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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 16:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 15:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 15:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 15:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 15:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 15:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 13:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 11:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 11:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
- 16:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf
- 16:38, 5 September 2012 Biljana talk contribs uploaded File:IBD film data.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD SiN recipe details.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD materials table.pdf
- 16:28, 5 September 2012 Biljana talk contribs uploaded File:SiNrecipedetails.pdf
- 16:22, 5 September 2012 Biljana talk contribs uploaded File:SiNfilm.pdf
- 15:57, 5 September 2012 Biljana talk contribs uploaded File:SiN Recipe details.pdf
- 15:21, 5 September 2012 Biljana talk contribs uploaded File:SiNRecipedetails.pdf
- 14:54, 5 September 2012 Biljana talk contribs uploaded File:Recipes.pdf
- 09:21, 16 August 2012 Biljana talk contribs uploaded File:Advanced PECVD2 Nitride 2 deposition.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
- 17:35, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
- 15:43, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition-PECVD 1.pdf
- 15:42, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition-PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiO2 deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiN deposition PECVD 1.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN deposition.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 LS SiN deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 Standard plasma clean.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiN deposition in PECVD 1.pdf
- 11:20, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 Standard recipes.pdf
- 10:54, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiN data-particles, thickness, index.pdf
- 10:52, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 17:33, 13 August 2012 Biljana talk contribs uploaded File:PM1O2 Etch 60min 200C.pdf
- 17:28, 13 August 2012 Biljana talk contribs uploaded File:O2etch 15min 30C.pdf
- 17:26, 13 August 2012 Biljana talk contribs uploaded File:Recipe6.pdf
- 17:25, 13 August 2012 Biljana talk contribs uploaded File:Recipe 6.pdf
- 17:22, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 2min 30C.pdf
- 17:18, 13 August 2012 Biljana talk contribs uploaded a new version of File:PM1 O2 Etch 60min 200C.pdf
- 17:18, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 60min 200C.pdf
- 17:17, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 30min 200C.pdf
- 17:15, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 30C.pdf
- 17:13, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 200C.pdf
- 17:10, 13 August 2012 Biljana talk contribs uploaded File:PM1 InP Etch 200C H2 Ar Std.pdf
- 17:06, 13 August 2012 Biljana talk contribs uploaded File:InP 200C Standard.pdf
- 16:55, 13 August 2012 Biljana talk contribs uploaded File:ICP II SiN and SiO2 etch rates.pdf
- 16:49, 13 August 2012 Biljana talk contribs uploaded File:Vik's recipe.pdf
- 16:44, 13 August 2012 Biljana talk contribs uploaded File:Bill's recipe.pdf
- 11:20, 13 August 2012 Biljana talk contribs uploaded File:SiO2 and SIN calibrated etches.pdf
- 11:11, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating Manual.pdf
- 11:09, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating MAnual.pdf
- 10:29, 13 August 2012 Biljana talk contribs uploaded File:Recipe 109.pdf
- 10:29, 13 August 2012 Biljana talk contribs uploaded File:Recipe 108.pdf
- 10:19, 13 August 2012 Biljana talk contribs uploaded File:Recipe 107.pdf
- 10:12, 13 August 2012 Biljana talk contribs uploaded a new version of File:Recipe 106.pdf
- 10:12, 13 August 2012 Biljana talk contribs uploaded File:Recipe 106.pdf
- 10:06, 13 August 2012 Biljana talk contribs uploaded File:O2+CF4.pdf
- 10:00, 13 August 2012 Biljana talk contribs uploaded File:Recipe 104.pdf
- 09:53, 13 August 2012 Biljana talk contribs uploaded File:Recipe 103.pdf
- 09:53, 13 August 2012 Biljana talk contribs uploaded File:Recipe 102.pdf
- 09:50, 13 August 2012 Biljana talk contribs uploaded File:Recipe 101.pdf
- 09:50, 13 August 2012 Biljana talk contribs uploaded File:Recipe 100.pdf
- 16:53, 10 August 2012 Biljana talk contribs uploaded File:SiN etch.pdf
- 16:50, 10 August 2012 Biljana talk contribs uploaded File:CF4O2clean.pdf
- 16:42, 10 August 2012 Biljana talk contribs uploaded File:SiO2 clnct.pdf
- 16:39, 10 August 2012 Biljana talk contribs uploaded File:SiO2cclnct.pdf
- 16:35, 10 August 2012 Biljana talk contribs uploaded File:O2clean.pdf
- 16:30, 10 August 2012 Biljana talk contribs uploaded File:O2clean with CF4 coat.pdf
- 16:29, 10 August 2012 Biljana talk contribs uploaded File:SiO2 vert.pdf
- 16:25, 10 August 2012 Biljana talk contribs uploaded File:Ar-CHF3 line purge.pdf
- 16:20, 10 August 2012 Biljana talk contribs uploaded File:CF4-O2 clean.pdf
- 15:56, 10 August 2012 Biljana talk contribs uploaded File:ICP-Etch-1-Operating-Manual.pdf
- 15:17, 10 August 2012 Biljana talk contribs uploaded File:Recipe 309.pdf
- 15:16, 10 August 2012 Biljana talk contribs uploaded File:Recipe 183.pdf
- 15:06, 10 August 2012 Biljana talk contribs uploaded a new version of File:Recipe 151.pdf
- 15:06, 10 August 2012 Biljana talk contribs uploaded File:Recipe 151.pdf
- 15:49, 9 August 2012 Biljana talk contribs uploaded File:Recipe 155.pdf
- 15:48, 9 August 2012 Biljana talk contribs uploaded File:Recipe 144.pdf
- 15:43, 9 August 2012 Biljana talk contribs uploaded File:Recipe 123.pdf
- 15:41, 9 August 2012 Biljana talk contribs uploaded File:Recipe 122.pdf
- 12:04, 9 August 2012 Biljana talk contribs uploaded a new version of File:Recipe 117.pdf
- 12:04, 9 August 2012 Biljana talk contribs uploaded File:Recipe 117.pdf