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- 18:18, 2 February 2021 diff hist +259 N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:53, 2 February 2021 diff hist +16 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:50, 2 February 2021 diff hist -6 Test Data of etching SiO2 with CHF3/CF4-Florine Tag: Visual edit
- 16:47, 2 February 2021 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4-Florine Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:39, 2 February 2021 diff hist +52 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 16:26, 2 February 2021 diff hist -1 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher)
- 16:25, 2 February 2021 diff hist +53 ICP Etching Recipes →Historical Data (SiO2, Florines ICP Etcher)
- 16:22, 2 February 2021 diff hist +49 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher
- 19:42, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 19:41, 8 January 2021 diff hist 0 N File:I2210102.pdf current
- 19:39, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM pic Tag: Visual edit
- 19:37, 8 January 2021 diff hist 0 N File:I1210113.pdf current
- 17:45, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 17:44, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data poing Tag: Visual edit
- 18:55, 30 August 2020 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a Sem PIC Tag: Visual edit
- 18:54, 30 August 2020 diff hist 0 N File:IP020104.pdf current
- 18:50, 30 August 2020 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit
- 17:21, 10 August 2020 diff hist +10 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 17:21, 10 August 2020 diff hist +27 Test Data of etching SiO2 with CHF3/CF4 a comment added Tag: Visual edit
- 17:19, 10 August 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 17:18, 10 August 2020 diff hist 0 N File:I2200203.pdf current
- 17:12, 10 August 2020 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 add a etch data point Tag: Visual edit
- 15:59, 31 July 2020 diff hist -30 Dry Etching Recipes
- 15:56, 31 July 2020 diff hist +72 Dry Etching Recipes
- 15:43, 31 July 2020 diff hist 0 Dry Etching Recipes add a recipe Tag: Visual edit
- 15:36, 31 July 2020 diff hist 0 N File:InP Etching result-CAIBE.pdf current
- 15:27, 31 July 2020 diff hist +3 Other Dry Etching Recipes add a etch recipe Tag: Visual edit
- 15:14, 31 July 2020 diff hist +73 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe file Tag: Visual edit
- 15:10, 31 July 2020 diff hist +17 Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): add a recipe Tag: Visual edit
- 11:04, 24 March 2020 diff hist +179 Ning Cao →About: add some information Tag: Visual edit
- 15:36, 6 March 2020 diff hist +281 Other Dry Etching Recipes add a comment Tag: Visual edit
- 12:18, 3 March 2020 diff hist -1 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 3 March 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM Tag: Visual edit
- 12:16, 3 March 2020 diff hist 0 N File:I1200415.pdf current
- 12:15, 3 March 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adda data point Tag: Visual edit
- 15:42, 28 February 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 15:41, 28 February 2020 diff hist 0 N File:I1200301.pdf current
- 15:40, 28 February 2020 diff hist +4 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 15:35, 28 February 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data point Tag: Visual edit
- 15:37, 23 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:36, 23 January 2020 diff hist 0 N File:I1200211.pdf current
- 15:36, 23 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding data Tag: Visual edit
- 15:58, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a pic Tag: Visual edit
- 15:57, 17 January 2020 diff hist 0 N File:I1200107.pdf current
- 15:53, 17 January 2020 diff hist +38 Test Data of etching SiO2 with CHF3/CF4-ICP1 adding a data point Tag: Visual edit
- 15:47, 17 January 2020 diff hist +62 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 15:46, 17 January 2020 diff hist 0 N File:I2200122.pdf current
- 15:43, 17 January 2020 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 14:41, 9 September 2019 diff hist +23 Ellipsometer (Woollam) →Operating Procedures
- 14:41, 9 September 2019 diff hist +41 Ellipsometer (Woollam) →Operating Procedures
- 10:44, 25 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:41, 25 July 2019 diff hist 0 N File:I2190605.pdf current
- 10:38, 25 July 2019 diff hist +42 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:08, 19 July 2019 diff hist +61 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 16:06, 19 July 2019 diff hist 0 N File:I2190506.pdf current
- 16:06, 19 July 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:16, 11 June 2019 diff hist 0 N File:I11904.pdf current
- 16:05, 6 June 2019 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 14:50, 6 June 2019 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a pic Tag: Visual edit
- 14:48, 6 June 2019 diff hist 0 N File:I11903.pdf current
- 14:44, 6 June 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4-ICP1 add data Tag: Visual edit
- 16:13, 20 March 2019 diff hist +37 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 14:26, 20 March 2019 diff hist +1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 14:25, 20 March 2019 diff hist +2 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:21, 13 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 adding a pic Tag: Visual edit
- 16:18, 13 March 2019 diff hist +49 Ellipsometer (Woollam) →Operating Procedures
- 16:17, 13 March 2019 diff hist 0 N File:Operation Manual of JA Woollam Ellipsometer-a.pdf current
- 16:15, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 16:14, 13 March 2019 diff hist +47 Ellipsometer (Woollam) →Operating Procedures
- 16:13, 13 March 2019 diff hist -47 Ellipsometer (Woollam) →Operating Procedures
- 15:19, 8 March 2019 diff hist -48 Test Data of etching SiO2 with CHF3/CF4 save a data Tag: Visual edit
- 15:18, 8 March 2019 diff hist +50 Test Data of etching SiO2 with CHF3/CF4 add a pic Tag: Visual edit
- 15:17, 8 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 no O2-3-06-2019.pdf current
- 15:04, 8 March 2019 diff hist +38 Test Data of etching SiO2 with CHF3/CF4 add a data Tag: Visual edit
- 16:43, 6 March 2019 diff hist +91 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 16:40, 6 March 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-3-06-2019.pdf current
- 16:34, 6 March 2019 diff hist +41 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 16:36, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:36, 1 February 2019 diff hist 0 N File:IP161510.pdf current
- 16:35, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:35, 1 February 2019 diff hist 0 N File:IP161421.pdf current
- 16:34, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:34, 1 February 2019 diff hist 0 N File:IP161332.pdf current
- 16:25, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:24, 1 February 2019 diff hist 0 N File:IP173306.pdf current
- 16:23, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:23, 1 February 2019 diff hist 0 N File:IP173203.pdf current
- 16:22, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:22, 1 February 2019 diff hist 0 N File:IP173107.pdf current
- 16:21, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:21, 1 February 2019 diff hist 0 N File:IP173009.pdf current
- 16:20, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:19, 1 February 2019 diff hist 0 N File:IP172905.pdf current
- 16:19, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:18, 1 February 2019 diff hist 0 N File:IP172805.pdf current
- 16:18, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 16:17, 1 February 2019 diff hist 0 N File:IP172520.pdf current
- 15:56, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:55, 1 February 2019 diff hist 0 N File:IP170706.pdf current
- 15:54, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:54, 1 February 2019 diff hist 0 N File:IP170603.pdf current
- 15:53, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:53, 1 February 2019 diff hist 0 N File:IP170505.pdf current
- 15:51, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:51, 1 February 2019 diff hist 0 N File:IP170404.pdf current
- 15:50, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:50, 1 February 2019 diff hist 0 N File:IP170302.pdf current
- 15:47, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:46, 1 February 2019 diff hist 0 N File:IP170208.pdf current
- 15:45, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 15:44, 1 February 2019 diff hist 0 N File:IP170106.pdf current
- 12:44, 1 February 2019 diff hist +89 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:44, 1 February 2019 diff hist 0 N File:InP Etch using Unaxis PM1 at 200 C-5.pdf current
- 12:39, 1 February 2019 diff hist -89 InP Etch Test Result in Details Blanked the page Tag: Visual edit
- 12:39, 1 February 2019 diff hist -97 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:37, 1 February 2019 diff hist +6 InP Etch Test Result in Details add a file Tag: Visual edit
- 10:42, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 10:42, 1 February 2019 diff hist 0 N File:IP190103.pdf current
- 10:41, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 10:40, 1 February 2019 diff hist 0 N File:IP190101.pdf current
- 10:32, 1 February 2019 diff hist +37 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 13:18, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:18, 31 January 2019 diff hist 0 N File:IP180104.pdf current
- 13:17, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:17, 31 January 2019 diff hist 0 N File:IP180207.pdf current
