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- 18:37, 2 February 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:36, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Tag: Visual edit
- 18:36, 2 February 2021 diff hist +259 N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 18:35, 2 February 2021 diff hist +11 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 18:33, 2 February 2021 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-Florine current Tag: Visual edit
- 18:30, 2 February 2021 diff hist +4 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher current Tag: Visual edit
- 18:29, 2 February 2021 diff hist +59 Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher adding a SEM Tag: Visual edit
- 18:27, 2 February 2021 diff hist 0 N File:FE210206.pdf current
- 18:18, 2 February 2021 diff hist +259 N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:53, 2 February 2021 diff hist +16 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:50, 2 February 2021 diff hist -6 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:47, 2 February 2021 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4-Florine Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:39, 2 February 2021 diff hist +52 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 16:26, 2 February 2021 diff hist -1 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher)
- 16:25, 2 February 2021 diff hist +53 ICP Etching Recipes →Historical Data (SiO2, Florines ICP Etcher)
- 16:22, 2 February 2021 diff hist +49 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher
- 19:42, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 19:41, 8 January 2021 diff hist 0 N File:I2210102.pdf current
- 19:39, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM pic Tag: Visual edit
- 19:37, 8 January 2021 diff hist 0 N File:I1210113.pdf current
- 17:45, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 17:44, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data poing Tag: Visual edit
- 18:55, 30 August 2020 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a Sem PIC Tag: Visual edit
- 18:54, 30 August 2020 diff hist 0 N File:IP020104.pdf current
- 18:50, 30 August 2020 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit
- 17:21, 10 August 2020 diff hist +10 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 17:21, 10 August 2020 diff hist +27 Test Data of etching SiO2 with CHF3/CF4 a comment added Tag: Visual edit
- 17:19, 10 August 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 17:18, 10 August 2020 diff hist 0 N File:I2200203.pdf current
- 17:12, 10 August 2020 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 add a etch data point Tag: Visual edit
- 15:59, 31 July 2020 diff hist -30 Dry Etching Recipes
- 15:56, 31 July 2020 diff hist +72 Dry Etching Recipes
- 15:43, 31 July 2020 diff hist 0 Dry Etching Recipes add a recipe Tag: Visual edit
- 15:36, 31 July 2020 diff hist 0 N File:InP Etching result-CAIBE.pdf current
- 15:27, 31 July 2020 diff hist +3 Other Dry Etching Recipes add a etch recipe Tag: Visual edit
- 15:14, 31 July 2020 diff hist +73 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe file Tag: Visual edit
- 15:10, 31 July 2020 diff hist +17 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe Tag: Visual edit
- 11:04, 24 March 2020 diff hist +179 Ning Cao →About: add some information Tag: Visual edit
- 15:36, 6 March 2020 diff hist +281 Other Dry Etching Recipes add a comment Tag: Visual edit
- 12:18, 3 March 2020 diff hist -1 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 3 March 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM Tag: Visual edit
- 12:16, 3 March 2020 diff hist 0 N File:I1200415.pdf current
- 12:15, 3 March 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adda data point Tag: Visual edit
- 15:42, 28 February 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 15:41, 28 February 2020 diff hist 0 N File:I1200301.pdf current
- 15:40, 28 February 2020 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 15:35, 28 February 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data point Tag: Visual edit
- 15:37, 23 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:36, 23 January 2020 diff hist 0 N File:I1200211.pdf current
- 15:36, 23 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding data Tag: Visual edit
- 15:58, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:57, 17 January 2020 diff hist 0 N File:I1200107.pdf current
- 15:53, 17 January 2020 diff hist +38 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a data point Tag: Visual edit
- 15:47, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 15:46, 17 January 2020 diff hist 0 N File:I2200122.pdf current
- 15:43, 17 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 14:41, 9 September 2019 diff hist +23 Ellipsometer (Woollam) →Operating Procedures
- 14:41, 9 September 2019 diff hist +41 Ellipsometer (Woollam) →Operating Procedures
- 10:44, 25 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:41, 25 July 2019 diff hist 0 N File:I2190605.pdf current
- 10:38, 25 July 2019 diff hist +42 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:08, 19 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 16:06, 19 July 2019 diff hist 0 N File:I2190506.pdf current
- 16:06, 19 July 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:16, 11 June 2019 diff hist 0 N File:I11904.pdf current
- 16:05, 6 June 2019 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 14:50, 6 June 2019 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 14:48, 6 June 2019 diff hist 0 N File:I11903.pdf current
- 14:44, 6 June 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 16:13, 20 March 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 14:26, 20 March 2019 diff hist +1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 14:25, 20 March 2019 diff hist +2 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:21, 13 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 16:18, 13 March 2019 diff hist +49 Ellipsometer (Woollam) →Operating Procedures
- 16:17, 13 March 2019 diff hist 0 N File:Operation Manual of JA Woollam Ellipsometer-a.pdf current
- 16:15, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 16:14, 13 March 2019 diff hist +47 Ellipsometer (Woollam) →Operating Procedures
- 16:13, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 15:19, 8 March 2019 diff hist -48 Test Data of etching SiO2 with CHF3/CF4 save a data Tag: Visual edit
- 15:18, 8 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 15:17, 8 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 no O2-3-06-2019.pdf current
- 15:04, 8 March 2019 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 add a data Tag: Visual edit
- 16:43, 6 March 2019 diff hist +91 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 16:40, 6 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-3-06-2019.pdf current
- 16:34, 6 March 2019 diff hist +41 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:36, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:36, 1 February 2019 diff hist 0 N File:IP161510.pdf current
- 16:35, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:35, 1 February 2019 diff hist 0 N File:IP161421.pdf current
- 16:34, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:34, 1 February 2019 diff hist 0 N File:IP161332.pdf current
- 16:25, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:24, 1 February 2019 diff hist 0 N File:IP173306.pdf current
- 16:23, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:23, 1 February 2019 diff hist 0 N File:IP173203.pdf current
- 16:22, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:22, 1 February 2019 diff hist 0 N File:IP173107.pdf current
- 16:21, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:21, 1 February 2019 diff hist 0 N File:IP173009.pdf current
- 16:20, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit