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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 250 | older 250) (20 | 50 | 100 | 250 | 500)- 10:32, 26 January 2024 Sawyer l talk contribs created page File:MLA150 Quick Start Rev A.pdf
- 10:32, 26 January 2024 Sawyer l talk contribs uploaded File:MLA150 Quick Start Rev A.pdf
- 14:44, 9 January 2024 Sawyer l talk contribs uploaded a new version of File:DUV Flood Expose SOP Rev C.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs created page File:DUV Flood Expose SOP Rev C.pdf
- 15:39, 4 January 2024 Sawyer l talk contribs uploaded File:DUV Flood Expose SOP Rev C.pdf
- 14:57, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 14:56, 30 October 2023 Sawyer l talk contribs uploaded a new version of File:ADT SOP Rev J.pdf
- 11:06, 30 October 2023 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev E.pdf
- 11:06, 30 October 2023 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev E.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs created page File:ADT SOP Rev J.pdf
- 15:10, 17 October 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev J.pdf
- 14:26, 28 September 2023 Sawyer l talk contribs uploaded a new version of File:RIE 2 SOP Rev D.pdf
- 08:23, 13 September 2023 Sawyer l talk contribs created page File:Ultron 1042R Film specs.pdf
- 08:23, 13 September 2023 Sawyer l talk contribs uploaded File:Ultron 1042R Film specs.pdf
- 09:16, 29 August 2023 Sawyer l talk contribs uploaded a new version of File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs created page File:UV Ozone SOP Rev A.pdf
- 08:42, 29 August 2023 Sawyer l talk contribs uploaded File:UV Ozone SOP Rev A.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs created page File:EB2 SOP Rev H.pdf
- 11:31, 25 August 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev H.pdf
- 10:52, 22 August 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs created page File:ICP -1 Standard Etch Recipes.pdf
- 11:09, 17 August 2023 Sawyer l talk contribs uploaded File:ICP -1 Standard Etch Recipes.pdf
- 06:32, 3 August 2023 Sawyer l talk contribs created page File:ADT SOP Rev I.pdf
- 06:32, 3 August 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev I.pdf
- 09:33, 2 August 2023 Sawyer l talk contribs uploaded a new version of File:MA-6 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs created page File:RIE 2 SOP Rev D.pdf
- 07:54, 21 July 2023 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev D.pdf
- 09:36, 26 May 2023 Sawyer l talk contribs uploaded a new version of File:MJB 3 IR Camera SOP Rev B.pdf
- 10:34, 10 May 2023 Sawyer l talk contribs created page File:EB2 SOP Rev G.pdf
- 10:34, 10 May 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev G.pdf
- 11:52, 21 March 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Gas Change N2-He-N2.pdf
- 11:51, 21 March 2023 Sawyer l talk contribs created page File:ICP -1 Gas Change CHF3-Ar.pdf
- 11:51, 21 March 2023 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CHF3-Ar.pdf
- 11:50, 21 March 2023 Sawyer l talk contribs uploaded a new version of File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 13:59, 16 March 2023 Sawyer l talk contribs created page File:ADT SOP Rev H.pdf
- 13:59, 16 March 2023 Sawyer l talk contribs uploaded File:ADT SOP Rev H.pdf
- 08:32, 10 March 2023 Sawyer l talk contribs created page File:RIE 2 SOP Rev C.pdf
- 08:32, 10 March 2023 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev C.pdf
- 14:55, 8 March 2023 Sawyer l talk contribs created page File:Oxford Cluster Tool Operating Instructions Rev B.pdf
- 14:55, 8 March 2023 Sawyer l talk contribs uploaded File:Oxford Cluster Tool Operating Instructions Rev B.pdf
