Difference between revisions of "Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(pasted table from excel)
 
(Added info for a new shim)
 
Line 11: Line 11:
 
!CHUCK name
  
!CHUCK name
 
!Substrate thickness=S
  
!Substrate thickness=S
−
!Pick right chuck
 +
!Pick right chuck
 
!Shim
  
!Shim
 
!chuck size
  
!chuck size
Line 144: Line 144:
 
|2"/500um+shim
  
|2"/500um+shim
 
|130um
  
|130um
−
|2  ( for 2")
 +
|2 (for 2")
 
|50.8mm
  
|50.8mm
 
|11.650mm
  
|11.650mm
Line 156: Line 156:
 
|2"/500um
  
|2"/500um
 
|no
  
|no
−
|2  ( for 2")
 +
|2 (for 2")
 
|50.8mm
  
|50.8mm
 
|11.650mm
  
|11.650mm
Line 168: Line 168:
 
|2"/500um
  
|2"/500um
 
|no
  
|no
−
|2  ( for 2")
 +
|2 (for 2")
 
|50.8mm
  
|50.8mm
 
|11.650mm
  
|11.650mm
Line 174: Line 174:
 
|OK
  
|OK
 
|limit
  
|limit
−
|-
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
Line 204: Line 192:
 
|3"/635um+shim
  
|3"/635um+shim
 
|130um
  
|130um
−
|3( for 3")
 +
|3 (for 3")
 
|76.2mm
  
|76.2mm
 
|11.570mm
  
|11.570mm
Line 216: Line 204:
 
|3"/635um
  
|3"/635um
 
|no
  
|no
−
|3( for 3")
 +
|3 (for 3")
 
|76.2mm
  
|76.2mm
 
|11.570mm
  
|11.570mm
Line 228: Line 216:
 
|3"/635um
  
|3"/635um
 
|no
  
|no
−
|3( for 3")
 +
|3 (for 3")
 
|76.2mm
  
|76.2mm
 
|11.570mm
  
|11.570mm
Line 234: Line 222:
 
|OK
  
|OK
 
|limit
  
|limit
−
|-
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
Line 264: Line 240:
 
|4"/500um+shim
  
|4"/500um+shim
 
|130um
  
|130um
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.630mm
  
|11.630mm
Line 276: Line 252:
 
|4"/500um
  
|4"/500um
 
|no
  
|no
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.630mm
  
|11.630mm
Line 288: Line 264:
 
|4"/500um
  
|4"/500um
 
|no
  
|no
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.630mm
  
|11.630mm
Line 294: Line 270:
 
|OK
  
|OK
 
|limit
  
|limit
−
|-
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|-
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
Line 336: Line 288:
 
|Al 100mm
  
|Al 100mm
 
|130um
  
|130um
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.570mm
  
|11.570mm
Line 348: Line 300:
 
|Al 100mm
  
|Al 100mm
 
|no
  
|no
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.570mm
  
|11.570mm
Line 360: Line 312:
 
|Al 100mm
  
|Al 100mm
 
|no
  
|no
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.570mm
  
|11.570mm
Line 372: Line 324:
 
|Al 100mm
  
|Al 100mm
 
|no
  
|no
−
|100 ( for 4")
 +
|100 (for 4")
 
|100mm
  
|100mm
 
|11.570mm
  
|11.570mm
Line 378: Line 330:
 
|OK
  
|OK
 
|limit
  
|limit
−
|-
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
Line 409: Line 349:
 
|260um
  
|260um
 
|7100
  
|7100
  +
|100mm
−
|76.2mm
  
 
|11.440mm
  
|11.440mm
 
|11.440+0.350+0.260=12.05mm
  
|11.440+0.350+0.260=12.05mm
Line 421: Line 361:
 
|130um
  
|130um
 
|7100
  
|7100
  +
|100mm
−
|76.2mm
  
 
|11.440mm
  
|11.440mm
 
|11.440+0.500+0.130=12.07mm
  
|11.440+0.500+0.130=12.07mm
Line 433: Line 373:
 
|260um
  
|260um
 
|7100
  
|7100
  +
|100mm
−
|76.2mm
  
 
|11.440mm
  
|11.440mm
 
|11.440+0.550+0.260=12.25mm
  
|11.440+0.550+0.260=12.25mm
Line 445: Line 385:
 
|no
  
|no
 
|7100
  
|7100
  +
|100mm
−
|76.2mm
  
 
|11.440mm
  
|11.440mm
 
|11.440+0.720=12.16mm
  
|11.440+0.720=12.16mm
 
|OK
  
|OK
  +
|
  +
|-
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
  
|
 
|-
  
|-
Line 457: Line 409:
 
|no
  
|no
 
|7100
  
|7100
  +
|100mm
−
|76.2mm
  
 
|11.440mm
  
|11.440mm
 
|11.440+0.810=12.25mm
  
|11.440+0.810=12.25mm
 
|OK
  
|OK
 
|limit
  
|limit
  +
|-
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|
  +
|-
  +
|4" and smaller
  +
|UNIVERSAL-1000um
  +
|350um=0.350mm
  +
|Universal chuck+shim
  +
|600um
  +
|100 (for 4" or smaller)
  +
|100mm
  +
|11.200mm
  +
|11.200+0.350+0.600=12.15mm
  +
|OK
  +
|use 600um shim
  +
|-
  +
|
  +
|
  +
|500um=0.500mm
  +
|Universal chuck+shim
  +
|450mm
  +
|100 (for 4" or smaller)
  +
|100mm
  +
|11.200mm
  +
|11.200+0.500+0.450=12.15mm
  +
|OK
  +
|use 450um shim
  +
|-
  +
|
  +
|
  +
|635um=0.635mm
  +
|Universal chuck+shim
  +
|260um
  +
|100 (for 4" or smaller)
  +
|100mm
  +
|11.200mm
  +
|11.200+0.635+0.260=12.095mm
  +
|OK
  +
|use 260um shim
  +
|-
  +
|
  +
|
  +
|680um=0.680mm
  +
|Universal chuck+shim
  +
|260um
  +
|100 (for 4" or smaller)
  +
|100mm
  +
|11.200mm
  +
|11.200+0.680+0.260=12.14mm
  +
|OK
  +
|use 260um shim
  +
|-
  +
|
  +
|
  +
|1000um=1.000mm
  +
|Universal chuck+shim
  +
|no shim
  +
|100 (for 4" or smaller)
  +
|100mm
  +
|11.200mm
  +
|11.200+0.350+0.600=12.15mm
  +
|OK
  +
|
 
|-
  
|-
 
|
  
|
Line 478: Line 502:
 
|We do have chuck
  
|We do have chuck
 
|custom puddles
  
|custom puddles
−
| rowspan="2" colspan="8" |SHIMS: Shims can be cut from other material (cabinet next to stepper, first drawer.  Shim Thickness: 0.01mm to 0.75mm (each color- reperesenrs different thickness)
 +
| colspan="8" rowspan="2" |SHIMS: Shims can be cut from other material (cabinet next to stepper, first drawer.  Shim Thickness: 0.01mm to 0.75mm (each color- represents different thickness)
 
|-
  
|-
 
|
  
|
−
|Thinning down form 12.74 to 11.64!
 +
|Thinning down from 12.74 to 11.64!
 