- 13:16, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:15, 31 January 2019 diff hist 0 N File:IP180304.pdf current
- 13:15, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:14, 31 January 2019 diff hist 0 N File:IP180406.pdf current
- 12:56, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:55, 31 January 2019 diff hist 0 N File:IP180508.pdf current
- 12:54, 31 January 2019 diff hist 0 N File:IP180508.pptx current
- 12:49, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:48, 31 January 2019 diff hist 0 N File:IP180606.pdf current
- 12:39, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:38, 31 January 2019 diff hist 0 N File:IP180705.pdf current
- 12:37, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:35, 31 January 2019 diff hist 0 File:IP180805.pdf Ningcao uploaded File:IP180805.pdf current
- 12:30, 31 January 2019 diff hist -125 InP Etch Rate and Selectivity (InP/SiO2) delete a pic Tag: Visual edit
- 12:29, 31 January 2019 diff hist +135 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:08, 31 January 2019 diff hist +39 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:07, 31 January 2019 diff hist +90 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:06, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 12:05, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a SEM pic Tag: Visual edit
- 10:26, 31 January 2019 diff hist -37 Test Data of etching SiO2 with CHF3/CF4 add one more SEM pic Tag: Visual edit
- 10:24, 31 January 2019 diff hist +119 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 10:23, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2-no O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2-no O2.pdf current
- 10:22, 31 January 2019 diff hist +84 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add one SEM pic Tag: Visual edit
- 10:20, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2 with O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2 with O2.pdf current
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 12:20, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 29 January 2019 diff hist -5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:16, 29 January 2019 diff hist +5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:14, 29 January 2019 diff hist +63 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:14, 29 January 2019 diff hist 0 N File:I11901.pdf current
- 12:09, 29 January 2019 diff hist +238 N Test Data of etching SiO2 with CHF3/CF4-ICP1 Created page with "{| class="wikitable" | colspan="5" |ICP#1: 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged Si..." Tag: Visual edit
- 12:06, 29 January 2019 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:57, 29 January 2019 diff hist 0 N File:I11902.pdf current
- 11:46, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit
- 11:19, 29 January 2019 diff hist +7 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:13, 29 January 2019 diff hist -45 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:11, 29 January 2019 diff hist +4 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:06, 29 January 2019 diff hist +113 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 10:47, 29 January 2019 diff hist -30 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I) Tag: Visual edit
- 10:47, 29 January 2019 diff hist +85 ICP Etching Recipes /* SiO2 Etching with ICP1 Tag: Visual edit
- 10:42, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:38, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:37, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-a.pdf current
- 10:37, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 10:25, 29 January 2019 diff hist +4 Test Data of etching SiO2 with CHF3/CF4 add a new pic Tag: Visual edit
- 10:24, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2-no O2-a.pdf current
- 10:16, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:06, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:05, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:03, 11 December 2018 diff hist +77 N File:IP180805.pdf Created page with "thumb"
- 11:56, 11 December 2018 diff hist 0 N File:IP180909.pdf current
- 11:51, 11 December 2018 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2)
- 16:16, 11 October 2018 diff hist +2 Lithography Recipes →Holography Recipes
- 16:15, 11 October 2018 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf current
- 08:37, 9 October 2018 diff hist +78 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:33, 9 October 2018 diff hist +41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:30, 9 October 2018 diff hist -41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:28, 9 October 2018 diff hist +80 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 08:25, 9 October 2018 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 08:23, 9 October 2018 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2) Tag: Visual edit
