Step Profilometer (KLA Tencor P-7)
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About
The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
Detailed Specifications
- Probe Tip: 2um radius and 60° angle
- Maximum wafer size: 6-inch
- 1D Profile and 2D Raster Scanning
- Automated Measurement Routines