|3C can make them
  
|3C can make them
 
|}
  
|}

Latest revision as of 13:39, 13 September 2023

SUBSTRATE/CHUCK LOADING/CHUCK/SHIM STEPPER WAFER diameter TARGET THICKNESS
Substrate size CHUCK name Substrate thickness=S Pick right chuck Shim chuck size wafer size Chuck thickness=C C+S=12.150( +/- 0.1)mm COMMENT
1/4 of 2" or less SMALL 1/4 of 2" chuck-500um 350um=0.350mm 1/4 of 2"/500um+shim 130um 142 50.8mm 11.646mm 11.646+0.350+0.130=12.126mm OK ≤350um, use shim 130-230um
(Adam:1/4  2") 400um=0.500mm 1/4of2"/500um+shim 130um 142 50.8mm 11.646mm 11.646+0.400+0.130=12.176mm OK (350-500)um, use shim 130-180um
500um=0.500mm 1/4of2"/500um no 142 50.8mm 11.646mm 11.646+0.500=12.146mm OK
604um=0.604mm 1/4of2"/500um no 142 50.8mm 11.646mm 11.646+0.604=12.25mm OK limit
1/4 of 2" or less SMALL 1/4 of 2" chuck-635um 350um=0.350mm 1/4of2"/635um+shim 180um 142 50.8mm 11.536mm 11.536+0.350+0.180=12.126mm OK ≤350um, use shim 180-260um
(Adam:1/4  2") 500um=0.500mm 1/4of2"/635um+shim 130um 142 50.8mm 11.536mm 11.536+0.500+0.130=12.166mm OK
635um=0.635mm 1/4of2"/635um no 142 50.8mm 11.536mm 11.536+0.635=12.171mm OK
714um=0.635mm 1/4of2"/635um no 142 50.8mm 11.536mm 11.536+0.714=12.250mm OK limit
2" and smaller SMALL 2" CHUCK-500um 350um=0.35mm 2"/500um+shim 130um 2 (for 2") 50.8mm 11.650mm 11.650+0.350+0.130=12.130mm OK ≤350um, use shim 130-230um
(Adam:2") 500um=0.500mm 2"/500um no 2 (for 2") 50.8mm 11.650mm 11.650+0.500=12.150mm OK
600um=0.600mm 2"/500um no 2 (for 2") 50.8mm 11.650mm 11.650+0.600=12.250mm OK limit
3" and smaller 3" CHUCK-635um 350um=0.350mm 3"/635um+shim 130um 3 (for 3") 76.2mm 11.570mm 11.570+0.350+0.130=12.050mm OK ≤350um, use shim 130-260um
(Adam: 76.2mm) 500um=0.500mm 3"/635um no 3 (for 3") 76.2mm 11.570mm 11.570+0.500=12.070mm OK
680um=0.680mm 3"/635um no 3 (for 3") 76.2mm 11.570mm 11.570+0.680=12.250mm OK limit
4" and smaller STANDARD CHUCK-500um 350um=0.350mm 4"/500um+shim 130um 100 (for 4") 100mm 11.630mm 11.630+0.350+0.130=12.11mm OK ≤350um, use shim 130-260um
(Adam: 100mm) 500um=0.500mm 4"/500um no 100 (for 4") 100mm 11.630mm 11.630+0.500=12.13mm OK
620um=0.620mm 4"/500um no 100 (for 4") 100mm 11.630mm 11.630+0.620=12.25mm OK limit
4" and smaller BIG METAL CHUCK 350um=0.350mm Al 100mm 130um 100 (for 4") 100mm 11.570mm 11.570+0.350+0.130=12.050mm OK ≤350um, use shim 130-260um
( Adam:Al 100mm) 500um=0.500mm Al 100mm no 100 (for 4") 100mm 11.570mm 11.570+0.500=12.070mm OK
635um=0.635mm Al 100mm no 100 (for 4") 100mm 11.570mm 11.570+0.635=12.205mm OK
680um=0.680mm Al 100mm no 100 (for 4") 100mm 11.570mm 11.570+0.680=12.250mm OK limit
4" and smaller BLACK MULTI -720um 350um=0.350mm Black multi+shim 260um 7100 100mm 11.440mm 11.440+0.350+0.260=12.05mm OK limit
( Adam:Black multi) 500um=0.500mm Black multi+shim 130um 7100 100mm 11.440mm 11.440+0.500+0.130=12.07mm OK use shim 130-230um
550um=0.550mm Black multi+shim 260um 7100 100mm 11.440mm 11.440+0.550+0.260=12.25mm OK limit
720um=0.720mm Black multi no 7100 100mm 11.440mm 11.440+0.720=12.16mm OK
810um=0.810mm Black multi no 7100 100mm 11.440mm 11.440+0.810=12.25mm OK limit
4" and smaller UNIVERSAL-1000um 350um=0.350mm Universal chuck+shim 600um 100 (for 4" or smaller) 100mm 11.200mm 11.200+0.350+0.600=12.15mm OK use 600um shim
500um=0.500mm Universal chuck+shim 450mm 100 (for 4" or smaller) 100mm 11.200mm 11.200+0.500+0.450=12.15mm OK use 450um shim
635um=0.635mm Universal chuck+shim 260um 100 (for 4" or smaller) 100mm 11.200mm 11.200+0.635+0.260=12.095mm OK use 260um shim
680um=0.680mm Universal chuck+shim 260um 100 (for 4" or smaller) 100mm 11.200mm 11.200+0.680+0.260=12.14mm OK use 260um shim
1000um=1.000mm Universal chuck+shim no shim 100 (for 4" or smaller) 100mm 11.200mm 11.200+0.350+0.600=12.15mm OK
6" We do have chuck custom puddles SHIMS: Shims can be cut from other material (cabinet next to stepper, first drawer.  Shim Thickness: 0.01mm to 0.75mm (each color- represents different thickness)
Thinning down from 12.74 to 11.64! 3C can make them
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Stepper_2_(Autostep_200)_-_Table_of_Chucks,_Shims,_Target_Thicknesses&oldid=161308"