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- 18:37, 2 February 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:36, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Tag: Visual edit
- 18:36, 2 February 2021 diff hist +259 N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 18:35, 2 February 2021 diff hist +11 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 18:33, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine current Tag: Visual edit
- 18:30, 2 February 2021 diff hist +4 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:29, 2 February 2021 diff hist +59 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher adding a SEM Tag: Visual edit
- 18:27, 2 February 2021 diff hist 0 N File:FE210206.pdf current
- 18:18, 2 February 2021 diff hist +259 N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:53, 2 February 2021 diff hist +16 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:50, 2 February 2021 diff hist -6 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:47, 2 February 2021 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4-Florine Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:39, 2 February 2021 diff hist +52 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 16:26, 2 February 2021 diff hist -1 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher)
- 16:25, 2 February 2021 diff hist +53 ICP Etching Recipes →Historical Data (SiO2, Florines ICP Etcher)
- 16:22, 2 February 2021 diff hist +49 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher
- 19:42, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 19:41, 8 January 2021 diff hist 0 N File:I2210102.pdf current
- 19:39, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM pic Tag: Visual edit
- 19:37, 8 January 2021 diff hist 0 N File:I1210113.pdf current
- 17:45, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 17:44, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data poing Tag: Visual edit
- 18:55, 30 August 2020 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a Sem PIC Tag: Visual edit
- 18:54, 30 August 2020 diff hist 0 N File:IP020104.pdf current
- 18:50, 30 August 2020 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit
- 17:21, 10 August 2020 diff hist +10 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 17:21, 10 August 2020 diff hist +27 Test Data of etching SiO2 with CHF3/CF4 a comment added Tag: Visual edit
- 17:19, 10 August 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 17:18, 10 August 2020 diff hist 0 N File:I2200203.pdf current
- 17:12, 10 August 2020 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 add a etch data point Tag: Visual edit
- 15:59, 31 July 2020 diff hist -30 Dry Etching Recipes
- 15:56, 31 July 2020 diff hist +72 Dry Etching Recipes
- 15:43, 31 July 2020 diff hist 0 Dry Etching Recipes add a recipe Tag: Visual edit
- 15:36, 31 July 2020 diff hist 0 N File:InP Etching result-CAIBE.pdf current
- 15:27, 31 July 2020 diff hist +3 Other Dry Etching Recipes add a etch recipe Tag: Visual edit
- 15:14, 31 July 2020 diff hist +73 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe file Tag: Visual edit
- 15:10, 31 July 2020 diff hist +17 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe Tag: Visual edit
- 11:04, 24 March 2020 diff hist +179 Ning Cao →About: add some information Tag: Visual edit
- 15:36, 6 March 2020 diff hist +281 Other Dry Etching Recipes add a comment Tag: Visual edit
- 12:18, 3 March 2020 diff hist -1 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 3 March 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM Tag: Visual edit
- 12:16, 3 March 2020 diff hist 0 N File:I1200415.pdf current
- 12:15, 3 March 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adda data point Tag: Visual edit
- 15:42, 28 February 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 15:41, 28 February 2020 diff hist 0 N File:I1200301.pdf current
- 15:40, 28 February 2020 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 15:35, 28 February 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data point Tag: Visual edit
- 15:37, 23 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:36, 23 January 2020 diff hist 0 N File:I1200211.pdf current
- 15:36, 23 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding data Tag: Visual edit
- 15:58, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:57, 17 January 2020 diff hist 0 N File:I1200107.pdf current
- 15:53, 17 January 2020 diff hist +38 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a data point Tag: Visual edit
- 15:47, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 15:46, 17 January 2020 diff hist 0 N File:I2200122.pdf current
- 15:43, 17 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 14:41, 9 September 2019 diff hist +23 Ellipsometer (Woollam) →Operating Procedures
- 14:41, 9 September 2019 diff hist +41 Ellipsometer (Woollam) →Operating Procedures
- 10:44, 25 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:41, 25 July 2019 diff hist 0 N File:I2190605.pdf current
- 10:38, 25 July 2019 diff hist +42 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:08, 19 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 16:06, 19 July 2019 diff hist 0 N File:I2190506.pdf current
- 16:06, 19 July 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:16, 11 June 2019 diff hist 0 N File:I11904.pdf current
- 16:05, 6 June 2019 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 14:50, 6 June 2019 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 14:48, 6 June 2019 diff hist 0 N File:I11903.pdf current
- 14:44, 6 June 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 16:13, 20 March 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 14:26, 20 March 2019 diff hist +1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 14:25, 20 March 2019 diff hist +2 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:21, 13 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 16:18, 13 March 2019 diff hist +49 Ellipsometer (Woollam) →Operating Procedures
- 16:17, 13 March 2019 diff hist 0 N File:Operation Manual of JA Woollam Ellipsometer-a.pdf current
- 16:15, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 16:14, 13 March 2019 diff hist +47 Ellipsometer (Woollam) →Operating Procedures
- 16:13, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 15:19, 8 March 2019 diff hist -48 Test Data of etching SiO2 with CHF3/CF4 save a data Tag: Visual edit
- 15:18, 8 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 15:17, 8 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 no O2-3-06-2019.pdf current
- 15:04, 8 March 2019 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 add a data Tag: Visual edit
- 16:43, 6 March 2019 diff hist +91 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 16:40, 6 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-3-06-2019.pdf current
- 16:34, 6 March 2019 diff hist +41 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:36, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:36, 1 February 2019 diff hist 0 N File:IP161510.pdf current
- 16:35, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:35, 1 February 2019 diff hist 0 N File:IP161421.pdf current
- 16:34, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:34, 1 February 2019 diff hist 0 N File:IP161332.pdf current
- 16:25, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:24, 1 February 2019 diff hist 0 N File:IP173306.pdf current
- 16:23, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:23, 1 February 2019 diff hist 0 N File:IP173203.pdf current
- 16:22, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:22, 1 February 2019 diff hist 0 N File:IP173107.pdf current
- 16:21, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:21, 1 February 2019 diff hist 0 N File:IP173009.pdf current
- 16:20, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:19, 1 February 2019 diff hist 0 N File:IP172905.pdf current
- 16:19, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:18, 1 February 2019 diff hist 0 N File:IP172805.pdf current
- 16:18, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:17, 1 February 2019 diff hist 0 N File:IP172520.pdf current
- 15:56, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:55, 1 February 2019 diff hist 0 N File:IP170706.pdf current
- 15:54, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:54, 1 February 2019 diff hist 0 N File:IP170603.pdf current
- 15:53, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:53, 1 February 2019 diff hist 0 N File:IP170505.pdf current
- 15:51, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:51, 1 February 2019 diff hist 0 N File:IP170404.pdf current
- 15:50, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:50, 1 February 2019 diff hist 0 N File:IP170302.pdf current
- 15:47, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:46, 1 February 2019 diff hist 0 N File:IP170208.pdf current
- 15:45, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:44, 1 February 2019 diff hist 0 N File:IP170106.pdf current
- 12:44, 1 February 2019 diff hist +89 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:44, 1 February 2019 diff hist 0 N File:InP Etch using Unaxis PM1 at 200 C-5.pdf current
- 12:39, 1 February 2019 diff hist -89 InP Etch Test Result in Details Blanked the page Tag: Visual edit
- 12:39, 1 February 2019 diff hist -97 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:37, 1 February 2019 diff hist +6 InP Etch Test Result in Details add a file Tag: Visual edit
- 10:42, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 10:42, 1 February 2019 diff hist 0 N File:IP190103.pdf current
- 10:41, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 10:40, 1 February 2019 diff hist 0 N File:IP190101.pdf current
- 10:32, 1 February 2019 diff hist +37 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 13:18, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:18, 31 January 2019 diff hist 0 N File:IP180104.pdf current
- 13:17, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:17, 31 January 2019 diff hist 0 N File:IP180207.pdf current
- 13:16, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:15, 31 January 2019 diff hist 0 N File:IP180304.pdf current
- 13:15, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:14, 31 January 2019 diff hist 0 N File:IP180406.pdf current
- 12:56, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:55, 31 January 2019 diff hist 0 N File:IP180508.pdf current
- 12:54, 31 January 2019 diff hist 0 N File:IP180508.pptx current
- 12:49, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:48, 31 January 2019 diff hist 0 N File:IP180606.pdf current
- 12:39, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:38, 31 January 2019 diff hist 0 N File:IP180705.pdf current
- 12:37, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:35, 31 January 2019 diff hist 0 File:IP180805.pdf Ningcao uploaded File:IP180805.pdf current
- 12:30, 31 January 2019 diff hist -125 InP Etch Rate and Selectivity (InP/SiO2) delete a pic Tag: Visual edit
- 12:29, 31 January 2019 diff hist +135 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:08, 31 January 2019 diff hist +39 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:07, 31 January 2019 diff hist +90 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:06, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 12:05, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a SEM pic Tag: Visual edit
- 10:26, 31 January 2019 diff hist -37 Test Data of etching SiO2 with CHF3/CF4 add one more SEM pic Tag: Visual edit
- 10:24, 31 January 2019 diff hist +119 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 10:23, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2-no O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2-no O2.pdf current
- 10:22, 31 January 2019 diff hist +84 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add one SEM pic Tag: Visual edit
- 10:20, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2 with O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2 with O2.pdf current
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 12:20, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 29 January 2019 diff hist -5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:16, 29 January 2019 diff hist +5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:14, 29 January 2019 diff hist +63 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:14, 29 January 2019 diff hist 0 N File:I11901.pdf current
- 12:09, 29 January 2019 diff hist +238 N Test Data of etching SiO2 with CHF3/CF4-ICP1 Created page with "{| class="wikitable" | colspan="5" |ICP#1: 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged Si..." Tag: Visual edit
- 12:06, 29 January 2019 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:57, 29 January 2019 diff hist 0 N File:I11902.pdf current
- 11:46, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit
- 11:19, 29 January 2019 diff hist +7 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:13, 29 January 2019 diff hist -45 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:11, 29 January 2019 diff hist +4 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:06, 29 January 2019 diff hist +113 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 10:47, 29 January 2019 diff hist -30 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I) Tag: Visual edit
- 10:47, 29 January 2019 diff hist +85 ICP Etching Recipes /* SiO2 Etching with ICP1 Tag: Visual edit
- 10:42, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:38, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:37, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-a.pdf current
- 10:37, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 10:25, 29 January 2019 diff hist +4 Test Data of etching SiO2 with CHF3/CF4 add a new pic Tag: Visual edit
- 10:24, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2-no O2-a.pdf current
- 10:16, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:06, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:05, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:03, 11 December 2018 diff hist +77 N File:IP180805.pdf Created page with "thumb"
- 11:56, 11 December 2018 diff hist 0 N File:IP180909.pdf current
- 11:51, 11 December 2018 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2)
- 16:16, 11 October 2018 diff hist +2 Lithography Recipes →Holography Recipes
- 16:15, 11 October 2018 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf current
- 08:37, 9 October 2018 diff hist +78 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:33, 9 October 2018 diff hist +41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:30, 9 October 2018 diff hist -41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:28, 9 October 2018 diff hist +80 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 08:25, 9 October 2018 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 08:23, 9 October 2018 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2) Tag: Visual edit
- 08:17, 9 October 2018 diff hist +109 ICP Etching Recipes →SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit
- 08:13, 9 October 2018 diff hist -4 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 08:09, 9 October 2018 diff hist +249 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 16:17, 8 October 2018 diff hist +251 Test Data of etching SiO2 with CHF3/CF4/O2 add a table current Tag: Visual edit
- 16:15, 8 October 2018 diff hist -83 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 15:48, 8 October 2018 diff hist +40 N Test Data of etching SiO2 with CHF3/CF4 add a data file Tag: Visual edit
- 15:46, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2-no O2.pdf
- 15:45, 8 October 2018 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 2): add a title Tag: Visual edit
- 15:44, 8 October 2018 diff hist +42 N Test Data of etching SiO2 with CHF3/CF4/O2 add data file Tag: Visual edit
- 15:42, 8 October 2018 diff hist +48 ICP Etching Recipes →SiO2 Etching (Panasonic 2): adding SiO2 etch test title Tag: Visual edit
- 15:36, 8 October 2018 diff hist +4 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): add SiO2 test data Tag: Visual edit
- 15:32, 8 October 2018 diff hist +79 ICP Etching Recipes →SiO2 Etching (Panasonic 1): adding test data Tag: Visual edit
- 15:28, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2 with O2.pdf
- 11:24, 4 October 2018 diff hist -93 InP Etch Test Result in Details adding a data file Tag: Visual edit
- 11:19, 4 October 2018 diff hist 0 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 11:12, 4 October 2018 diff hist +23 InP Etch Rate and Selectivity (InP/SiO2) add a new pic Tag: Visual edit
- 10:59, 4 October 2018 diff hist +36 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 09:02, 21 August 2018 diff hist +30 Lithography Recipes →Holography Recipes
- 16:12, 16 August 2018 diff hist +64 Lithography Recipes →Holography Recipes
- 16:03, 16 August 2018 diff hist -64 Lithography Recipes →Holography Recipes
- 15:17, 13 August 2018 diff hist +93 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 15:01, 13 August 2018 diff hist +63 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:58, 13 August 2018 diff hist -91 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 14:03, 2 July 2018 diff hist +1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist +45 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist 0 N File:SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf current
- 14:01, 2 July 2018 diff hist +82 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:36, 29 June 2018 diff hist -129 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:35, 29 June 2018 diff hist -1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:34, 29 June 2018 diff hist -93 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -100 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -123 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:10, 12 June 2018 diff hist +16 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 15:06, 12 June 2018 diff hist +3 Sputtering Recipes →Sputter 5 (AJA ATC 2200-V) Tag: Visual edit
- 15:05, 12 June 2018 diff hist +71 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): adding Cu deposition (Sputter4) into WiKi Tag: Visual edit
- 15:01, 12 June 2018 diff hist +84 Sputtering Recipes adding Al deposition data (Sputter5) into WiKi Tag: Visual edit
- 14:13, 29 May 2018 diff hist +65 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:04, 29 May 2018 diff hist +35 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 08:33, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:32, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:27, 18 May 2018 diff hist +230 Contact Alignment Recipes
- 08:25, 18 May 2018 diff hist 0 Contact Alignment Recipes
- 08:23, 18 May 2018 diff hist +36 Contact Alignment Recipes
- 08:21, 18 May 2018 diff hist +65 Contact Alignment Recipes
- 08:18, 18 May 2018 diff hist +126 Contact Alignment Recipes
- 08:13, 18 May 2018 diff hist 0 Lithography Recipes →Photolithography Recipes: adding recipe Tag: Visual edit
- 11:05, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 11:05, 2 May 2018 diff hist +711 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:38, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit