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- 16:47, 2 February 2021 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4-Florine Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 16:39, 2 February 2021 diff hist +52 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
- 16:26, 2 February 2021 diff hist -1 ICP Etching Recipes →Historical Data (SiO2, Florine ICP Etcher)
- 16:25, 2 February 2021 diff hist +53 ICP Etching Recipes →Historical Data (SiO2, Florines ICP Etcher)
- 16:22, 2 February 2021 diff hist +49 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher
- 19:42, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 19:41, 8 January 2021 diff hist 0 N File:I2210102.pdf current
- 19:39, 8 January 2021 diff hist +59 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a SEM pic Tag: Visual edit
- 19:37, 8 January 2021 diff hist 0 N File:I1210113.pdf current
- 17:45, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 adding a data point Tag: Visual edit
- 17:44, 8 January 2021 diff hist +36 Test Data of etching SiO2 with CHF3/CF4-ICP1 add a data poing Tag: Visual edit
- 18:55, 30 August 2020 diff hist +59 InP Etch Rate and Selectivity (InP/SiO2) add a Sem PIC Tag: Visual edit
- 18:54, 30 August 2020 diff hist 0 N File:IP020104.pdf current
- 18:50, 30 August 2020 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2) add a data point Tag: Visual edit
- 17:21, 10 August 2020 diff hist +10 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 17:21, 10 August 2020 diff hist +27 Test Data of etching SiO2 with CHF3/CF4 a comment added Tag: Visual edit
- 17:19, 10 August 2020 diff hist +59 Test Data of etching SiO2 with CHF3/CF4 add a SEM Tag: Visual edit
- 17:18, 10 August 2020 diff hist 0 N File:I2200203.pdf current
- 17:12, 10 August 2020 diff hist +36 Test Data of etching SiO2 with CHF3/CF4 add a etch data point Tag: Visual edit
- 15:59, 31 July 2020 diff hist -30 Dry Etching Recipes