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(newest | oldest) View (newer 100 | older 100) (20 | 50 | 100 | 250 | 500)- 17:02, 13 March 2014 Biljana talk contribs uploaded File:ADV.PECVD OXIDE-March 2014.pdf
- 16:36, 13 March 2014 Biljana talk contribs uploaded File:ADV OXIDE data.pdf
- 12:06, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
- 11:20, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
- 10:07, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014 SiN 1000A.pdf
- 10:00, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014.pdf
- 09:37, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN data.pdf
- 17:09, 12 March 2014 Biljana talk contribs uploaded File:PECVD1 SiN data-February 2014 AFM roughness.pdf
- 16:53, 12 March 2014 Biljana talk contribs uploaded File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
- 09:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 09:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 11:01, 21 August 2013 Biljana talk contribs deleted page File:Panasonic1-SiO-Etch-SEM.pdf (Deleted old revision 20130821175255!Panasonic1-SiO-Etch-SEM.pdf)
- 11:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:52, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 10:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 16:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 16:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 16:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 16:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-100C.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-50C.pdf
- 16:53, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
- 16:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
- 16:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
- 16:14, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
- 16:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 16:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 15:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 15:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 15:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 15:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 15:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 13:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 11:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 11:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
- 16:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf
- 16:38, 5 September 2012 Biljana talk contribs uploaded File:IBD film data.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD SiN recipe details.pdf
- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD materials table.pdf
- 16:28, 5 September 2012 Biljana talk contribs uploaded File:SiNrecipedetails.pdf
- 16:22, 5 September 2012 Biljana talk contribs uploaded File:SiNfilm.pdf
- 15:57, 5 September 2012 Biljana talk contribs uploaded File:SiN Recipe details.pdf
- 15:21, 5 September 2012 Biljana talk contribs uploaded File:SiNRecipedetails.pdf
- 14:54, 5 September 2012 Biljana talk contribs uploaded File:Recipes.pdf
- 09:21, 16 August 2012 Biljana talk contribs uploaded File:Advanced PECVD2 Nitride 2 deposition.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
- 17:35, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-120W-low stress.pdf
- 15:43, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition-PECVD 1.pdf
- 15:42, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition-PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiO2 deposition PECVD 1.pdf
- 15:39, 14 August 2012 Biljana talk contribs uploaded File:Standard SiN deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiO2 deposition PECVD 1.pdf
- 14:21, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe SiN deposition PECVD 1.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 Data-particles, thickness, index.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN deposition.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 LS SiN deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiO2 deposition.pdf
- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 Standard plasma clean.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiO2 deposition in PECVD 1.pdf
- 11:25, 14 August 2012 Biljana talk contribs uploaded File:Standard recipe for SiN deposition in PECVD 1.pdf
- 11:20, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 Standard recipes.pdf
- 10:54, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiN data-particles, thickness, index.pdf
- 10:52, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 17:33, 13 August 2012 Biljana talk contribs uploaded File:PM1O2 Etch 60min 200C.pdf
- 17:28, 13 August 2012 Biljana talk contribs uploaded File:O2etch 15min 30C.pdf
- 17:26, 13 August 2012 Biljana talk contribs uploaded File:Recipe6.pdf
- 17:25, 13 August 2012 Biljana talk contribs uploaded File:Recipe 6.pdf
- 17:22, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 2min 30C.pdf
- 17:18, 13 August 2012 Biljana talk contribs uploaded a new version of File:PM1 O2 Etch 60min 200C.pdf
- 17:18, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 60min 200C.pdf
- 17:17, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 30min 200C.pdf
- 17:15, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 30C.pdf
- 17:13, 13 August 2012 Biljana talk contribs uploaded File:PM1 O2 Etch 15min 200C.pdf
- 17:10, 13 August 2012 Biljana talk contribs uploaded File:PM1 InP Etch 200C H2 Ar Std.pdf
- 17:06, 13 August 2012 Biljana talk contribs uploaded File:InP 200C Standard.pdf
- 16:55, 13 August 2012 Biljana talk contribs uploaded File:ICP II SiN and SiO2 etch rates.pdf
- 16:49, 13 August 2012 Biljana talk contribs uploaded File:Vik's recipe.pdf
- 16:44, 13 August 2012 Biljana talk contribs uploaded File:Bill's recipe.pdf
- 11:20, 13 August 2012 Biljana talk contribs uploaded File:SiO2 and SIN calibrated etches.pdf
- 11:11, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating Manual.pdf
- 11:09, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating MAnual.pdf
- 10:29, 13 August 2012 Biljana talk contribs uploaded File:Recipe 109.pdf
- 10:29, 13 August 2012 Biljana talk contribs uploaded File:Recipe 108.pdf
- 10:19, 13 August 2012 Biljana talk contribs uploaded File:Recipe 107.pdf