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Show new changes starting from 11:17, 30 September 2022
   
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29 September 2022

 m   16:54  Dry Etching Recipes diffhist +22 John d talk contribs fix incorrect color header cell
 m   16:47  Unaxis VLR Etch - Process Control Data diffhist +74 John d talk contribs bold + colored header row Tag: Visual edit: Switched
     16:33  ICP Etching Recipes diffhist +113 John d talk contribs →‎ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
     16:31  ICP-Etch (Unaxis VLR) diffhist +186 John d talk contribs link to recipes, reduce headers to "heading level 1" (were "title" level) Tag: Visual edit
     15:44  Template:Announcements‎‎ 2 changes history -171 [John d‎ (2×)]
     
15:44 (cur | prev) -145 John d talk contribs ASML network update
     
15:43 (cur | prev) -26 John d talk contribs GCA stepper 1 PM done
     14:28  Filmetrics F40-UV Microscope-Mounted diffhist +245 John d talk contribs →‎Good Curve-Fitting: explained reasonable vs. perfect curve fit Tag: Visual edit

28 September 2022

     08:28  Template:Announcements‎‎ 2 changes history -203 [John d‎ (2×)]
     
08:28 (cur | prev) -155 John d talk contribs delete stepper 2 up
     
08:28 (cur | prev) -48 John d talk contribs →‎GCA AutoStep Service: PM complete

26 September 2022

     13:36  Test Data of etching SiO2 with CHF3/CF4 diffhist +320 Noahdutra talk contribs Tag: Visual edit
     13:32  (Upload log) [Noahdutra‎ (4×)]
     
13:32 Noahdutra talk contribs uploaded a new version of File:CS Pan1n 092622 002.jpg
     
13:28 Noahdutra talk contribs uploaded File:CS Pan2n 092622 002.jpg
     
13:24 Noahdutra talk contribs uploaded File:CS Pan1n 092622 002.jpg
     
13:19 Noahdutra talk contribs uploaded File:CS Pan1o 092622 002.jpg
     13:27  Test Data of etching SiO2 with CHF3/CF4-ICP1 diffhist +322 Noahdutra talk contribs Tag: Visual edit
     10:54  Template:Announcements diffhist -42 John d talk contribs AutoStep up.

22 September 2022

     07:34  Template:Announcements diffhist +197 John d talk contribs corrected EB3 --> EB2, AUtostep down RMS

21 September 2022

     15:40  Template:Announcements‎‎ 2 changes history +114 [John d‎ (2×)]
     
15:40 (cur | prev) +122 John d talk contribs EB2 heater down
     
14:27 (cur | prev) -8 John d talk contribs SEM#1 UP
     15:10  SEM Sample Coater (Hummer)‎‎ 2 changes history +81 [Barreraz‎ (2×)]
     
15:10 (cur | prev) -26 Barreraz talk contribs Instructions Tag: Visual edit
     
15:09 (cur | prev) +107 Barreraz talk contribs →‎Operating Procedures Tag: Visual edit
N    15:09  Template:Operating instructions diffhist +92 Barreraz talk contribs Created page with "https://wiki.nanotech.ucsb.edu/w/images/5/5d/SEM_sample_coater_%28hummer%29_instructions.pdf"
     15:05  (Upload log) [Barreraz‎ (2×)]
     
15:05 Barreraz talk contribs uploaded File:SEM sample coater (hummer) instructions.pdf
     
14:46 Barreraz talk contribs uploaded a new version of File:SEMSample.jpg

19 September 2022

     08:33  Template:Announcements‎‎ 2 changes history +76 [John d‎ (2×)]
     
08:33 (cur | prev) +87 John d talk contribs GCA 6300 PM update
     
08:30 (cur | prev) -11 John d talk contribs gca autostep 200 PM update

17 September 2022

     01:53  Template:Announcements diffhist +77 John d talk contribs asml network update

16 September 2022

     15:50  Sputter 5 (AJA ATC 2200-V) diffhist +85 John d talk contribs Added detailed specs section & ion mill Tag: Visual edit