- 08:17, 9 October 2018 diff hist +109 ICP Etching Recipes →SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit
- 08:13, 9 October 2018 diff hist -4 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 08:09, 9 October 2018 diff hist +249 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 16:17, 8 October 2018 diff hist +251 Test Data of etching SiO2 with CHF3/CF4/O2 add a table current Tag: Visual edit
- 16:15, 8 October 2018 diff hist -83 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 15:48, 8 October 2018 diff hist +40 N Test Data of etching SiO2 with CHF3/CF4 add a data file Tag: Visual edit
- 15:46, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2-no O2.pdf
- 15:45, 8 October 2018 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 2): add a title Tag: Visual edit
- 15:44, 8 October 2018 diff hist +42 N Test Data of etching SiO2 with CHF3/CF4/O2 add data file Tag: Visual edit
- 15:42, 8 October 2018 diff hist +48 ICP Etching Recipes →SiO2 Etching (Panasonic 2): adding SiO2 etch test title Tag: Visual edit
- 15:36, 8 October 2018 diff hist +4 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): add SiO2 test data Tag: Visual edit
- 15:32, 8 October 2018 diff hist +79 ICP Etching Recipes →SiO2 Etching (Panasonic 1): adding test data Tag: Visual edit
- 15:28, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2 with O2.pdf
- 11:24, 4 October 2018 diff hist -93 InP Etch Test Result in Details adding a data file Tag: Visual edit
- 11:19, 4 October 2018 diff hist 0 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 11:12, 4 October 2018 diff hist +23 InP Etch Rate and Selectivity (InP/SiO2) add a new pic Tag: Visual edit
- 10:59, 4 October 2018 diff hist +36 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 09:02, 21 August 2018 diff hist +30 Lithography Recipes →Holography Recipes
- 16:12, 16 August 2018 diff hist +64 Lithography Recipes →Holography Recipes
- 16:03, 16 August 2018 diff hist -64 Lithography Recipes →Holography Recipes
- 15:17, 13 August 2018 diff hist +93 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 15:01, 13 August 2018 diff hist +63 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:58, 13 August 2018 diff hist -91 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 14:03, 2 July 2018 diff hist +1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist +45 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist 0 N File:SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf current
- 14:01, 2 July 2018 diff hist +82 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:36, 29 June 2018 diff hist -129 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:35, 29 June 2018 diff hist -1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:34, 29 June 2018 diff hist -93 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -100 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -123 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:10, 12 June 2018 diff hist +16 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 15:06, 12 June 2018 diff hist +3 Sputtering Recipes →Sputter 5 (AJA ATC 2200-V) Tag: Visual edit
- 15:05, 12 June 2018 diff hist +71 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): adding Cu deposition (Sputter4) into WiKi Tag: Visual edit
- 15:01, 12 June 2018 diff hist +84 Sputtering Recipes adding Al deposition data (Sputter5) into WiKi Tag: Visual edit
- 14:13, 29 May 2018 diff hist +65 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:04, 29 May 2018 diff hist +35 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 08:33, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:32, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:27, 18 May 2018 diff hist +230 Contact Alignment Recipes
- 08:25, 18 May 2018 diff hist 0 Contact Alignment Recipes
- 08:23, 18 May 2018 diff hist +36 Contact Alignment Recipes
- 08:21, 18 May 2018 diff hist +65 Contact Alignment Recipes
- 08:18, 18 May 2018 diff hist +126 Contact Alignment Recipes
- 08:13, 18 May 2018 diff hist 0 Lithography Recipes →Photolithography Recipes: adding recipe Tag: Visual edit
- 11:05, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 11:05, 2 May 2018 diff hist +711 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:38, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:32, 2 May 2018 diff hist +22 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 08:57, 2 May 2018 diff hist -46 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:57, 2 May 2018 diff hist +7 N InP Etch Test-in details Created page with "details" current Tag: Visual edit
- 08:55, 2 May 2018 diff hist +46 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:48, 2 May 2018 diff hist +90 N InP Etch Test Result in Details Created page with "https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf" Tag: Visual edit
- 08:47, 2 May 2018 diff hist +36 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:45, 2 May 2018 diff hist -31 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:43, 2 May 2018 diff hist -44 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:43, 2 May 2018 diff hist +7 N InP Etch test -details Created page with "details" current Tag: Visual edit
- 08:41, 2 May 2018 diff hist +44 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:39, 2 May 2018 diff hist -1 InP etch result in details Tag: Visual edit
- 08:36, 2 May 2018 diff hist +29 InP etch result in details Tag: Visual edit
- 08:16, 2 May 2018 diff hist -2 InP etch result in details Tag: Visual edit
- 08:12, 2 May 2018 diff hist -29 InP etch result in details Tag: Visual edit
- 08:02, 2 May 2018 diff hist +42 InP etch result in details Tag: Visual edit
- 16:25, 1 May 2018 diff hist -14 InP etch result in details Tag: Visual edit
- 16:22, 1 May 2018 diff hist +65 InP etch result in details Tag: Visual edit
- 16:20, 1 May 2018 diff hist -107 InP etch result in details Blanked the page Tag: Visual edit
- 16:17, 1 May 2018 diff hist -14 InP etch result in details Tag: Visual edit
- 16:16, 1 May 2018 diff hist +121 N InP etch result in details Created page with "InP Etch using Unaxis PM1 at 200 C-compressed96ppi.docx" Tag: Visual edit
- 16:14, 1 May 2018 diff hist -35 ICP Etching Recipes add link Tag: Visual edit
- 16:06, 1 May 2018 diff hist +55 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:05, 1 May 2018 diff hist -41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:40, 1 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 11:43, 1 May 2018 diff hist +60 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:20, 1 May 2018 diff hist -8 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 16:08, 27 April 2018 diff hist +16 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 15:55, 27 April 2018 diff hist +25 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 16:11, 20 April 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 16:06, 20 April 2018 diff hist +369 N InP Etch Rate and Selectivity (InP/SiO2) Latest InP etch test result Tag: Visual edit
- 15:32, 20 April 2018 diff hist +26 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:19, 20 April 2018 diff hist +208 N Unaxis Test Recipe Page test current Tag: Visual edit
- 15:18, 20 April 2018 diff hist +24 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR): link Tag: Visual edit
- 15:08, 20 April 2018 diff hist +10 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR): what will i do Tag: Visual edit
- 09:34, 12 April 2018 diff hist +41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 09:32, 12 April 2018 diff hist +11 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 09:30, 12 April 2018 diff hist -105 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 09:04, 12 April 2018 diff hist -52 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:45, 12 April 2018 diff hist -41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:43, 12 April 2018 diff hist +146 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 10:46, 6 April 2018 diff hist +93 ICP Etching Recipes added angled SiO2 sidewall recipe Tag: Visual edit
- 08:44, 6 April 2018 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:46, 14 March 2018 diff hist -1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:19, 14 March 2018 diff hist -7 Sputtering Recipes →Cu Deposition (Sputter 3)
- 11:19, 14 March 2018 diff hist +27 Sputtering Recipes →Cu Deposition (Sputter 3)
- 11:18, 14 March 2018 diff hist 0 N File:Cu Film using Sputter-3.pdf current
- 11:16, 14 March 2018 diff hist +40 Sputtering Recipes →Cu Deposition (Sputter 3)
- 10:48, 14 March 2018 diff hist -7 Sputtering Recipes →Fe and Co Deposition (Sputter 3)
- 10:47, 14 March 2018 diff hist +40 Sputtering Recipes →Fe and Co Deposition (Sputter 3)
- 10:45, 14 March 2018 diff hist +4 Sputtering Recipes →Height Conversion for Older Recipes
- 10:44, 14 March 2018 diff hist +106 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:09, 5 March 2018 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:49, 17 January 2018 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:00, 21 November 2017 diff hist +41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:58, 21 November 2017 diff hist -41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:57, 21 November 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 08:37, 24 October 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:15, 12 October 2017 diff hist +41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:09, 12 October 2017 diff hist -41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 09:44, 29 August 2017 diff hist +41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 09:43, 29 August 2017 diff hist -56 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:30, 18 August 2017 diff hist +15 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:07, 16 August 2017 diff hist +41 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:53, 16 August 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:51, 16 August 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:19, 14 August 2017 diff hist -39 Vacuum Deposition Recipes
