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- 13:24, 9 July 2012 diff hist -47 Vacuum Deposition Recipes →Recipes
- 13:23, 9 July 2012 diff hist +664 Vacuum Deposition Recipes →Plasma Enhanced Chemical Vapor Deposition (PECVD)
- 13:16, 9 July 2012 diff hist +52 Vacuum Deposition Recipes
- 13:14, 9 July 2012 diff hist +26 Vacuum Deposition Recipes
- 13:14, 9 July 2012 diff hist +11 Tool List
- 13:11, 9 July 2012 diff hist +527 Vacuum Deposition Recipes
- 13:08, 9 July 2012 diff hist +560 Vacuum Deposition Recipes →Plasma Enhanced Chemical Vapor Deposition (PECVD)
- 12:13, 9 July 2012 diff hist +1 Tool List →Dry Etch
- 12:13, 9 July 2012 diff hist +14 Tool List →Vacuum Deposition
- 11:42, 9 July 2012 diff hist -43 Lab Rules OLD 2018 →Communications and Internet Access
- 10:56, 9 July 2012 diff hist -88 Lab Rules OLD 2018 →Preparing Equipment for Entry into the Nanofab
- 10:45, 9 July 2012 diff hist +25 Vacuum Deposition Recipes →Recipe 1
- 10:44, 9 July 2012 diff hist +40 Vacuum Deposition Recipes
- 10:44, 9 July 2012 diff hist +30 Vacuum Deposition Recipes →E-Beam Evaporation
- 10:42, 9 July 2012 diff hist -114 Lab Rules OLD 2018 →General Nanofab Information
- 10:36, 9 July 2012 diff hist -3 Biljana Stamenic
- 10:36, 9 July 2012 diff hist -32 Biljana Stamenic
- 10:34, 9 July 2012 diff hist -30 Lab Rules OLD 2018 →Film
- 10:33, 9 July 2012 diff hist +454 Lab Rules OLD 2018 →Nanofab Apparel and Gloves
- 10:28, 9 July 2012 diff hist -9 Lab Rules OLD 2018 →Chemical Waste Disposal
- 10:26, 9 July 2012 diff hist -234 Lab Rules OLD 2018
- 10:20, 9 July 2012 diff hist +34,117 N Lab Rules OLD 2018 Created page with "While working in the Nanofab, you are surrounded by dangerous and deadly chemicals, gases, high voltages, radiation, and mechanical systems. The responsibility lies with users a…"
- 18:50, 3 July 2012 diff hist +22 Biljana Stamenic
- 19:26, 2 July 2012 diff hist +30 Staff List
- 17:28, 2 July 2012 diff hist +2 ICP-PECVD (Unaxis VLR)
- 17:28, 2 July 2012 diff hist +1 ICP-Etch (Unaxis VLR)
- 17:25, 2 July 2012 diff hist 0 N File:UnaxisICPInstructions.pdf current
- 17:24, 2 July 2012 diff hist +77 ICP-Etch (Unaxis VLR) →Detailed Specifications
- 17:21, 2 July 2012 diff hist +98 ICP-Etch (Unaxis VLR)
- 17:19, 2 July 2012 diff hist +1,445 N ICP-Etch (Unaxis VLR) Created page with "{{tool|{{PAGENAME}} |picture=UnaxisICP.jpg |type = Dry Etch |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = ? |manufacturer =…"
- 16:22, 2 July 2012 diff hist +1 E-Beam 3 (Temescal)
- 11:52, 2 July 2012 diff hist +48 Template:Nav
- 11:50, 2 July 2012 diff hist -14 Template:Links
- 11:50, 2 July 2012 diff hist +13 N File:StripAnnealer.jpg {{toolimage}} current
- 11:49, 2 July 2012 diff hist +1,187 N Strip Annealer Created page with "{{tool|{{PAGENAME}} |picture=StripAnnealer.jpg |type = Thermal Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 5 |email=bosch@ece.ucsb.edu |description = Str…"
- 11:44, 2 July 2012 diff hist -43 MediaWiki:Sidebar
- 11:43, 2 July 2012 diff hist +82 MediaWiki:Sidebar
- 11:42, 2 July 2012 diff hist +16 N Thermal Processing Recipes Created page with ".... =Recipes="
- 11:42, 2 July 2012 diff hist +16 N Wet Etching Recipes Created page with ".... =Recipes="
- 11:40, 2 July 2012 diff hist +248 N Lithography Recipes Created page with "{{WIP}} *ASML Recipes *GCA Stepper Recipes *Contact Lithography Recipes *Nanoimprint Recipes *Optical Bi-Layer Recipes *E-Beam Lithography Recipes …"
- 11:40, 2 July 2012 diff hist +79 MediaWiki:Sidebar
- 11:39, 2 July 2012 diff hist +3,822 N Dry Etching Recipes Created page with "{| border="1" class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" |-bgcolor="#D0E7FF" ! colspan=10 height…"
- 11:37, 2 July 2012 diff hist +2 Vacuum Deposition Recipes →Recipes
- 11:37, 2 July 2012 diff hist +49 Vacuum Deposition Recipes
- 11:36, 2 July 2012 diff hist +1 Vacuum Deposition Recipes →=E-Beam Evaporation
- 11:36, 2 July 2012 diff hist +220 Vacuum Deposition Recipes →Recipes
- 11:34, 2 July 2012 diff hist +20 Vacuum Deposition Recipes
- 11:34, 2 July 2012 diff hist +12,511 N Vacuum Deposition Recipes Created page with "{| border="1" class="collapsible wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" |-bgcolor="#D0E7FF" ! colspan=18 height=45 width=1575|…"
- 11:32, 2 July 2012 diff hist -30 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist +1 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist +29 MediaWiki:Sidebar
- 11:32, 2 July 2012 diff hist -66 MediaWiki:Sidebar
- 11:30, 2 July 2012 diff hist -44 MediaWiki:Sidebar
- 11:28, 2 July 2012 diff hist +288 Template:Nav
- 11:24, 2 July 2012 diff hist +13 N File:WaferThermco.jpg {{toolimage}} current
- 11:24, 2 July 2012 diff hist +1,067 N Tube Furnace Wafer Bonding (Thermco) Created page with "{{tool|{{PAGENAME}} |picture=WaferThermco.jpg |type = Thermal Processing |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 4 |email=silva@ece.ucsb.edu |description = Wafe…"
- 07:52, 2 July 2012 diff hist +13 N File:RTP.jpg {{toolimage}} current
- 07:51, 2 July 2012 diff hist -3 Rapid Thermal Processor (AET RX6)
- 07:49, 2 July 2012 diff hist +2,079 Rapid Thermal Processor (AET RX6)
- 07:40, 2 July 2012 diff hist +1,035 N Probe Station & Curve Tracer Created page with "{{tool|{{PAGENAME}} |picture=ProbeStation.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu …"
- 07:38, 2 July 2012 diff hist +13 N File:Dektak6M.jpg {{toolimage}} current
- 07:37, 2 July 2012 diff hist +1,651 N Step Profilometer (DektakXT) Created page with "{{tool|{{PAGENAME}} |picture=Dektak6M.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 3 |email=silva@ece.ucsb.edu |des…"
- 13:14, 1 July 2012 diff hist +13 N File:Dektak2A.jpg {{toolimage}} current
- 12:16, 1 July 2012 diff hist +8 N File:TartaricAcidMSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfuricAcidFuming.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfuricAcid93%MSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SulfamicAcidMSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +8 N File:SuccinicAcid99%MSDS.pdf {{MSDS}} current
- 12:15, 1 July 2012 diff hist +278 Chemical List - OLD 2018-09-05 →Acids
- 12:11, 1 July 2012 diff hist +7 N File:SelenousAcidMSDS.pdf {{MSDS}
- 12:11, 1 July 2012 diff hist +7 N File:OxalicAcidDihydrateMSDS.pdf {{MSDS}
- 12:11, 1 July 2012 diff hist +7 N File:MethacrylicAcidMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:LacticAcidMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:LacticAcidFractionalMSDS.pdf {{MSDS}
- 12:10, 1 July 2012 diff hist +7 N File:HydroiodicAcidMSDS.pdf {{MSDS}
- 12:09, 1 July 2012 diff hist +359 Chemical List - OLD 2018-09-05 →Acids
- 12:02, 1 July 2012 diff hist +8 N File:FormicAcidMSDS.pdf {{MSDS}} current
- 12:02, 1 July 2012 diff hist +8 N File:BoricAcidMSDS.pdf {{MSDS}} current
- 12:01, 1 July 2012 diff hist +96 Chemical List - OLD 2018-09-05 →Acids
- 11:33, 1 July 2012 diff hist +1,725 N Sputter 2 (SFI Endeavor) Created page with "{{tool|{{PAGENAME}} |picture=Sputter2.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 1 |email=lingg@ece.ucsb.edu |description = 3 chambe…"
- 11:25, 1 July 2012 diff hist +722 N Resistivity Mapper (CDE RESMAP) Created page with "{{tool|{{PAGENAME}} |picture=CDEResmap.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |de…"
- 11:19, 1 July 2012 diff hist +13 N File:VeecoNanoman.jpg {{toolimage}}
- 09:57, 1 July 2012 diff hist 0 Optical Film Thickness (Nanometric)
- 09:54, 1 July 2012 diff hist 0 Tool List →Inspection, Test and Characterization
- 09:54, 1 July 2012 diff hist +994 N Film Stress (Tencor Flexus) Created page with "{{tool|{{PAGENAME}} |picture=Tencor.jpg |type = Inspection, Test and Characterization |super=Mike Silva |phone=(805)839-3918x219 |location=Bay ? |email=silva@ece.ucsb.edu |descri…"
- 09:49, 1 July 2012 diff hist +1,087 N Optical Film Thickness (Filmetrics) Created page with "{{tool|{{PAGENAME}} |picture=Filmmetrics.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |…"
- 09:31, 1 July 2012 diff hist +1,055 N Ellipsometer (Woollam) Created page with "{{tool|{{PAGENAME}} |picture = Woollam.jpg |type = Inspection, Test and Characterization |super = Brian Thibeault |phone = (805)839-2268 |email = thibeault@ece.ucsb.edu |locatio…"
- 09:17, 1 July 2012 diff hist +16 Template:Tool
- 09:16, 1 July 2012 diff hist +84 Template:Tool
- 09:16, 1 July 2012 diff hist 0 File:OlympusLEXT.jpg uploaded a new version of "File:OlympusLEXT.jpg": removed border current
- 09:15, 1 July 2012 diff hist +13 N File:OlympusLEXT.jpg {{toolimage}}
- 09:15, 1 July 2012 diff hist +664 N Laser Scanning Confocal M-scope (Olympus LEXT) Created page with "{{tool|{{PAGENAME}} |picture=OlympusLEXT.jpg |type = Inspection, Test and Characterization |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu |…"
- 09:13, 1 July 2012 diff hist +23 Optical Film Thickness (Nanometric)
- 09:13, 1 July 2012 diff hist -1 Optical Film Thickness (Nanometric)
- 09:12, 1 July 2012 diff hist +13 N File:Nanometric.jpg {{toolimage}}
- 09:12, 1 July 2012 diff hist +1,587 N Optical Film Thickness (Nanometric) Created page with "{{tool|{{PAGENAME}} |picture=Nanometric.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |description = Reflectome…"
