====Job Opening: Process Engineer=====

Latest revision as of 16:18, 23 April 2024

Velion FIB Tool DOWN

Raith service are investigating an anomalously low beam current. The Velion FIB column is not available to users at present.

//Vraj Mehalana 16:18, 23 April 2024 (PDT)

Multipal Tool DOWN!!! 4/24/2024 from 6am to 10 am

Below Mention Tools are down From 6am to 10am for maintenance in the chase. I will send an email once I have completed the maintenance. Please plan accordingly.-Mike Day

-PECVD # 1

-PECVD # 2

-Fluorine ICP

//Vraj Mehalana 17:48, 19 April 2024 (PDT)

Stepper #3 (ASML DUV) - PM Moved to 5/6 – 5/10

We are postponing the Maintenance date to May 6th – 10th. On the week of May 6th, ASML Engineers will be performing preventative maintenance, please plan your work around the tool being down at that time.

//Vraj Mehalana 09:42, 5 April 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Job Opening: Process Engineer

The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.

//Demis D. John 14:52, 30 October 2023 (PDT)

Lab Access Changes: Symmetry App

Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)