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13:20, 24 March 2020
RMS control.png
(
file
)
26 KB
1
13:15, 24 March 2020
Autostep DSW.png
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file
)
26 KB
1
11:54, 29 December 2023
GCA 6300 Programming a Job 7.docx
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file
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28 KB
1
10:54, 24 May 2017
Thermal evaporator 2 Sheet1.pdf
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file
)
31 KB
1
12:29, 29 December 2023
GCA 6300 Shutdown and Start up.pdf
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file
)
32 KB
1
11:45, 31 March 2014
AET RTA Operating Instructions.pdf
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file
)
34 KB
1
15:36, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
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file
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34 KB
1
15:38, 3 October 2012
PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
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file
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34 KB
1
16:08, 3 October 2012
PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
)
34 KB
1
15:48, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
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file
)
34 KB
1
15:49, 3 October 2012
PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
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file
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34 KB
1
16:11, 3 October 2012
PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
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35 KB
1
16:09, 3 October 2012
PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
)
35 KB
1
15:55, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
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file
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35 KB
1
15:56, 3 October 2012
PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
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file
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35 KB
1
16:14, 3 October 2012
PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
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file
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35 KB
1
11:56, 31 March 2014
SFI Sputter.pdf
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file
)
35 KB
1
16:54, 20 August 2013
Standard recipe SiN-PECVD.pdf
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file
)
36 KB
1
16:54, 20 August 2013
Standard recipe SiO2-PECVD.pdf
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file
)
36 KB
1
10:32, 27 December 2018
STD LSNitride2 recipe new info.pdf
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file
)
37 KB
2
13:50, 3 October 2012
PECVD2-SiO2-HDR-100% SiH4.pdf
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file
)
39 KB
1
13:41, 3 October 2012
PECVD2-SiO2-LDR-100% SiH4.pdf
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file
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39 KB
1
13:36, 31 March 2014
Thermal Evaporator2.pdf
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file
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40 KB
1
16:36, 20 August 2013
Gas Change CHF3-Ar-3.pdf
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file
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40 KB
1
14:57, 24 March 2014
Advanced PECVD OXIDE 300C standard recipe.pdf
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file
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40 KB
1
16:38, 20 August 2013
Gas Change CF4-SF6-CF4.pdf
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file
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40 KB
1
09:36, 27 May 2020
Advanced Vacuum PECVD.pdf
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file
)
41 KB
1
10:10, 27 May 2020
SOP for Advanced Vacuum PECVD.pdf
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file
)
41 KB
5-27-2020 Biljana Stamenic
1
10:35, 31 March 2014
New Advanced PECVD OXIDE 300C standard recipe.pdf
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file
)
41 KB
1
15:32, 24 March 2014
NEw Advanced PECVD OXIDE 300C standard recipe.pdf
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file
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41 KB
1
16:25, 8 April 2014
Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
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file
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41 KB
1
16:50, 24 March 2014
Advanced PECVD-Nitride2 300C standard recipe.pdf
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file
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41 KB
3
16:52, 24 March 2014
Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf
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file
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41 KB
1
16:24, 8 April 2014
Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
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file
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41 KB
1
12:12, 3 October 2012
PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
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file
)
41 KB
1
10:25, 31 March 2014
Advanced PECVD-Nitride2 300C Standard Recipe.pdf
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file
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41 KB
2
16:09, 3 October 2012
PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
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file
)
41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-100C.pdf
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file
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41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-250C.pdf
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file
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41 KB
1
16:57, 8 April 2014
New Advanced PECVD-Nitride2 300C standard recipe.pdf
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file
)
41 KB
1
11:59, 3 October 2012
PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
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file
)
41 KB
1
15:52, 10 October 2012
PECVD2-SiO2Recipe-5W-50C.pdf
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file
)
41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
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file
)
41 KB
1
16:00, 10 October 2012
SiO2 film Unaxis ICP vs PECVD I.pdf
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file
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41 KB
1
12:05, 3 October 2012
PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
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file
)
41 KB
1
11:55, 3 October 2012
PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
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file
)
42 KB
1
10:18, 31 March 2014
Advanced PECVD-LS Nitride2 300C standard recipe.pdf
(
file
)
42 KB
1
16:26, 8 April 2014
Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
(
file
)
42 KB
1
10:37, 31 March 2014
New Advanced PECVD-LS Nitride2 300C standard recipe.pdf
(
file
)
42 KB
1
16:20, 19 March 2014
SiO2 100% SiH4 HDR 50C.pdf
(
file
)
42 KB
1
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