User contributions
Jump to navigation
Jump to search
- 11:16, 5 January 2022 diff hist +4 Maskless Aligner (Heidelberg MLA150) SOP update Tag: Visual edit
- 11:15, 5 January 2022 diff hist 0 N File:MLA150 SOP Rev J (LS).docx.pdf current
- 10:59, 3 January 2022 diff hist -3 E-Beam 2 (Custom) Updated SOP Tag: Visual edit
- 10:58, 3 January 2022 diff hist 0 N File:EB2 SOP Rev C.pdf current
- 10:25, 3 January 2022 diff hist -20 Plasma Activation (EVG 810) SOP update Tag: Visual edit
- 10:24, 3 January 2022 diff hist 0 N File:EVG Plasma Activation SOP Rev C.pdf current
- 08:21, 11 September 2021 diff hist +53 m ICP Etch 1 (Panasonic E646V) Updated system description Tag: Visual edit: Switched
- 08:15, 11 September 2021 diff hist -88 Stepper 2 (AutoStep 200) Removed link to deleted shutdown startup page Tag: Visual edit
- 11:38, 10 September 2021 diff hist +4 ICP Etch 1 (Panasonic E646V) Tag: Visual edit
- 11:37, 10 September 2021 diff hist +240 ICP Etch 1 (Panasonic E646V) Updated gas changes SOPs, added Rules link Tag: Visual edit
- 11:33, 10 September 2021 diff hist +198 ICP Etch 1 (Panasonic E646V) Updated Gas Change SOP Tag: Visual edit
- 11:28, 10 September 2021 diff hist 0 N File:ICP -1 Rules & Important Notes.pdf current
- 11:27, 10 September 2021 diff hist 0 N File:ICP -1 Gas Change N2-He-N2.pdf
- 11:27, 10 September 2021 diff hist 0 N File:ICP -1 Gas Change CHF3-Ar-CHF3.pdf current
- 11:26, 10 September 2021 diff hist 0 N File:ICP -1 Gas Change CF4-SF6-CF4.pdf
- 11:19, 10 September 2021 diff hist -14 ICP Etch 1 (Panasonic E646V) Updated tool About section Tag: Visual edit
- 12:40, 9 September 2021 diff hist -23 Dicing Saw (ADT) Updated SOP Rev Tag: Visual edit
- 12:39, 9 September 2021 diff hist 0 N File:ADT SOP Rev D.pdf current
- 10:25, 3 September 2021 diff hist -2 m E-Beam 2 (Custom) Changed tool owner
- 14:08, 23 August 2021 diff hist 0 File:ADT Dicing Saw SOP Rev C.pdf Sawyer l uploaded a new version of File:ADT Dicing Saw SOP Rev C.pdf current
- 09:01, 20 August 2021 diff hist +4 Dicing Saw (ADT) SOP Rev Tag: Visual edit
- 09:00, 20 August 2021 diff hist 0 N File:ADT Dicing Saw SOP Rev C.pdf
- 14:08, 11 August 2021 diff hist -6 Contact Aligner (SUSS MA-6) →Documentation Tag: Visual edit
- 14:08, 11 August 2021 diff hist 0 File:MA-6 Exp Mode Visual Aid.pdf Sawyer l uploaded a new version of File:MA-6 Exp Mode Visual Aid.pdf current
- 14:08, 11 August 2021 diff hist -3 Contact Aligner (SUSS MA-6) →Documentation Tag: Visual edit
- 14:07, 11 August 2021 diff hist +100 Contact Aligner (SUSS MA-6) →Documentation: Added BA6 SOP Tag: Visual edit
- 14:05, 11 August 2021 diff hist 0 N File:BA6 SOP Rev A.pdf current
- 14:19, 10 August 2021 diff hist +153 Dicing Saw (ADT) →Operating Procedures: Add link to updated SOP Tag: Visual edit
- 14:17, 10 August 2021 diff hist 0 N File:ADT Dicing Saw SOP Rev B.pdf current
- 09:08, 20 July 2021 diff hist -3 Dicing Saw (ADT) Contact info Tag: Visual edit
- 08:34, 20 July 2021 diff hist +125 Stepper 2 (AutoStep 200) →Staff Procedures: Added restart SOP pdf link Tag: Visual edit
- 08:33, 20 July 2021 diff hist 0 N File:Autostep 200 Restart SOP June 2021.pdf current
- 13:19, 19 July 2021 diff hist +124 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: Added substrate template rules visual aid Tag: Visual edit
- 13:18, 19 July 2021 diff hist 0 N File:MLA150 Substrate Template Rules.pdf current
- 10:24, 13 July 2021 diff hist -31 Contact Aligner (SUSS MA-6) Updated SOP with BSA steps, removed old BSA steps Tag: Visual edit
- 10:22, 13 July 2021 diff hist 0 N File:MA-6 SOP Rev D.pdf
- 13:10, 26 May 2021 diff hist 0 Maskless Aligner (Heidelberg MLA150) Updated SOP Tag: Visual edit
- 13:09, 26 May 2021 diff hist 0 N File:MLA150 SOP Rev I (LS).pdf current
- 10:31, 19 April 2021 diff hist +72 Film Stress (Tencor Flexus) →Documentation: Added SOP link Tag: Visual edit
- 10:31, 19 April 2021 diff hist 0 N File:Tencor FLX SOP Rev B.pdf current
- 10:29, 19 April 2021 diff hist +66 Film Stress (Tencor Flexus) Added Documentation Section Tag: Visual edit
- 10:06, 19 April 2021 diff hist +68 Film Stress (Tencor Flexus) →Equipment Specifications Tag: Visual edit
- 09:33, 19 April 2021 diff hist +381 Film Stress (Tencor Flexus) Updating Equipment Specifications Tag: Visual edit
- 08:32, 16 March 2021 diff hist 0 Maskless Aligner (Heidelberg MLA150) Updated SOP Tag: Visual edit
- 08:31, 16 March 2021 diff hist 0 N File:MLA150 SOP Rev H (LS).pdf current
- 11:28, 15 March 2021 diff hist 0 RIE 3 (MRC) Updated SOP Tag: Visual edit
- 11:28, 15 March 2021 diff hist 0 N File:RIE 3 SOP Rev D.pdf current
- 10:30, 12 February 2021 diff hist +21 Maskless Aligner (Heidelberg MLA150) Update SOP link Tag: Visual edit
- 10:29, 12 February 2021 diff hist 0 N File:MLA150 SOP Rev G (LS).pdf current
- 12:19, 30 November 2020 diff hist -18 Contact Aligner (SUSS MA-6) Intensity info for CH2 updated, SOP updated Tag: Visual edit