Uploads by John d
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This special page shows all uploaded files.
| Date | Name | Thumbnail | Size | Description | Versions |
|---|---|---|---|---|---|
| 16:23, 13 March 2023 | Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx (file) |  |
1.47 MB | one user had "corrupt file" problem, but was ok for me. re-uploading just in case. | 2 |
| 12:46, 20 January 2023 | Oxford-ICP-Etch Process Control Data Example.jpg (file) |  |
144 KB | 1 | |
| 12:34, 20 January 2023 | ICP2 Process Control Data Example.jpg (file) |  |
118 KB | 1 | |
| 12:16, 20 January 2023 | ICP1 Process Control Data Example.jpg (file) |  |
122 KB | 1 | |
| 12:06, 20 January 2023 | FL-ICP Process Control Data Example.jpg (file) |  |
138 KB | 1 | |
| 15:29, 3 January 2023 | MA6-FrontBack AlignMarks only.gds (file) | |
4 KB | CAD File for front/back alignment marks on Contact Aligner | 1 |
| 15:26, 3 January 2023 | Contact-AlignFront.gds (file) | |
2 KB | CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" | 1 |
| 15:25, 3 January 2023 | EBL-GlobalMulti NEG.gds (file) | |
980 bytes | CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" | 1 |
| 15:23, 3 January 2023 | EBL-GlobalMulti POS.gds (file) | |
1 KB | EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" | 1 |
| 15:22, 3 January 2023 | GCA stepper align.gds (file) | |
2 KB | GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" | 1 |
| 11:34, 6 December 2022 | UCSB ASML DUV Stepper - Programming Worksheet.pptx (file) | |
1.11 MB | Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. | 1 |
| 12:14, 1 December 2022 | AXP4000pb-Datasheet.pdf (file) |  |
1.86 MB | New datasheet, actually the "addiitonal information" sheet from Microchem Includes spin curves for ALL 4000 series PR's. from here: https://www.microchemicals.com/products/photoresists/az_p4110.html | 2 |
| 09:58, 9 September 2022 | QSF-SOP-020 Policy Guidelines and CHP Rev 2.022.pdf (file) | |
5.84 MB | CC-PRIME Onboarding - safety training doc for QSF | 1 |
| 12:54, 26 August 2022 | Amscope 02 annot camera link.png (file) |  |
37 KB | 1 | |
| 12:50, 26 August 2022 | Microscope 4 Nikon - camera shutter - IMG 6249 - right side knobs - camera shutter - 800px.png (file) |  |
640 KB | 1 | |
| 12:43, 26 August 2022 | AmScope 01 AmScope Icon.png (file) |  |
10 KB | 1 | |
| 12:34, 26 August 2022 | AmScope - Layers Merge - annot.png (file) |  |
73 KB | 1 | |
| 12:30, 26 August 2022 | AmScope - 06 chose mic2-150x annot.png (file) |  |
146 KB | 1 | |
| 12:27, 26 August 2022 | AmScope - 02 annot.png (file) |  |
34 KB | 1 | |
| 12:24, 3 August 2022 | CC-PRIME - Parking Lot 10 and CNSI - Annotated.png (file) |  |
495 KB | 1 | |
| 08:52, 2 August 2022 | Directions to NanoFab - ESB map + P10 parking - Geo MapDev.png (file) |  |
144 KB | 1 | |
| 08:04, 6 July 2022 | Microscopes - DIC filters and light path.png (file) |  |
1.25 MB | 1 | |
| 07:49, 6 July 2022 | Microscopes - Filter Out position-detent.png (file) |  |
977 KB | 1 | |
| 03:02, 27 June 2022 | TOOL template - example image.png (file) |  |
384 KB | example of the tool infobox | 1 |
| 20:42, 19 May 2022 | Oxford InP 60C XS05.jpg (file) |  |
51 KB | 1 | |
| 20:41, 19 May 2022 | Oxford InP 60C 45DEG05.jpg (file) |  |
118 KB | 1 | |
| 20:39, 19 May 2022 | Oxford InP 60C 45DEG02.jpg (file) |  |
146 KB | 1 | |
| 12:51, 31 March 2022 | IBD SiO-FP - long 1100nm - Reflectivity Spectrum (EMpy).png (file) | .png) |
60 KB | fixed "110nm" to "1100nm" | 2 |
| 12:43, 31 March 2022 | IBD 9-period DBR - Reflectivity Spectrum (EMpy).png (file) | .png) |
56 KB | 1 | |
| 09:35, 1 March 2022 | LatticeAx.jpg (file) |  |
2.01 MB | Image of PELCO LAtticeAx tool | 1 |
| 11:47, 14 February 2022 | ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (file) | |
11 KB | More comments to help users fill this out. | 7 |
| 23:03, 13 January 2022 | 2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (file) | |
1.53 MB | Oxford ICP Etch Cals03 | 1 |
| 22:55, 13 January 2022 | 2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (file) | |
1.11 MB | Oxford ICP Cal SEMs | 1 |
| 22:51, 13 January 2022 | 2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (file) | |
1.13 MB | Oxford ICP Etch Cal SEMs | 1 |
| 12:50, 4 January 2022 | ADT Dicing - Blade Exposure diagram.png (file) |  |
196 KB | 1 | |
| 16:10, 21 December 2021 | Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (file) | .png) |
543 KB | Added scale bars 200µm | 2 |
| 12:15, 8 December 2021 | MA-6 4-inch BSA chuck - 2631 - measurements.jpg (file) |  |
1.11 MB | 1 | |
| 15:07, 18 November 2021 | Surfscan Low-Particle Example - G2.png (file) |  |
783 KB | 1 | |
| 15:05, 18 November 2021 | Surfscan Low-Particle Example - G4.png (file) |  |
858 KB | 1 | |
| 08:51, 1 November 2021 | MLA Quarter-Wafer Alignment.jpg (file) |  |
320 KB | Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better. | 2 |
| 11:49, 12 October 2021 | Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg (file) |  |
1.86 MB | 1 | |
| 10:42, 29 September 2021 | OxfordPlasmaPro.jpg (file) |  |
33 KB | shrunk to 400px | 2 |
| 17:23, 21 September 2021 | CAD Tutorial for ASML Reticle v1 GDS.gds (file) | |
4 KB | 1 | |
| 15:38, 9 September 2021 | GCA Local Alignment Mark Dotted.gds (file) | |
62 KB | 1 | |
| 15:36, 9 September 2021 | GCA Local Alignment Mark.gds (file) | |
2 KB | 1 | |
| 15:27, 9 September 2021 | GCA Global Mark.gds (file) | |
2 KB | 1 | |
| 12:55, 3 September 2021 | Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (file) |  |
210 KB | v2 - indicated when PR was fully removed | 2 |
| 14:15, 4 August 2021 | GCA Stepper MaskPlate Master-DarkField 5x.gds (file) | |
216 KB | GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. | 1 |
| 10:46, 13 July 2021 | 200um square v1.gds (file) | |
170 bytes | TESTING only - please delte | 1 |
| 11:36, 2 July 2021 | RechargeApp - 02 - F+A auto v2.png (file) |  |
301 KB | 1 |
