Difference between revisions of "Sputtering Recipes"
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=[[Sputter 4 (AJA ATC 2200-V)]]= |
=[[Sputter 4 (AJA ATC 2200-V)]]= |
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=[[Sputter 5 (Lesker AXXIS)]]= |
=[[Sputter 5 (Lesker AXXIS)]]= |
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| + | =[[Ion Beam Deposition (Veeco NEXUS)]]= |
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| + | ==SiO{{sub|2}} deposition (IBD)== |
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| + | *{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}} |
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| + | ==SiN deposition (IBD)== |
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| + | *{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
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| + | *{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
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| + | |||
| + | ==Ta{{sub|2}}O{{sub|5}} deposition (IBD)== |
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| + | *{{fl|IBD-Ta2O5-Recipe.pdf|Ta{{sub|2}}O{{sub|5}} dep}} |
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Revision as of 08:35, 7 September 2012
Back to Vacuum Deposition Recipes.