User contributions
Jump to navigation
Jump to search
- 10:42, 1 February 2019 diff hist 0 N File:IP190103.pdf current
- 10:41, 1 February 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add SEM Tag: Visual edit
- 10:40, 1 February 2019 diff hist 0 N File:IP190101.pdf current
- 10:32, 1 February 2019 diff hist +37 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 13:18, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:18, 31 January 2019 diff hist 0 N File:IP180104.pdf current
- 13:17, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:17, 31 January 2019 diff hist 0 N File:IP180207.pdf current
- 13:16, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:15, 31 January 2019 diff hist 0 N File:IP180304.pdf current
- 13:15, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:14, 31 January 2019 diff hist 0 N File:IP180406.pdf current
- 12:56, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:55, 31 January 2019 diff hist 0 N File:IP180508.pdf current
- 12:54, 31 January 2019 diff hist 0 N File:IP180508.pptx current
- 12:49, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:48, 31 January 2019 diff hist 0 N File:IP180606.pdf current
- 12:39, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:38, 31 January 2019 diff hist 0 N File:IP180705.pdf current
- 12:37, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:35, 31 January 2019 diff hist 0 File:IP180805.pdf Ningcao uploaded File:IP180805.pdf current
- 12:30, 31 January 2019 diff hist -125 InP Etch Rate and Selectivity (InP/SiO2) delete a pic Tag: Visual edit
- 12:29, 31 January 2019 diff hist +135 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:08, 31 January 2019 diff hist +39 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:07, 31 January 2019 diff hist +90 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:06, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 12:05, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a SEM pic Tag: Visual edit
- 10:26, 31 January 2019 diff hist -37 Test Data of etching SiO2 with CHF3/CF4 add one more SEM pic Tag: Visual edit
- 10:24, 31 January 2019 diff hist +119 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 10:23, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2-no O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2-no O2.pdf current
- 10:22, 31 January 2019 diff hist +84 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add one SEM pic Tag: Visual edit
- 10:20, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2 with O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2 with O2.pdf current
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 12:20, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 29 January 2019 diff hist -5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:16, 29 January 2019 diff hist +5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:14, 29 January 2019 diff hist +63 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:14, 29 January 2019 diff hist 0 N File:I11901.pdf current
- 12:09, 29 January 2019 diff hist +238 N Test Data of etching SiO2 with CHF3/CF4-ICP1 Created page with "{| class="wikitable" | colspan="5" |ICP#1: 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged Si..." Tag: Visual edit
- 12:06, 29 January 2019 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:57, 29 January 2019 diff hist 0 N File:I11902.pdf current
- 11:46, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit