Difference between revisions of "Step Profilometer (KLA Tencor P-7)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(→‎Instructions: "Saving+Extracting data" - link to nonexistent page)
 
(3 intermediate revisions by 2 users not shown)
Line 1: Line 1:
{{tool|{{PAGENAME}}
+
{{tool2|{{PAGENAME}}
 
|picture=KLA-Tencor-P7_Photo.JPG
 
|picture=KLA-Tencor-P7_Photo.JPG
 
|type = Inspection, Test and Characterization
 
|type = Inspection, Test and Characterization
|super= Brian Lingg
+
|super= Bill Millerski
 +
|super2= Aidan Hopkins
 
|phone=(805)839-3918x210
 
|phone=(805)839-3918x210
 
|location=Bay 4
 
|location=Bay 4
Line 9: Line 10:
 
|materials =  
 
|materials =  
 
}}  
 
}}  
== About ==
+
==About==
The KLA Tencor info will be here
+
The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement.  The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.
  
 
==Detailed Specifications==
 
==Detailed Specifications==
*More info to go here
 
  
== Instructions ==
+
*Probe Tip has a 2um radius and a 60 degree angle
* [[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
+
*Maximum wafer size: ____
* [[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]
+
*1D Profile and 2D Raster Scanning
 +
*Lateral Resolution: _____
 +
*Height Resolution: _____
 +
 
 +
==Instructions==
 +
 
 +
*[[KLA Tencor P7 - Basic profile instructions|Basic profile instructions]]
 +
*[[KLA Tencor P7 - Saving Profile Data|Saving+Extracting Profile Data]]

Latest revision as of 10:56, 30 August 2022

Step Profilometer (KLA Tencor P-7)
KLA-Tencor-P7 Photo.JPG
Location Bay 4
Tool Type Inspection, Test and Characterization
Manufacturer KLA Tencor
Description Surface Profilometer

Primary Supervisor Bill Millerski
(805) 893-2655
wmillerski@ucsb.edu

Secondary Supervisor

Aidan Hopkins


Recipes N/A


About

The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.

Detailed Specifications

  • Probe Tip has a 2um radius and a 60 degree angle
  • Maximum wafer size: ____
  • 1D Profile and 2D Raster Scanning
  • Lateral Resolution: _____
  • Height Resolution: _____

Instructions