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Date Name Thumbnail Size Description Versions
15:38, 3 October 2012 PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:08, 3 October 2012 PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:48, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (file) 34 KB   1
15:49, 3 October 2012 PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (file) 34 KB   1
16:11, 3 October 2012 PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
16:09, 3 October 2012 PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:55, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
15:56, 3 October 2012 PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (file) 35 KB   1
16:14, 3 October 2012 PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (file) 35 KB   1
11:56, 31 March 2014 SFI Sputter.pdf (file) 35 KB   1
16:54, 20 August 2013 Standard recipe SiN-PECVD.pdf (file) 36 KB   1
16:54, 20 August 2013 Standard recipe SiO2-PECVD.pdf (file) 36 KB   1
10:32, 27 December 2018 STD LSNitride2 recipe new info.pdf (file) 37 KB   2
13:50, 3 October 2012 PECVD2-SiO2-HDR-100% SiH4.pdf (file) 39 KB   1
13:41, 3 October 2012 PECVD2-SiO2-LDR-100% SiH4.pdf (file) 39 KB   1
13:36, 31 March 2014 Thermal Evaporator2.pdf (file) 40 KB   1
16:36, 20 August 2013 Gas Change CHF3-Ar-3.pdf (file) 40 KB   1
14:57, 24 March 2014 Advanced PECVD OXIDE 300C standard recipe.pdf (file) 40 KB   1
16:38, 20 August 2013 Gas Change CF4-SF6-CF4.pdf (file) 40 KB   1
09:36, 27 May 2020 Advanced Vacuum PECVD.pdf (file) 41 KB   1
10:10, 27 May 2020 SOP for Advanced Vacuum PECVD.pdf (file) 41 KB 5-27-2020 Biljana Stamenic 1
10:35, 31 March 2014 New Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
15:32, 24 March 2014 NEw Advanced PECVD OXIDE 300C standard recipe.pdf (file) 41 KB   1
16:25, 8 April 2014 Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf (file) 41 KB   1
16:50, 24 March 2014 Advanced PECVD-Nitride2 300C standard recipe.pdf (file) 41 KB   3
16:52, 24 March 2014 Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf (file) 41 KB   1
16:24, 8 April 2014 Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf (file) 41 KB   1
12:12, 3 October 2012 PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
10:25, 31 March 2014 Advanced PECVD-Nitride2 300C Standard Recipe.pdf (file) 41 KB   2
16:09, 3 October 2012 PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-100C.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-250C.pdf (file) 41 KB   1
16:57, 8 April 2014 New Advanced PECVD-Nitride2 300C standard recipe.pdf (file) 41 KB   1
11:59, 3 October 2012 PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
15:52, 10 October 2012 PECVD2-SiO2Recipe-5W-50C.pdf (file) 41 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (file) 41 KB   1
16:00, 10 October 2012 SiO2 film Unaxis ICP vs PECVD I.pdf (file) 41 KB   1
12:05, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (file) 41 KB   1
11:55, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (file) 42 KB   1
10:18, 31 March 2014 Advanced PECVD-LS Nitride2 300C standard recipe.pdf (file) 42 KB   1
16:26, 8 April 2014 Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf (file) 42 KB   1
10:37, 31 March 2014 New Advanced PECVD-LS Nitride2 300C standard recipe.pdf (file) 42 KB   1
16:20, 19 March 2014 SiO2 100% SiH4 HDR 50C.pdf (file) 42 KB   1
12:06, 3 October 2012 PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
12:00, 3 October 2012 PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (file) 42 KB   1
09:15, 16 April 2014 AdvPECVD OXIDE 300C standard recipe.pdf (file) 42 KB   1
09:11, 16 April 2014 AdvPECVD-Nitride2 300C standard recipe.pdf (file) 42 KB   1
09:18, 16 April 2014 AdvPECVD-LS Nitride2 300C standard recipe.pdf (file) 43 KB   1
09:03, 24 March 2020 Autostep main computer switch.png (file) 43 KB   1
15:09, 26 March 2020 Autostep 200 panel door.png (file) 47 KB   1
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