- 08:37, 1 July 2012 diff hist +13 N File:QFI.jpg {{toolimage}} current
- 08:32, 1 July 2012 diff hist +1,582 N IR Thermal Microscope (QFI) Created page with "{{tool|{{PAGENAME}} |picture=QFI.jpg |type = Inspection, Test and Characterization |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 2 |email=lingg@ece.ucsb.edu |descrip…"
- 08:30, 1 July 2012 diff hist -1 PECVD 1 (PlasmaTherm 790)
- 08:29, 1 July 2012 diff hist +1,041 N Field Emission SEM 2 (JEOL IT800SHL) Created page with "{{tool|{{PAGENAME}} |picture=JeolFesem.jpg |type = Inspection, Test and Characterization |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 1 |email=mitchell@ece.ucsb.edu …"
- 08:27, 1 July 2012 diff hist +1 Tool List →Inspection, Test and Characterization
- 08:23, 1 July 2012 diff hist +13 N File:Ellipsometer.jpg {{toolimage}} current
- 08:23, 1 July 2012 diff hist +1,101 N Ellipsometer (Rudolph) Created page with "{{tool|{{PAGENAME}} |picture=Ellipsometer.jpg |type = Inspection, Test and Characterization |super= Mike Silva |phone=(805)839-3918x219 |location=Bay ? |email=silva@ece.ucsb.edu …"
- 07:41, 1 July 2012 diff hist +13 N File:Ashers.jpg {{toolimage}} current
- 07:41, 1 July 2012 diff hist +1,349 N Ashers (Technics PEII) Created page with "{{tool|{{PAGENAME}} |picture=Ashers.jpg |type = Dry Etch |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 5 |email=abrahamsen@ece.ucsb.edu |description = Plasma Etc…"
- 07:37, 1 July 2012 diff hist +887 N Plasma Clean (Gasonics 2000) Created page with "{{tool|{{PAGENAME}} |picture=Gasonics.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 5 |email=silva@ece.ucsb.edu |description = Aura 2000-LL Downs…"
- 07:35, 1 July 2012 diff hist +13 N File:EVG.jpg {{toolimage}} current
- 07:35, 1 July 2012 diff hist +624 N Plasma Activation (EVG 810) Created page with "{{tool|{{PAGENAME}} |picture=EVG.jpg |type = Dry Etch |super= Aidan Hopkins |phone= 805-893-3918x208 |location=Bay 7 |email=hopkins@ece.ucsb.edu |description = Plasma Surface Act…"
- 07:31, 1 July 2012 diff hist -1 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 07:30, 1 July 2012 diff hist +13 N File:SiDeep.jpg {{toolimage}} current
- 07:29, 1 July 2012 diff hist +2 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 07:28, 1 July 2012 diff hist +2,946 N Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) Created page with "{{tool|{{PAGENAME}} |picture=RIE5.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = SiRIE Based Flour…"
- 07:22, 1 July 2012 diff hist +13 N File:CMP.jpg {{toolimage}} current
- 07:22, 1 July 2012 diff hist -1 Chemical-Mechanical Polisher (Logitech)
- 07:22, 1 July 2012 diff hist +936 N Chemical-Mechanical Polisher (Logitech) Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Wet Processing |phone=(805)839-3918x216 |location=Bay 5 |email=freeborn@ece.ucsb.edu |description = ORBIS Chemical …"
- 21:45, 30 June 2012 diff hist 0 Tool List →Dry Etch
- 21:45, 30 June 2012 diff hist +1 m Tool List →Dry Etch
- 21:44, 30 June 2012 diff hist -2 RIE 5 (PlasmaTherm)
- 21:44, 30 June 2012 diff hist +2,228 N RIE 5 (PlasmaTherm) Created page with "{{tool|{{PAGENAME}} |picture=RIE5.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = RIE #5 Programmab…"
- 21:41, 30 June 2012 diff hist -3 RIE 1 (Custom)
- 21:40, 30 June 2012 diff hist +1,404 N XeF2 Etch (Xetch) Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub> G…"
- 20:43, 30 June 2012 diff hist +40 Tool List
- 20:42, 30 June 2012 diff hist -272 PECVD 2 (Advanced Vacuum) →About
- 20:41, 30 June 2012 diff hist +1,162 N PECVD 2 (Advanced Vacuum) Created page with "{{tool|{{PAGENAME}} |picture=PECVD2.jpg |type = Vacuum Deposition |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = Vision 310 …"
- 20:34, 30 June 2012 diff hist +1,565 N Ion Beam Deposition (Veeco NEXUS) Created page with "{{tool|{{PAGENAME}} |picture=IBD.jpg |type = Vacuum Deposition |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 3 |email=silva@ece.ucsb.edu |description = Ion Beam Depos…"
- 19:24, 30 June 2012 diff hist +877 N Molecular Vapor Deposition Created page with "{{tool|{{PAGENAME}} |picture=MVD.jpg |type = Vacuum Deposition |super= Aidan Hopkins |phone=(805)839-3918x208 |location=Bay 4 |email=hopkins@ece.ucsb.edu |description = Molecular…"
- 16:32, 30 June 2012 diff hist +13 N File:FlexAL.jpg {{toolimage}}
- 16:32, 30 June 2012 diff hist +1,292 N Atomic Layer Deposition (Oxford FlexAL) Created page with "{{tool|{{PAGENAME}} |picture=FlexAL.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 2 |email=lingg@ece.ucsb.edu |description = Oxford Fle…"
- 16:28, 30 June 2012 diff hist 0 Tool List →Vacuum Deposition
- 16:24, 30 June 2012 diff hist +13 N File:JEOL.jpg {{toolimage}} current
- 16:23, 30 June 2012 diff hist -6 E-Beam Lithography System (JEOL JBX-6300FS)
- 16:22, 30 June 2012 diff hist +1,768 E-Beam Lithography System (JEOL JBX-6300FS) →See Also
- 16:19, 30 June 2012 diff hist +1,704 N E-Beam Lithography System (JEOL JBX-6300FS) Created page with "{{tool|{{PAGENAME}} |picture=AFMNanoman.jpg |type = Lithography |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 7 |email=mitchell@ece.ucsb.edu |description = Vector Sca…"
- 16:13, 30 June 2012 diff hist +1,568 N Atomic Force Microscope (Bruker ICON) Created page with "{{tool|{{PAGENAME}} |picture=AFMNanoman.jpg |type = Lithography |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 7 |email=mitchell@ece.ucsb.edu |description = Dimension …"
- 15:21, 30 June 2012 diff hist +1,160 N Wafer Bonder (SUSS SB6-8E) Created page with "{{tool|{{PAGENAME}} |picture=WaferBonder.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 7 |email=freeborn@ece.ucsb.edu |description = Karl Su…"
- 15:21, 30 June 2012 diff hist +13 N File:WaferBonder.jpg {{toolimage}} current
- 15:16, 30 June 2012 diff hist +1,743 N Contact Aligner (SUSS MA-6) Created page with "{{tool|{{PAGENAME}} |picture=ContactAligner.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 7 |email=freeborn@ece.ucsb.edu |description = Mask…"
- 15:04, 30 June 2012 diff hist +1 IR Aligner (SUSS MJB-3 IR) →Detailed Specifications