- 11:18, 14 August 2017 diff hist -2 Vacuum Deposition Recipes
- 11:17, 14 August 2017 diff hist +29 Vacuum Deposition Recipes
- 11:14, 14 August 2017 diff hist 0 Vacuum Deposition Recipes
- 11:13, 14 August 2017 diff hist -1 Vacuum Deposition Recipes
- 11:11, 14 August 2017 diff hist +2 Vacuum Deposition Recipes
- 11:09, 14 August 2017 diff hist -1 Vacuum Deposition Recipes
- 11:04, 14 August 2017 diff hist -27 Vacuum Deposition Recipes
- 11:00, 14 August 2017 diff hist +1 Vacuum Deposition Recipes
- 10:59, 14 August 2017 diff hist +11 Vacuum Deposition Recipes
- 10:57, 14 August 2017 diff hist +27 Vacuum Deposition Recipes
- 10:55, 14 August 2017 diff hist +1 Vacuum Deposition Recipes
- 10:50, 14 August 2017 diff hist 0 Vacuum Deposition Recipes
- 10:49, 14 August 2017 diff hist +51 Vacuum Deposition Recipes
- 10:45, 14 August 2017 diff hist +11 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:44, 14 August 2017 diff hist -10 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:44, 14 August 2017 diff hist -11 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:43, 14 August 2017 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 14:03, 10 August 2017 diff hist -11 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 14:01, 10 August 2017 diff hist +11 Sputtering Recipes →TiO2 Deposition (Sputter 4)
- 14:00, 10 August 2017 diff hist +22 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:58, 10 August 2017 diff hist +28 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:58, 10 August 2017 diff hist 0 N File:TiO2 film using Sputter4.pdf current
- 13:55, 10 August 2017 diff hist -3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:53, 10 August 2017 diff hist +114 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:47, 10 August 2017 diff hist +8 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:45, 10 August 2017 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:45, 10 August 2017 diff hist +8 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:43, 10 August 2017 diff hist +2 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:40, 10 August 2017 diff hist +106 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:11, 17 July 2017 diff hist +24 PECVD Recipes →SiN deposition (PECVD #2)
- 16:11, 17 July 2017 diff hist 0 N File:SiNx Films by PECVD2.pdf current
- 16:08, 17 July 2017 diff hist +78 PECVD Recipes →SiN deposition (PECVD #2)
- 08:41, 7 July 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:19, 5 July 2017 diff hist +59 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:18, 5 July 2017 diff hist +72 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:15, 5 July 2017 diff hist 0 N File:Lower-Etch-Rate InP Etch using Unaxis PM1 tool at 200 C.pdf current
- 10:05, 27 June 2017 diff hist +28 Sputtering Recipes →Al Deposition (Sputter 4)
- 10:04, 27 June 2017 diff hist +54 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:02, 27 June 2017 diff hist 0 N File:Al-Sputter4-5mT-200W-30m.pdf current
- 09:53, 27 June 2017 diff hist +29 Sputtering Recipes →Au Deposition (Sputter 4)
- 09:53, 27 June 2017 diff hist 0 N File:Au-Sputter4-5mT-200W-120s.pdf current
- 09:52, 27 June 2017 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:52, 27 June 2017 diff hist +79 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:51, 27 June 2017 diff hist -14 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:40, 27 June 2017 diff hist -249 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:33, 27 June 2017 diff hist +32 Sputtering Recipes →TiW Deposition (Sputter 4)
- 09:33, 27 June 2017 diff hist 0 N File:TiW-Sputter4-4.5mT-300W-300s.pdf current
- 09:32, 27 June 2017 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:32, 27 June 2017 diff hist +81 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:27, 27 June 2017 diff hist -15 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:16, 27 June 2017 diff hist -13 Sputtering Recipes →Pt Deposition (Sputter 4)
- 09:15, 27 June 2017 diff hist 0 N File:Pt-Sputter4.pdf current
- 09:07, 27 June 2017 diff hist -14 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:02, 27 June 2017 diff hist +16 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 09:00, 27 June 2017 diff hist +28 Sputtering Recipes →Pt Deposition (Sputter 4)
- 08:59, 27 June 2017 diff hist 0 N File:Pt-Sputter4-3mT-50W-360s.pdf current
- 08:58, 27 June 2017 diff hist +79 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 08:56, 27 June 2017 diff hist -3 Vacuum Deposition Recipes
- 08:51, 27 June 2017 diff hist +3 Vacuum Deposition Recipes
- 08:41, 27 June 2017 diff hist +26 Vacuum Deposition Recipes
- 08:38, 27 June 2017 diff hist -1 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 08:37, 27 June 2017 diff hist +104 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:11, 7 June 2017 diff hist -20 Ellipsometer (Woollam) →About
- 16:09, 7 June 2017 diff hist +47 Ellipsometer (Woollam) →About
- 16:08, 7 June 2017 diff hist +77 Ellipsometer (Woollam) →About
- 08:37, 7 June 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:38, 2 June 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:06, 17 May 2017 diff hist +180 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:01, 17 May 2017 diff hist +67 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 10:58, 17 May 2017 diff hist +66 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 10:51, 17 May 2017 diff hist +9 Vacuum Deposition Recipes
- 10:49, 17 May 2017 diff hist +1 Vacuum Deposition Recipes
- 10:48, 17 May 2017 diff hist +8 Vacuum Deposition Recipes
- 10:42, 17 May 2017 diff hist -471 Sputtering Recipes →E-Beam 2 Recipes
- 10:40, 17 May 2017 diff hist +447 E-Beam Evaporation Recipes →E-Beam 2 (Custom)
- 16:27, 11 May 2017 diff hist -58 Sputtering Recipes →ITO deposition (E-Beam 2)
- 16:26, 11 May 2017 diff hist +34 Sputtering Recipes →ITO deposition (E-Beam 2)
- 16:25, 11 May 2017 diff hist 0 N File:ITO film-200C-O2-35sccm-EBeam2.pdf current
- 16:21, 11 May 2017 diff hist +94 Sputtering Recipes →ITO deposition (E-Beam 2)
- 16:05, 4 May 2017 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:22, 20 April 2017 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:19, 20 April 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:22, 22 March 2017 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:21, 22 March 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 17:17, 21 February 2017 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 17:16, 21 February 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:25, 9 February 2017 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:24, 9 February 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:31, 23 January 2017 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:30, 23 January 2017 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:22, 13 January 2017 diff hist +1 Vacuum Deposition Recipes
- 16:20, 13 January 2017 diff hist +27 Vacuum Deposition Recipes
- 16:17, 13 January 2017 diff hist +24 Vacuum Deposition Recipes
- 16:15, 13 January 2017 diff hist +12 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:13, 13 January 2017 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:11, 13 January 2017 diff hist -1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:05, 13 January 2017 diff hist +99 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:01, 13 January 2017 diff hist +70 Dry Etching Recipes
- 15:59, 13 January 2017 diff hist +34 RIE Etching Recipes →RIE 3 (MRC)
- 15:58, 13 January 2017 diff hist 0 RIE Etching Recipes →RIE 3 (MRC)
- 15:58, 13 January 2017 diff hist +119 RIE Etching Recipes →RIE 3 (MRC)
- 15:54, 13 January 2017 diff hist 0 N File:51-SiNx-Etch-Recipe-using-RIE3.pdf current
- 16:31, 16 December 2016 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 16:33, 1 December 2016 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:52, 5 October 2016 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:50, 5 October 2016 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 10:17, 22 September 2016 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 10:16, 22 September 2016 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:08, 1 September 2016 diff hist +40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:05, 1 September 2016 diff hist -40 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 08:52, 30 August 2016 diff hist +40 Sputtering Recipes →Ni and Ta Deposition (Sputter 3)
- 08:51, 30 August 2016 diff hist 0 N File:Ni Sputtering Film using Sputter 3-a.pdf current
- 08:50, 30 August 2016 diff hist -38 Sputtering Recipes →Ni and Ta Deposition (Sputter 3)
- 09:20, 19 August 2016 diff hist +38 Sputtering Recipes →Ti Deposition (Sputter 3)
- 09:19, 19 August 2016 diff hist 0 N File:Ti Sputtering Film using Sputter 3.pdf current
- 09:18, 19 August 2016 diff hist +81 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 09:16, 19 August 2016 diff hist +1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 08:58, 19 August 2016 diff hist +38 Sputtering Recipes →Ni and Ta Deposition (Sputter 3)
- 08:58, 19 August 2016 diff hist 0 N File:Ni Sputtering Film using Sputter 3.pdf current
- 08:57, 19 August 2016 diff hist +47 Sputtering Recipes →Ni and Ta Deposition (Sputter 3)
