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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 13:53, 7 April 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 April 2014.pdf
- 13:51, 7 April 2014 Biljana talk contribs uploaded File:ADV OXIDE data April 2014.pdf
- 13:49, 7 April 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data April 2014.pdf
- 10:26, 2 April 2014 Biljana talk contribs uploaded File:New IBD TiO2 deposition.pdf
- 10:23, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:22, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:16, 2 April 2014 Biljana talk contribs uploaded File:IBD TiO2 Data March 2014.pdf
- 15:59, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 Data March 2014.pdf
- 14:42, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 deposition details.pdf
- 13:56, 1 April 2014 Biljana talk contribs uploaded File:IBD SiN Data March 2014.pdf
- 13:21, 1 April 2014 Biljana talk contribs uploaded File:IBD SiNdeposition.pdf
- 16:50, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Data March 2014.pdf
- 15:05, 31 March 2014 Biljana talk contribs uploaded File:New IBD SiO2 Standard Recipe.pdf
- 14:58, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Standard Recipe.pdf
- 13:36, 31 March 2014 Biljana talk contribs uploaded File:Thermal Evaporator2.pdf
- 11:56, 31 March 2014 Biljana talk contribs uploaded File:SFI Sputter.pdf
- 11:45, 31 March 2014 Biljana talk contribs uploaded File:AET RTA Operating Instructions.pdf
- 10:37, 31 March 2014 Biljana talk contribs uploaded File:New Advanced PECVD-LS Nitride2 300C standard recipe.pdf
- 10:35, 31 March 2014 Biljana talk contribs uploaded File:New Advanced PECVD OXIDE 300C standard recipe.pdf
- 10:25, 31 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C Standard Recipe.pdf
- 10:24, 31 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C Standard Recipe.pdf
- 10:18, 31 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-LS Nitride2 300C standard recipe.pdf
- 10:07, 31 March 2014 Biljana talk contribs uploaded File:RIE 3 Operationing instructions.pdf
- 10:03, 31 March 2014 Biljana talk contribs uploaded File:New Operating Instructions Ebeam.pdf
- 16:33, 27 March 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 March 2014.pdf
- 16:52, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf
- 16:50, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:47, 24 March 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data March 2014.pdf
- 16:39, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:37, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe.pdf
- 15:32, 24 March 2014 Biljana talk contribs uploaded File:NEw Advanced PECVD OXIDE 300C standard recipe.pdf
- 14:57, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD OXIDE 300C standard recipe.pdf
- 14:31, 24 March 2014 Biljana talk contribs uploaded File:ADV. PECVD OXIDE data-March 2014.pdf
- 12:00, 24 March 2014 Biljana talk contribs uploaded File:Operating Ebeam1-2.pdf
- 16:34, 21 March 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 1000A.pdf
- 12:06, 21 March 2014 Biljana talk contribs uploaded File:PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf
- 08:51, 21 March 2014 Biljana talk contribs uploaded File:ALD operating instructions-1.pdf
- 16:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
- 15:39, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-1000A Standard recipe.pdf
- 15:35, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Data-March 2014 SIN data.pdf
- 14:12, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness and index uniformity March 2014.pdf
- 14:05, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN Thickness &index uniformity March 2014.pdf
- 14:02, 20 March 2014 Biljana talk contribs uploaded a new version of File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
- 13:59, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
- 13:46, 20 March 2014 Biljana talk contribs uploaded File:PECVD1 Operating Instructions.pdf
- 12:12, 20 March 2014 Biljana talk contribs uploaded File:New PECVD1 SIN Data-March 2014 SIN data.pdf
- 12:08, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A.pdf
- 16:20, 19 March 2014 Biljana talk contribs uploaded File:SiO2 100% SiH4 HDR 50C.pdf
- 14:55, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Data-March 2014.pdf
- 14:43, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe.pdf
- 17:02, 13 March 2014 Biljana talk contribs uploaded File:ADV.PECVD OXIDE-March 2014.pdf
- 16:36, 13 March 2014 Biljana talk contribs uploaded File:ADV OXIDE data.pdf
- 12:06, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
- 11:20, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
- 10:07, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
- 10:00, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014.pdf
- 09:37, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN data.pdf
- 17:09, 12 March 2014 Biljana talk contribs uploaded File:PECVD1 SiN data-February 2014 AFM roughness.pdf
- 16:53, 12 March 2014 Biljana talk contribs uploaded File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
- 09:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 09:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 11:01, 21 August 2013 Biljana talk contribs deleted page File:Panasonic1-SiO-Etch-SEM.pdf (Deleted old revision 20130821175255!Panasonic1-SiO-Etch-SEM.pdf)
- 11:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:52, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 16:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 16:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 16:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 16:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-100C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-50C.pdf
- 16:53, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
- 16:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
- 16:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
- 16:14, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
- 16:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 15:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 15:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 15:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 15:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 15:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 13:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 11:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 11:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
- 16:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf