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- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit
- 11:19, 29 January 2019 diff hist +7 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:13, 29 January 2019 diff hist -45 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:11, 29 January 2019 diff hist +4 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:06, 29 January 2019 diff hist +113 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 10:47, 29 January 2019 diff hist -30 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I) Tag: Visual edit
- 10:47, 29 January 2019 diff hist +85 ICP Etching Recipes /* SiO2 Etching with ICP1 Tag: Visual edit
- 10:42, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:38, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:37, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-a.pdf current
- 10:37, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 10:25, 29 January 2019 diff hist +4 Test Data of etching SiO2 with CHF3/CF4 add a new pic Tag: Visual edit
- 10:24, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2-no O2-a.pdf current
- 10:16, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:06, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:05, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:03, 11 December 2018 diff hist +77 N File:IP180805.pdf Created page with "thumb"
- 11:56, 11 December 2018 diff hist 0 N File:IP180909.pdf current
- 11:51, 11 December 2018 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2)
- 16:16, 11 October 2018 diff hist +2 Lithography Recipes →Holography Recipes
- 16:15, 11 October 2018 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf current
- 08:37, 9 October 2018 diff hist +78 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:33, 9 October 2018 diff hist +41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:30, 9 October 2018 diff hist -41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:28, 9 October 2018 diff hist +80 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 08:25, 9 October 2018 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 08:23, 9 October 2018 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2) Tag: Visual edit
- 08:17, 9 October 2018 diff hist +109 ICP Etching Recipes →SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit
- 08:13, 9 October 2018 diff hist -4 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 08:09, 9 October 2018 diff hist +249 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 16:17, 8 October 2018 diff hist +251 Test Data of etching SiO2 with CHF3/CF4/O2 add a table current Tag: Visual edit
- 16:15, 8 October 2018 diff hist -83 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 15:48, 8 October 2018 diff hist +40 N Test Data of etching SiO2 with CHF3/CF4 add a data file Tag: Visual edit
- 15:46, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2-no O2.pdf
- 15:45, 8 October 2018 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 2): add a title Tag: Visual edit
- 15:44, 8 October 2018 diff hist +42 N Test Data of etching SiO2 with CHF3/CF4/O2 add data file Tag: Visual edit
- 15:42, 8 October 2018 diff hist +48 ICP Etching Recipes →SiO2 Etching (Panasonic 2): adding SiO2 etch test title Tag: Visual edit
- 15:36, 8 October 2018 diff hist +4 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): add SiO2 test data Tag: Visual edit
- 15:32, 8 October 2018 diff hist +79 ICP Etching Recipes →SiO2 Etching (Panasonic 1): adding test data Tag: Visual edit
- 15:28, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2 with O2.pdf
- 11:24, 4 October 2018 diff hist -93 InP Etch Test Result in Details adding a data file Tag: Visual edit
- 11:19, 4 October 2018 diff hist 0 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 11:12, 4 October 2018 diff hist +23 InP Etch Rate and Selectivity (InP/SiO2) add a new pic Tag: Visual edit
- 10:59, 4 October 2018 diff hist +36 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 09:02, 21 August 2018 diff hist +30 Lithography Recipes →Holography Recipes
- 16:12, 16 August 2018 diff hist +64 Lithography Recipes →Holography Recipes
- 16:03, 16 August 2018 diff hist -64 Lithography Recipes →Holography Recipes
- 15:17, 13 August 2018 diff hist +93 InP Etch Test Result in Details add a new data file Tag: Visual edit
- 15:01, 13 August 2018 diff hist +63 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:58, 13 August 2018 diff hist -91 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 14:03, 2 July 2018 diff hist +1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist +45 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 14:02, 2 July 2018 diff hist 0 N File:SiO2-Mask Etch Recipe for Unaxis Cl2 Etch.pdf current
- 14:01, 2 July 2018 diff hist +82 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR)
- 15:36, 29 June 2018 diff hist -129 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:35, 29 June 2018 diff hist -1 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:34, 29 June 2018 diff hist -93 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -100 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:32, 29 June 2018 diff hist -123 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 15:10, 12 June 2018 diff hist +16 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 15:06, 12 June 2018 diff hist +3 Sputtering Recipes →Sputter 5 (AJA ATC 2200-V) Tag: Visual edit
- 15:05, 12 June 2018 diff hist +71 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): adding Cu deposition (Sputter4) into WiKi Tag: Visual edit
- 15:01, 12 June 2018 diff hist +84 Sputtering Recipes adding Al deposition data (Sputter5) into WiKi Tag: Visual edit
- 14:13, 29 May 2018 diff hist +65 InP Etch Rate and Selectivity (InP/SiO2) add a pic Tag: Visual edit
- 14:04, 29 May 2018 diff hist +35 InP Etch Rate and Selectivity (InP/SiO2) add data Tag: Visual edit
- 08:33, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:32, 18 May 2018 diff hist +55 Lithography Recipes →Photolithography Recipes
- 08:27, 18 May 2018 diff hist +230 Contact Alignment Recipes
- 08:25, 18 May 2018 diff hist 0 Contact Alignment Recipes
- 08:23, 18 May 2018 diff hist +36 Contact Alignment Recipes
- 08:21, 18 May 2018 diff hist +65 Contact Alignment Recipes
- 08:18, 18 May 2018 diff hist +126 Contact Alignment Recipes
- 08:13, 18 May 2018 diff hist 0 Lithography Recipes →Photolithography Recipes: adding recipe Tag: Visual edit
- 11:05, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 11:05, 2 May 2018 diff hist +711 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:38, 2 May 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 10:32, 2 May 2018 diff hist +22 InP Etch Rate and Selectivity (InP/SiO2) Tag: Visual edit
- 08:57, 2 May 2018 diff hist -46 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:57, 2 May 2018 diff hist +7 N InP Etch Test-in details Created page with "details" current Tag: Visual edit
- 08:55, 2 May 2018 diff hist +46 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:48, 2 May 2018 diff hist +90 N InP Etch Test Result in Details Created page with "https://www.nanotech.ucsb.edu/wiki/index.php/File:InP_Etch_using_Unaxis_PM1_at_200_C-2.pdf" Tag: Visual edit
- 08:47, 2 May 2018 diff hist +36 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:45, 2 May 2018 diff hist -31 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:43, 2 May 2018 diff hist -44 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:43, 2 May 2018 diff hist +7 N InP Etch test -details Created page with "details" current Tag: Visual edit
- 08:41, 2 May 2018 diff hist +44 ICP Etching Recipes →InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
- 08:39, 2 May 2018 diff hist -1 InP etch result in details Tag: Visual edit
- 08:36, 2 May 2018 diff hist +29 InP etch result in details Tag: Visual edit
- 08:16, 2 May 2018 diff hist -2 InP etch result in details Tag: Visual edit
- 08:12, 2 May 2018 diff hist -29 InP etch result in details Tag: Visual edit
- 08:02, 2 May 2018 diff hist +42 InP etch result in details Tag: Visual edit
- 16:25, 1 May 2018 diff hist -14 InP etch result in details Tag: Visual edit
- 16:22, 1 May 2018 diff hist +65 InP etch result in details Tag: Visual edit
- 16:20, 1 May 2018 diff hist -107 InP etch result in details Blanked the page Tag: Visual edit