User contributions
Jump to navigation
Jump to search
- 10:58, 30 August 2022 diff hist +24 Wet Benches →Develop Benches
- 10:57, 30 August 2022 diff hist +24 Wet Benches →Spin Coat Benches
- 10:56, 30 August 2022 diff hist +24 Wet Benches →Solvent Cleaning Benches
- 10:55, 30 August 2022 diff hist +23 XeF2 Etch (Xetch)
- 10:54, 30 August 2022 diff hist +24 Plasma Activation (EVG 810)
- 10:53, 30 August 2022 diff hist +21 Vapor HF Etch current
- 10:52, 30 August 2022 diff hist +21 UV Ozone Reactor
- 10:51, 30 August 2022 diff hist +21 CAIBE (Oxford Ion Mill)
- 10:50, 30 August 2022 diff hist +21 Ashers (Technics PEII)
- 10:50, 30 August 2022 diff hist +24 Plasma Clean (YES EcoClean)
- 10:49, 30 August 2022 diff hist +24 DSEIII (PlasmaTherm/Deep Silicon Etcher)
- 10:48, 30 August 2022 diff hist +24 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 10:47, 30 August 2022 diff hist +25 Oxford ICP Etcher (PlasmaPro 100 Cobra)
- 10:46, 30 August 2022 diff hist +23 ICP-Etch (Unaxis VLR)
- 10:45, 30 August 2022 diff hist +23 ICP Etch 2 (Panasonic E626I)
- 10:45, 30 August 2022 diff hist +23 ICP Etch 1 (Panasonic E646V)
- 10:44, 30 August 2022 diff hist +24 RIE 5 (PlasmaTherm)
- 10:42, 30 August 2022 diff hist +24 RIE 3 (MRC) current
- 10:41, 30 August 2022 diff hist +24 RIE 2 (MRC)
- 10:39, 30 August 2022 diff hist +24 SEM Sample Coater (Hummer)