Help
Uploads by Biljana
Jump to navigation
Jump to search
This special page shows all uploaded files.
File list
Items per page:
20
50
100
250
500
Search for media name:
Username:
Include old versions of files
Go
First page
Previous page
Next page
Last page
Date
Name
Thumbnail
Size
Description
Versions
15:42, 15 April 2014
PECVD1-SiO2-standard recipe 2014.pdf
(
file
)
299 KB
1
11:22, 10 December 2014
PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
(
file
)
299 KB
1
10:53, 1 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe.pdf
(
file
)
1.24 MB
1
15:24, 10 October 2014
PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf
(
file
)
1.24 MB
1
09:55, 11 September 2013
PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
(
file
)
130 KB
1
12:06, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014-1 SiO2 1000A.pdf
(
file
)
113 KB
1
11:20, 13 March 2014
PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
(
file
)
112 KB
1
14:14, 7 April 2020
PECVD1-cleaning.png
(
file
)
1.79 MB
1
13:46, 20 March 2014
PECVD1 Operating Instructions.pdf
(
file
)
64 KB
1
14:02, 20 March 2014
PECVD1 SIN 2-pt Thickness-index uniformity March 2014.pdf
(
file
)
82 KB
2
16:59, 20 March 2014
PECVD1 SIN 2-pt Thickness uniformity March 2014.pdf
(
file
)
62 KB
1
15:29, 15 April 2014
PECVD1 SIN Data-April 2014 SIN data.pdf
(
file
)
117 KB
1
15:35, 20 March 2014
PECVD1 SIN Data-March 2014 SIN data.pdf
(
file
)
117 KB
1
14:05, 20 March 2014
PECVD1 SIN Thickness &index uniformity March 2014.pdf
(
file
)
103 KB
1
14:12, 20 March 2014
PECVD1 SIN Thickness and index uniformity March 2014.pdf
(
file
)
94 KB
1
17:09, 12 March 2014
PECVD1 SiN data-February 2014 AFM roughness.pdf
(
file
)
156 KB
1
15:44, 15 April 2014
PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf
(
file
)
116 KB
1
12:06, 21 March 2014
PECVD1 SiO2 Data-March 2014 SiO2 Data.pdf
(
file
)
116 KB
1
09:50, 7 April 2020
PECVD1 particulates in 2019.jpg
(
file
)
6.68 MB
1
11:59, 3 October 2012
PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
41 KB
1
11:55, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
(
file
)
42 KB
1
12:00, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
(
file
)
42 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
(
file
)
41 KB
1
12:06, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
(
file
)
42 KB
1
12:17, 3 October 2012
PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
375 KB
1
12:12, 3 October 2012
PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
(
file
)
41 KB
1
15:36, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
34 KB
1
15:38, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
(
file
)
34 KB
1
16:53, 3 October 2012
PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
(
file
)
658 KB
1
16:08, 3 October 2012
PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
34 KB
1
16:11, 3 October 2012
PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
35 KB
1
16:14, 3 October 2012
PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
35 KB
1
16:48, 3 October 2012
PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
(
file
)
700 KB
1
15:48, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
(
file
)
34 KB
1
15:49, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
(
file
)
34 KB
1
16:36, 3 October 2012
PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
(
file
)
706 KB
1
16:09, 3 October 2012
PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
41 KB
1
16:09, 3 October 2012
PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
(
file
)
35 KB
1
15:55, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
(
file
)
35 KB
1
15:56, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
(
file
)
35 KB
1
13:50, 3 October 2012
PECVD2-SiO2-HDR-100% SiH4.pdf
(
file
)
39 KB
1
13:41, 3 October 2012
PECVD2-SiO2-LDR-100% SiH4.pdf
(
file
)
39 KB
1
13:46, 3 October 2012
PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
(
file
)
446 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-100C.pdf
(
file
)
41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-250C.pdf
(
file
)
41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-50C.pdf
(
file
)
41 KB
1
14:24, 7 April 2020
PECVD2 clean.png
(
file
)
1.59 MB
1
14:32, 7 April 2020
PECVD2 photo for cleaning.png
(
file
)
1.88 MB
1
11:00, 21 August 2013
Panasonic1-SiO-Etch-SEM.pdf
(
file
)
48 KB
2
First page
Previous page
Next page
Last page
Navigation menu
Personal tools
Create account
Log in
Namespaces
Special page
Variants
Views
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
User contributions
Logs
View user groups
Special pages
Printable version