- 08:55, 19 August 2016 diff hist -1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:16, 18 August 2016 diff hist -1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:16, 18 August 2016 diff hist -1 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:14, 18 August 2016 diff hist +1 Vacuum Deposition Recipes
- 16:12, 18 August 2016 diff hist +1 Vacuum Deposition Recipes
- 16:11, 18 August 2016 diff hist +51 Vacuum Deposition Recipes
- 16:05, 18 August 2016 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:03, 18 August 2016 diff hist +98 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:55, 3 August 2016 diff hist 0 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 11:35, 2 August 2016 diff hist +34 RIE Etching Recipes →SiO2 Etching (RIE 3)
- 11:35, 2 August 2016 diff hist 0 N File:SiO2-Etch-Recipe-using-RIE-3-a.pdf current
- 11:33, 2 August 2016 diff hist -31 RIE Etching Recipes →SiO2 Etching (RIE 3)
- 11:12, 29 July 2016 diff hist +35 Dry Etching Recipes
- 11:09, 29 July 2016 diff hist +35 Dry Etching Recipes
- 11:07, 29 July 2016 diff hist +62 RIE Etching Recipes →SiO2 Etching (RIE 3)
- 11:06, 29 July 2016 diff hist +88 RIE Etching Recipes →RIE 3 (MRC)
- 10:34, 29 July 2016 diff hist +12 ICP Etching Recipes →GaN Etch (Unaxis VLR)
- 10:33, 29 July 2016 diff hist +22 Dry Etching Recipes
- 10:30, 29 July 2016 diff hist -1 ICP Etching Recipes →GaSb Etch (Unaxis VLR)
- 10:30, 29 July 2016 diff hist 0 ICP Etching Recipes →GaSb Etch (Unaxis VLR)
- 10:29, 29 July 2016 diff hist -4 ICP Etching Recipes →GaSb Etch (Unaxis VLR)
- 10:28, 29 July 2016 diff hist +17 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 10:26, 29 July 2016 diff hist +96 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 10:25, 29 July 2016 diff hist +48 Dry Etching Recipes
- 10:23, 29 July 2016 diff hist 0 N File:InGaAsSb etch.pdf current
- 10:17, 29 July 2016 diff hist +98 Dry Etching Recipes
- 10:16, 29 July 2016 diff hist +49 Dry Etching Recipes
- 10:12, 29 July 2016 diff hist +46 Dry Etching Recipes
- 10:11, 29 July 2016 diff hist +3 Dry Etching Recipes
- 10:10, 29 July 2016 diff hist +43 Dry Etching Recipes
- 10:09, 29 July 2016 diff hist +21 RIE Etching Recipes →RIE 2 (MRC)
- 10:08, 29 July 2016 diff hist 0 N File:ZnS Plasma Etch-1.pdf current
- 10:06, 29 July 2016 diff hist -4 RIE Etching Recipes →RIE 2 (MRC)
- 10:05, 29 July 2016 diff hist +91 RIE Etching Recipes →RIE 2 (MRC)
- 10:03, 29 July 2016 diff hist +88 Dry Etching Recipes
- 09:56, 29 July 2016 diff hist 0 Dry Etching Recipes
- 09:55, 29 July 2016 diff hist +20 Dry Etching Recipes
- 09:50, 29 July 2016 diff hist +96 Dry Etching Recipes
- 09:46, 29 July 2016 diff hist -281 Dry Etching Recipes
- 09:44, 29 July 2016 diff hist +164 Dry Etching Recipes
- 09:42, 29 July 2016 diff hist +52 Dry Etching Recipes
- 09:40, 29 July 2016 diff hist +52 Dry Etching Recipes
- 09:37, 29 July 2016 diff hist 0 Dry Etching Recipes
- 09:36, 29 July 2016 diff hist +58 Dry Etching Recipes
- 09:28, 29 July 2016 diff hist -9 Wet Etching Recipes →Metal Etching
- 09:27, 29 July 2016 diff hist -58 Wet Etching Recipes →Metal Etching
- 09:26, 29 July 2016 diff hist +110 Wet Etching Recipes →Metal Etching
- 09:25, 29 July 2016 diff hist +63 Wet Etching Recipes →Metal Etching
- 09:24, 29 July 2016 diff hist 0 N File:ITO Deposition-250C-Ebeam2-HCl-Wet-Etch.pdf current
- 16:15, 28 July 2016 diff hist +1 Sputtering Recipes →CeO2 deposition (E-Beam 2)
- 16:09, 28 July 2016 diff hist +35 Vacuum Deposition Recipes
- 16:06, 28 July 2016 diff hist +19 Vacuum Deposition Recipes
- 15:59, 28 July 2016 diff hist +11 Vacuum Deposition Recipes
- 15:58, 28 July 2016 diff hist +45 Vacuum Deposition Recipes
- 15:56, 28 July 2016 diff hist -15 Vacuum Deposition Recipes
- 15:44, 28 July 2016 diff hist +8 Vacuum Deposition Recipes
- 15:43, 28 July 2016 diff hist +8 Sputtering Recipes →E-Beam 2
- 15:42, 28 July 2016 diff hist +41 Vacuum Deposition Recipes
- 15:40, 28 July 2016 diff hist -36 Vacuum Deposition Recipes
- 15:38, 28 July 2016 diff hist +16 Sputtering Recipes
- 15:35, 28 July 2016 diff hist +34 Sputtering Recipes →Sputter 1 (Custom)
- 15:33, 28 July 2016 diff hist +45 Vacuum Deposition Recipes
- 15:26, 28 July 2016 diff hist +26 Sputtering Recipes →CeO2 deposition (E-Beam 2)
- 15:26, 28 July 2016 diff hist 0 N File:CeO2 Deposition-EBeam2.pdf current
- 15:23, 28 July 2016 diff hist +162 Sputtering Recipes
- 15:20, 28 July 2016 diff hist +7 Vacuum Deposition Recipes
- 15:17, 28 July 2016 diff hist +12 Vacuum Deposition Recipes
- 15:17, 28 July 2016 diff hist -530 Vacuum Deposition Recipes
- 15:15, 28 July 2016 diff hist -32 Vacuum Deposition Recipes
- 15:14, 28 July 2016 diff hist +1,065 Vacuum Deposition Recipes
- 15:02, 28 July 2016 diff hist +49 Wet Etching Recipes →Metal Etching
- 15:01, 28 July 2016 diff hist 0 N File:Ta and Cr E-beam deposition and wet etch test.pdf current