- 10:26, 2 March 2023 Sawyer l talk contribs uploaded a new version of File:EB2 SOP Rev F.pdf
- 14:37, 15 February 2023 Sawyer l talk contribs created page File:EB2 SOP Rev F.pdf
- 14:37, 15 February 2023 Sawyer l talk contribs uploaded File:EB2 SOP Rev F.pdf
- 11:30, 8 February 2023 Sawyer l talk contribs created page File:YES SOP Rev E.pdf
- 11:30, 8 February 2023 Sawyer l talk contribs uploaded File:YES SOP Rev E.pdf
- 12:29, 23 November 2022 Sawyer l talk contribs created page File:ADT SOP Rev G.pdf
- 12:29, 23 November 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev G.pdf
- 10:37, 7 October 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev L (LS).docx.pdf
- 10:37, 7 October 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev L (LS).docx.pdf
- 12:06, 15 September 2022 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev D.pdf
- 12:06, 15 September 2022 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev D.pdf
- 14:11, 8 September 2022 Sawyer l talk contribs created page File:IMG 5388.jpg
- 14:11, 8 September 2022 Sawyer l talk contribs uploaded File:IMG 5388.jpg
- 14:10, 8 September 2022 Sawyer l talk contribs restored page File:Ozone.jpg (1 file)
- 14:09, 8 September 2022 Sawyer l talk contribs deleted page File:Ozone.jpg
- 14:07, 8 September 2022 Sawyer l talk contribs created page File:Ozone.jpg
- 14:07, 8 September 2022 Sawyer l talk contribs uploaded File:Ozone.jpg
- 14:05, 8 September 2022 Sawyer l talk contribs deleted page File:IMG 5388.JPG
- 14:04, 8 September 2022 Sawyer l talk contribs deleted page File:Ozone.jpg
- 10:22, 8 September 2022 Sawyer l talk contribs deleted page File:IMG 5388.JPG (Deleted old revision 20220908172213!IMG_5388.JPG: new photo)
- 10:22, 8 September 2022 Sawyer l talk contribs uploaded a new version of File:IMG 5388.JPG
- 10:19, 8 September 2022 Sawyer l talk contribs deleted page File:Ozone.jpg.jpg (oops)
- 10:18, 8 September 2022 Sawyer l talk contribs uploaded a new version of File:Ozone.jpg
- 10:18, 8 September 2022 Sawyer l talk contribs created page File:Ozone.jpg.jpg
- 10:18, 8 September 2022 Sawyer l talk contribs uploaded File:Ozone.jpg.jpg
- 13:28, 25 August 2022 Sawyer l talk contribs created page File:ICP -1 Wafer Type Change.pdf
- 13:28, 25 August 2022 Sawyer l talk contribs uploaded File:ICP -1 Wafer Type Change.pdf
- 13:27, 25 August 2022 Sawyer l talk contribs deleted page File:ICP -1 Wafer Configuration Change.pdf
- 11:20, 25 August 2022 Sawyer l talk contribs created page File:ICP -1 Wafer Configuration Change.pdf
- 11:20, 25 August 2022 Sawyer l talk contribs uploaded File:ICP -1 Wafer Configuration Change.pdf
- 09:05, 7 July 2022 Sawyer l talk contribs created page File:ADT SOP Rev F.pdf
- 09:05, 7 July 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev F.pdf
- 11:01, 26 April 2022 Sawyer l talk contribs created page File:Tape Station SOP Rev A.pdf
- 11:01, 26 April 2022 Sawyer l talk contribs uploaded File:Tape Station SOP Rev A.pdf
- 11:28, 22 March 2022 Sawyer l talk contribs created page File:EB2 SOP Rev D.pdf
- 11:28, 22 March 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev D.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs created page File:ADT SOP Rev E.pdf
- 13:48, 21 March 2022 Sawyer l talk contribs uploaded File:ADT SOP Rev E.pdf
- 14:09, 2 February 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev K (LS).pdf
- 14:09, 2 February 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev K (LS).pdf
- 11:15, 5 January 2022 Sawyer l talk contribs created page File:MLA150 SOP Rev J (LS).docx.pdf
- 11:15, 5 January 2022 Sawyer l talk contribs uploaded File:MLA150 SOP Rev J (LS).docx.pdf