- 15:04, 30 June 2012 diff hist +2,798 N IR Aligner (SUSS MJB-3 IR) Created page with "{{tool|{{PAGENAME}} |picture=SussAlignerIR.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 6 |email=freeborn@ece.ucsb.edu |description = Mask …"
- 14:58, 30 June 2012 diff hist -1 File:SussAligner.jpg current
- 14:57, 30 June 2012 diff hist +14 N File:SussAligner.jpg {{toolimages}}
- 14:57, 30 June 2012 diff hist +2,232 N Suss Aligners (SUSS MJB-3) Created page with "{{tool|{{PAGENAME}} |picture=SussAligner.jpg |type = Lithography |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 6 |email=freeborn@ece.ucsb.edu |description = Mask Al…"
- 13:21, 30 June 2012 diff hist +149 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 12:56, 30 June 2012 diff hist -4 Chemical List - OLD 2018-09-05 →Other Chemicals
- 12:55, 30 June 2012 diff hist +8 N File:Technic25ESGoldPlatingSolution.pdf {{MSDS}} current
- 12:55, 30 June 2012 diff hist +8 N File:SilverEtchantTypeTFS.pdf {{MSDS}} current
- 12:55, 30 June 2012 diff hist +8 N File:SaturatedBromineWaterMSDS.pdf {{MSDS}} current
- 12:55, 30 June 2012 diff hist +8 N File:PC3-1500SpinOnGlassMSDS.pdf {{MSDS}} current
- 12:54, 30 June 2012 diff hist +8 N File:GenTak230MSDS.pdf {{MSDS}} current
- 12:54, 30 June 2012 diff hist +8 N File:GoldEtchantTypeTFAMSDS.pdf {{MSDS}} current
- 12:54, 30 June 2012 diff hist +8 N File:HydrogenPeroxideMSDS.pdf {{MSDS}} current
- 12:53, 30 June 2012 diff hist +8 N File:GenSolve500MSDS.pdf {{MSDS}} current
- 12:53, 30 June 2012 diff hist +8 N File:Crystalbond509MSDS.pdf {{MSDS}} current
- 12:52, 30 June 2012 diff hist +89 Chemical List - OLD 2018-09-05 →Other Chemicals
- 12:49, 30 June 2012 diff hist +8 N File:TolueneMSDS.pdf {{MSDS}} current
- 12:49, 30 June 2012 diff hist +8 N File:XylenesMSDS.pdf {{MSDS}} current
- 12:49, 30 June 2012 diff hist +8 N File:PropanolMSDS.pdf {{MSDS}} current
- 12:49, 30 June 2012 diff hist +8 N File:MethylIsobutylKetoneMSDS.pdf {{MSDS}} current
- 12:49, 30 June 2012 diff hist +8 N File:MethylEthylKetoneMSDS.pdf {{MSDS}} current
- 12:48, 30 June 2012 diff hist +8 N File:MethylAlcoholMSDS.pdf {{MSDS}} current
- 12:48, 30 June 2012 diff hist +8 N File:EthyleneGlycolMSDS.pdf {{MSDS}} current
- 12:48, 30 June 2012 diff hist +8 N File:EthylAlcoholMSDS.pdf {{MSDS}} current
- 12:48, 30 June 2012 diff hist +8 N File:AmylAcetateMSDS.pdf {{MSDS}} current
- 12:47, 30 June 2012 diff hist +8 N File:AcetoneMSDS.pdf {{MSDS}} current
- 12:40, 30 June 2012 diff hist -25 Chemical List - OLD 2018-09-05 →Solvents
- 12:10, 30 June 2012 diff hist +3 Chemical List - OLD 2018-09-05 →Bases
- 12:10, 30 June 2012 diff hist -51 Chemical List - OLD 2018-09-05 →Acids
- 11:04, 29 June 2012 diff hist +28 Template:Tool
- 11:03, 29 June 2012 diff hist -231 Template:Tool Undo revision 380 by Zwarburg (Talk)
- 11:03, 29 June 2012 diff hist +231 Template:Tool
- 09:08, 29 June 2012 diff hist -140 User:Zwarburg
- 09:07, 29 June 2012 diff hist -1,389 E-Beam 1 (Sharon)
- 08:56, 29 June 2012 diff hist -3 User:Zwarburg
- 08:55, 29 June 2012 diff hist +114 MediaWiki:Common.css
- 08:54, 29 June 2012 diff hist -10 User:Zwarburg
- 08:54, 29 June 2012 diff hist +3 User:Zwarburg
- 08:54, 29 June 2012 diff hist +160 MediaWiki:Common.js
- 08:53, 29 June 2012 diff hist +22 User:Zwarburg
- 08:53, 29 June 2012 diff hist -115 MediaWiki:Common.css
- 08:53, 29 June 2012 diff hist +1,646 MediaWiki:Common.js
- 15:07, 28 June 2012 diff hist +128 User:Zwarburg
- 15:06, 28 June 2012 diff hist -1,646 MediaWiki:Common.js
- 15:04, 28 June 2012 diff hist +7 MediaWiki:Common.css
- 15:03, 28 June 2012 diff hist +108 MediaWiki:Common.css
- 15:02, 28 June 2012 diff hist -119 MediaWiki:Common.js
- 14:59, 28 June 2012 diff hist +3 MediaWiki:Common.js
- 14:59, 28 June 2012 diff hist +2 MediaWiki:Common.js
- 14:57, 28 June 2012 diff hist +114 MediaWiki:Common.js
- 14:54, 28 June 2012 diff hist -160 MediaWiki:Common.js
- 14:51, 28 June 2012 diff hist +160 MediaWiki:Common.js
- 14:49, 28 June 2012 diff hist +4,429 N MediaWiki:Common.js Created page with "/** Collapsible tables ********************************************************* * * Description: Allows tables to be collapsed, showing only the header. See * …"
- 14:48, 28 June 2012 diff hist +683 N MediaWiki:Common.css Created page with "/** Collapsible tables ********************************************************* * * Description: Allows tables to be collapsed, showing only the header. See * …"
- 14:17, 28 June 2012 diff hist +79 N Rapid Thermal Processor (AET RX6) Created page with " Max temp/Time 1000C = 1 Hour 1100C = 10 min 1200C = 3 min 1300C = 10 seconds"
- 13:48, 28 June 2012 diff hist +1 Tool List →Vacuum Deposition
- 13:48, 28 June 2012 diff hist +39 N PECVD 1 (PlasmTherm 790) moved PECVD 1 (PlasmTherm 790) to PECVD 1 (PlasmaTherm 790) current
- 13:48, 28 June 2012 diff hist 0 m PECVD 1 (PlasmaTherm 790) moved PECVD 1 (PlasmTherm 790) to PECVD 1 (PlasmaTherm 790)
- 13:44, 28 June 2012 diff hist +49 N Lithography Chemicals Redirected page to Chemical List#Lithography Chemicals current
- 13:40, 28 June 2012 diff hist +30 N ASML DUV Redirected page to Stepper 3 (ASML)
- 13:01, 28 June 2012 diff hist +19 N Microscopes Created page with "=Nikon= =Olympus="
- 13:00, 28 June 2012 diff hist +257 Tool List →Inspection, Test and Characterization
- 12:57, 28 June 2012 diff hist +43 Tool List →Packaging
- 12:57, 28 June 2012 diff hist +30 N Dicing Saw moved Dicing Saw to Dicing Saw (ADT) current
- 12:57, 28 June 2012 diff hist 0 m Dicing Saw (ADT) moved Dicing Saw to Dicing Saw (ADT)
- 12:56, 28 June 2012 diff hist +41 N Flip-Chip Bonder moved Flip-Chip Bonder to Flip-Chip Bonder (Finetech) current
- 12:56, 28 June 2012 diff hist 0 m Flip-Chip Bonder (Finetech) moved Flip-Chip Bonder to Flip-Chip Bonder (Finetech)
- 12:55, 28 June 2012 diff hist +10 Tool List →Thermal Processing
- 12:55, 28 June 2012 diff hist +48 Tool List →Wet Processing
- 12:53, 28 June 2012 diff hist +244 Tool List →Wet Processing
- 12:50, 28 June 2012 diff hist +155 Tool List →Dry Etch
- 12:48, 28 June 2012 diff hist +25 N RIE 3 moved RIE 3 to RIE 3 (MRC) current
- 12:48, 28 June 2012 diff hist 0 m RIE 3 (MRC) moved RIE 3 to RIE 3 (MRC)
- 12:48, 28 June 2012 diff hist +25 N RIE 2 moved RIE 2 to RIE 2 (MRC) current
- 12:48, 28 June 2012 diff hist 0 m RIE 2 (MRC) moved RIE 2 to RIE 2 (MRC)
- 12:48, 28 June 2012 diff hist +28 N RIE 1 moved RIE 1 to RIE 1 (Custom) current
- 12:48, 28 June 2012 diff hist 0 m RIE 1 (Custom) moved RIE 1 to RIE 1 (Custom)
- 12:47, 28 June 2012 diff hist +101 Tool List →Vacuum Deposition
- 12:45, 28 June 2012 diff hist +38 N PECVD 1 moved PECVD 1 to PECVD 1 (PlasmTherm 790) current
- 12:45, 28 June 2012 diff hist 0 m PECVD 1 (PlasmaTherm 790) moved PECVD 1 to PECVD 1 (PlasmTherm 790)
- 12:44, 28 June 2012 diff hist 0 Tool List →Lithography
- 12:43, 28 June 2012 diff hist +166 Tool List →Lithography
- 12:39, 28 June 2012 diff hist +14 Template:Links
- 12:39, 28 June 2012 diff hist -7 Chemical List - OLD 2018-09-05
- 12:36, 28 June 2012 diff hist +6 Chemical List - OLD 2018-09-05 →Bases
- 12:36, 28 June 2012 diff hist +4 Chemical List - OLD 2018-09-05 →Bases
- 12:36, 28 June 2012 diff hist +8 Chemical List - OLD 2018-09-05 →Bases
- 12:34, 28 June 2012 diff hist -57 Chemical List - OLD 2018-09-05 →Bases
- 12:34, 28 June 2012 diff hist +83 Chemical List - OLD 2018-09-05 →Solvents
- 12:29, 28 June 2012 diff hist +116 Chemical List - OLD 2018-09-05
- 12:20, 28 June 2012 diff hist +212 Chemical List - OLD 2018-09-05
- 12:19, 28 June 2012 diff hist +6 Chemical List - OLD 2018-09-05 →Acids
- 12:17, 28 June 2012 diff hist +8 MediaWiki:Sidebar
- 12:17, 28 June 2012 diff hist +11 MediaWiki:Sidebar
- 12:15, 28 June 2012 diff hist 0 Tube Furnace (Tystar 8300) →About
- 11:34, 28 June 2012 diff hist +35 Tool List →Vacuum Deposition
- 11:32, 28 June 2012 diff hist +28 N E-Beam 4 moved E-Beam 4 to E-Beam 4 (CHA) current
- 11:32, 28 June 2012 diff hist 0 m E-Beam 4 (CHA) moved E-Beam 4 to E-Beam 4 (CHA)
- 11:32, 28 June 2012 diff hist +33 N E-Beam 3 moved E-Beam 3 to E-Beam 3 (Temescal) current
- 11:32, 28 June 2012 diff hist 0 m E-Beam 3 (Temescal) moved E-Beam 3 to E-Beam 3 (Temescal)
- 11:31, 28 June 2012 diff hist +31 N E-Beam 2 moved E-Beam 2 to E-Beam 2 (Custom) current
- 11:31, 28 June 2012 diff hist 0 m E-Beam 2 (Custom) moved E-Beam 2 to E-Beam 2 (Custom)
- 11:31, 28 June 2012 diff hist +31 N E-Beam 1 moved E-Beam 1 to E-Beam 1 (Sharon) current
- 11:31, 28 June 2012 diff hist 0 m E-Beam 1 (Sharon) moved E-Beam 1 to E-Beam 1 (Sharon)
- 11:30, 28 June 2012 diff hist +74 Tool List →Vacuum Deposition
- 11:28, 28 June 2012 diff hist +95 Tool List →Lithography
- 11:27, 28 June 2012 diff hist +26 Tool List →Lithography
- 11:26, 28 June 2012 diff hist +38 N Stepper 2 moved Stepper 2 to Stepper 2 (AutoStep 200) current
- 11:26, 28 June 2012 diff hist 0 m Stepper 2 (AutoStep 200) moved Stepper 2 to Stepper 2 (AutoStep 200)
- 11:26, 28 June 2012 diff hist +34 N Stepper 1 moved Stepper 1 to Stepper 1 (GCA 6300) current
- 11:26, 28 June 2012 diff hist 0 m Stepper 1 (GCA 6300) moved Stepper 1 to Stepper 1 (GCA 6300)
- 10:50, 28 June 2012 diff hist +1,085 Editing Tutorials