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- 10:32, 1 February 2019 diff hist +37 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 13:18, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:18, 31 January 2019 diff hist 0 N File:IP180104.pdf current
- 13:17, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:17, 31 January 2019 diff hist 0 N File:IP180207.pdf current
- 13:16, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:15, 31 January 2019 diff hist 0 N File:IP180304.pdf current
- 13:15, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 13:14, 31 January 2019 diff hist 0 N File:IP180406.pdf current
- 12:56, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:55, 31 January 2019 diff hist 0 N File:IP180508.pdf current
- 12:54, 31 January 2019 diff hist 0 N File:IP180508.pptx current
- 12:49, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:48, 31 January 2019 diff hist 0 N File:IP180606.pdf current
- 12:39, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:38, 31 January 2019 diff hist 0 N File:IP180705.pdf current
- 12:37, 31 January 2019 diff hist +61 InP Etch Rate and Selectivity (InP/SiO2) add a SEM Tag: Visual edit
- 12:35, 31 January 2019 diff hist 0 File:IP180805.pdf Ningcao uploaded File:IP180805.pdf current
- 12:30, 31 January 2019 diff hist -125 InP Etch Rate and Selectivity (InP/SiO2) delete a pic Tag: Visual edit
- 12:29, 31 January 2019 diff hist +135 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:08, 31 January 2019 diff hist +39 InP Etch Rate and Selectivity (InP/SiO2) add a SEM pic Tag: Visual edit
- 12:07, 31 January 2019 diff hist +90 InP Etch Test Result in Details add a file Tag: Visual edit
- 12:06, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 12:05, 31 January 2019 diff hist -3 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a SEM pic Tag: Visual edit
- 10:26, 31 January 2019 diff hist -37 Test Data of etching SiO2 with CHF3/CF4 add one more SEM pic Tag: Visual edit
- 10:24, 31 January 2019 diff hist +119 Test Data of etching SiO2 with CHF3/CF4 add a SEM pic Tag: Visual edit
- 10:23, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2-no O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2-no O2.pdf current
- 10:22, 31 January 2019 diff hist +84 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add one SEM pic Tag: Visual edit
- 10:20, 31 January 2019 diff hist 0 File:SiO2 Etch using ICP2 with O2.pdf Ningcao uploaded a new version of File:SiO2 Etch using ICP2 with O2.pdf current
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 12:20, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 29 January 2019 diff hist -5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:16, 29 January 2019 diff hist +5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:14, 29 January 2019 diff hist +63 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:14, 29 January 2019 diff hist 0 N File:I11901.pdf current
- 12:09, 29 January 2019 diff hist +238 N Test Data of etching SiO2 with CHF3/CF4-ICP1 Created page with "{| class="wikitable" | colspan="5" |ICP#1: 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged Si..." Tag: Visual edit
- 12:06, 29 January 2019 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:57, 29 January 2019 diff hist 0 N File:I11902.pdf current
- 11:46, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit
- 11:19, 29 January 2019 diff hist +7 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:13, 29 January 2019 diff hist -45 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:11, 29 January 2019 diff hist +4 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:06, 29 January 2019 diff hist +113 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 10:47, 29 January 2019 diff hist -30 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I) Tag: Visual edit
- 10:47, 29 January 2019 diff hist +85 ICP Etching Recipes /* SiO2 Etching with ICP1 Tag: Visual edit
- 10:42, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:38, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:37, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-a.pdf current
- 10:37, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 10:25, 29 January 2019 diff hist +4 Test Data of etching SiO2 with CHF3/CF4 add a new pic Tag: Visual edit
- 10:24, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2-no O2-a.pdf current
- 10:16, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:06, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:05, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:03, 11 December 2018 diff hist +77 N File:IP180805.pdf Created page with "thumb"
- 11:56, 11 December 2018 diff hist 0 N File:IP180909.pdf current
- 11:51, 11 December 2018 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2)
- 16:16, 11 October 2018 diff hist +2 Lithography Recipes →Holography Recipes
- 16:15, 11 October 2018 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf current
- 08:37, 9 October 2018 diff hist +78 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:33, 9 October 2018 diff hist +41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:30, 9 October 2018 diff hist -41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:28, 9 October 2018 diff hist +80 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 08:25, 9 October 2018 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 08:23, 9 October 2018 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2) Tag: Visual edit
- 08:17, 9 October 2018 diff hist +109 ICP Etching Recipes →SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit
- 08:13, 9 October 2018 diff hist -4 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 08:09, 9 October 2018 diff hist +249 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 16:17, 8 October 2018 diff hist +251 Test Data of etching SiO2 with CHF3/CF4/O2 add a table current Tag: Visual edit
- 16:15, 8 October 2018 diff hist -83 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 15:48, 8 October 2018 diff hist +40 N Test Data of etching SiO2 with CHF3/CF4 add a data file Tag: Visual edit
- 15:46, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2-no O2.pdf
- 15:45, 8 October 2018 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 2): add a title Tag: Visual edit
- 15:44, 8 October 2018 diff hist +42 N Test Data of etching SiO2 with CHF3/CF4/O2 add data file Tag: Visual edit
- 15:42, 8 October 2018 diff hist +48 ICP Etching Recipes →SiO2 Etching (Panasonic 2): adding SiO2 etch test title Tag: Visual edit
- 15:36, 8 October 2018 diff hist +4 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): add SiO2 test data Tag: Visual edit
- 15:32, 8 October 2018 diff hist +79 ICP Etching Recipes →SiO2 Etching (Panasonic 1): adding test data Tag: Visual edit
- 15:28, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2 with O2.pdf
- 11:24, 4 October 2018 diff hist -93 InP Etch Test Result in Details adding a data file Tag: Visual edit
- 11:19, 4 October 2018 diff hist 0 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 11:12, 4 October 2018 diff hist +23 InP Etch Rate and Selectivity (InP/SiO2) add a new pic Tag: Visual edit
- 10:59, 4 October 2018 diff hist +36 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 09:02, 21 August 2018 diff hist +30 Lithography Recipes →Holography Recipes
- 16:12, 16 August 2018 diff hist +64 Lithography Recipes →Holography Recipes
- 16:03, 16 August 2018 diff hist -64 Lithography Recipes →Holography Recipes
- 15:17, 13 August 2018 diff hist +93 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 15:01, 13 August 2018 diff hist +63 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:58, 13 August 2018 diff hist -91 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 14:03, 2 July 2018 diff hist +1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist +45 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist 0 N File:SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf current
- 14:01, 2 July 2018 diff hist +82 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)