- 10:58, 3 January 2022 Sawyer l talk contribs created page File:EB2 SOP Rev C.pdf
- 10:58, 3 January 2022 Sawyer l talk contribs uploaded File:EB2 SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs created page File:EVG Plasma Activation SOP Rev C.pdf
- 10:24, 3 January 2022 Sawyer l talk contribs uploaded File:EVG Plasma Activation SOP Rev C.pdf
- 08:13, 11 September 2021 Sawyer l talk contribs deleted page GCA Autostep200 - Startup-Shutdown Procedure (Procedure was updated and is now a linked doc on the Wiki page)
- 11:28, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Rules & Important Notes.pdf
- 11:28, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Rules & Important Notes.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change N2-He-N2.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change N2-He-N2.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf
- 11:27, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf
- 11:26, 10 September 2021 Sawyer l talk contribs created page File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 11:26, 10 September 2021 Sawyer l talk contribs uploaded File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 12:39, 9 September 2021 Sawyer l talk contribs created page File:ADT SOP Rev D.pdf
- 12:39, 9 September 2021 Sawyer l talk contribs uploaded File:ADT SOP Rev D.pdf
- 14:08, 23 August 2021 Sawyer l talk contribs uploaded a new version of File:ADT Dicing Saw SOP Rev C.pdf
- 09:00, 20 August 2021 Sawyer l talk contribs uploaded File:ADT Dicing Saw SOP Rev C.pdf
- 14:08, 11 August 2021 Sawyer l talk contribs uploaded a new version of File:MA-6 Exp Mode Visual Aid.pdf
- 14:05, 11 August 2021 Sawyer l talk contribs uploaded File:BA6 SOP Rev A.pdf
- 14:17, 10 August 2021 Sawyer l talk contribs uploaded File:ADT Dicing Saw SOP Rev B.pdf
- 08:33, 20 July 2021 Sawyer l talk contribs uploaded File:Autostep 200 Restart SOP June 2021.pdf
- 13:18, 19 July 2021 Sawyer l talk contribs uploaded File:MLA150 Substrate Template Rules.pdf
- 10:22, 13 July 2021 Sawyer l talk contribs uploaded File:MA-6 SOP Rev D.pdf
- 13:09, 26 May 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev I (LS).pdf
- 10:31, 19 April 2021 Sawyer l talk contribs uploaded File:Tencor FLX SOP Rev B.pdf
- 08:31, 16 March 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev H (LS).pdf
- 11:28, 15 March 2021 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev D.pdf
- 10:29, 12 February 2021 Sawyer l talk contribs uploaded File:MLA150 SOP Rev G (LS).pdf
- 12:18, 30 November 2020 Sawyer l talk contribs uploaded File:MA-6 SOP Rev C.pdf
- 12:18, 30 November 2020 Sawyer l talk contribs deleted page File:MA-6 SOP Rev C Int & PC Change.pdf (Temp SOP for intensity issue)
- 08:12, 29 October 2020 Sawyer l talk contribs uploaded File:MA-6 SOP Rev C Int & PC Change.pdf
- 09:22, 2 October 2020 Sawyer l talk contribs uploaded File:YES SOP Rev C.pdf
- 10:45, 13 September 2020 Sawyer l talk contribs uploaded File:RIE 2 SOP Rev B.pdf
- 11:55, 7 August 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Camera SOP Rev B.pdf
- 11:51, 7 August 2020 Sawyer l talk contribs uploaded a new version of File:MJB 3 IR Camera SOP.pdf
- 11:51, 7 August 2020 Sawyer l talk contribs restored page File:MJB 3 IR Camera SOP.pdf (1 revision and 1 file)
- 11:49, 7 August 2020 Sawyer l talk contribs deleted page File:MJB 3 IR Camera SOP.pdf (Uploading new file due to small edit)
- 09:55, 1 August 2020 Sawyer l talk contribs uploaded File:RIE 3 SOP Rev C.pdf
- 09:53, 16 July 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Camera SOP.pdf
- 09:51, 16 July 2020 Sawyer l talk contribs uploaded File:MJB 3 IR Alignment Mode Conversion.pdf