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- 16:19, 29 June 2015 diff hist +81 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 16:18, 29 June 2015 diff hist +80 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 16:16, 29 June 2015 diff hist +58 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 16:15, 29 June 2015 diff hist 0 N File:36-Medium-stress SiNx using Unaxis ICP deposition tool.pdf current
- 16:10, 29 June 2015 diff hist +81 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:59, 29 June 2015 diff hist +65 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:59, 29 June 2015 diff hist 0 N File:34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf current
- 15:58, 29 June 2015 diff hist +78 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:32, 29 June 2015 diff hist -67 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:30, 29 June 2015 diff hist +12 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:28, 29 June 2015 diff hist +64 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:27, 29 June 2015 diff hist 0 N File:35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf current
- 15:24, 29 June 2015 diff hist +67 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 14:44, 29 June 2015 diff hist +67 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 15:14, 22 June 2015 diff hist +6 Lithography Recipes →Chemical Datasheets
- 15:12, 22 June 2015 diff hist +32 Lithography Recipes →Chemical Datasheets
- 15:12, 22 June 2015 diff hist 0 N File:3600 D, D2v Spin Speed Curve.pdf current
- 15:11, 22 June 2015 diff hist +23 Lithography Recipes →Chemical Datasheets
- 15:10, 22 June 2015 diff hist 0 N File:THMR iP 3500 iP3600.pdf current
- 15:10, 22 June 2015 diff hist +100 Lithography Recipes →Chemical Datasheets
- 15:07, 22 June 2015 diff hist +40 Lithography Recipes →Chemical Datasheets
- 15:06, 22 June 2015 diff hist 0 N File:THMR-iP3600 HP D 20140801 (B) GHS US.pdf current
- 15:05, 22 June 2015 diff hist +8 Lithography Recipes →Chemical Datasheets
- 11:20, 8 April 2015 diff hist +55 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:36, 8 April 2015 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:34, 8 April 2015 diff hist +1 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:32, 8 April 2015 diff hist 0 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:30, 8 April 2015 diff hist +103 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:29, 8 April 2015 diff hist +106 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:34, 3 April 2015 diff hist +105 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:30, 3 April 2015 diff hist +104 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:26, 27 January 2015 diff hist +43 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 10:24, 27 January 2015 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 10:24, 27 January 2015 diff hist +83 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 10:21, 27 January 2015 diff hist 0 N File:33-Etching SiO2 with Vertical Side-wall.pdf current
- 09:23, 21 January 2015 diff hist +48 ICP Etching Recipes →Al Etch (Panasonic 1)
- 09:22, 21 January 2015 diff hist 0 N File:32-Reducing AlCl3 Corrosion with CHF3 plasma.pdf current
- 09:21, 21 January 2015 diff hist -51 ICP Etching Recipes →Al Etch (Panasonic 1)
- 09:12, 21 January 2015 diff hist +52 ICP Etching Recipes →Al Etch (Panasonic 1)
- 09:10, 21 January 2015 diff hist +59 ICP Etching Recipes →Al Etch (Panasonic 1)
- 14:23, 18 April 2014 diff hist +64 Lithography Recipes →Holography Recipes
- 14:22, 18 April 2014 diff hist 0 N File:31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf current
- 14:16, 18 April 2014 diff hist -36 Lithography Recipes →Holography Recipes
- 14:12, 18 April 2014 diff hist +74 Lithography Recipes →Holography Recipes
- 14:11, 18 April 2014 diff hist 0 N File:30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf current
- 14:11, 18 April 2014 diff hist +78 Lithography Recipes →Holography Recipes
- 16:11, 17 April 2014 diff hist +96 PECVD Recipes →SiO2 (2% SiH4 - No Ar)
- 16:10, 17 April 2014 diff hist 0 N File:29-UnaxisPM3-SiO2-SiH4-O2-He.pdf current
- 16:10, 17 April 2014 diff hist +151 PECVD Recipes →SiO2 (2% SiH4 - No Ar)
- 15:29, 18 March 2014 diff hist +51 PECVD Recipes →SiN (2% SiH4)
- 15:28, 18 March 2014 diff hist 0 N File:28-Very-low-pin-hole-density SiNx film at 300 C.pdf current
- 15:28, 18 March 2014 diff hist +61 PECVD Recipes →SiN (2% SiH4)
- 15:10, 18 March 2014 diff hist +47 PECVD Recipes →SiN (100% SiH4 )
- 15:09, 18 March 2014 diff hist 0 N File:27-SiNx Film (Bias=50W) Sidewall Coverage.pdf current
- 15:08, 18 March 2014 diff hist -57 PECVD Recipes →SiN (100% SiH4 )
- 14:04, 18 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 14:03, 18 March 2014 diff hist 0 N File:23-Tungsten Sputtering Film-Sputter-4-Ar.pdf current
- 17:06, 31 January 2014 diff hist +3 Vapor HF Etch →About
- 17:05, 31 January 2014 diff hist +9 Vapor HF Etch →About
- 16:25, 31 January 2014 diff hist +4 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist -3 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist 0 Tool List →Dry Etch
- 15:51, 31 January 2014 diff hist +4 HF Vapor Etch →About current
- 15:49, 31 January 2014 diff hist -3 HF Vapor Etch →About
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:36, 31 January 2014 diff hist -124 HF Vapor Etch →Documentation
- 09:04, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 09:03, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 17:13, 30 January 2014 diff hist +1,398 N Vapor HF Etch Created page with "{{tool|{{PAGENAME}} |picture=IMG_2416_1.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = Vapor HF Etch..."
- 17:10, 30 January 2014 diff hist -8 Dry Etching Recipes
- 17:08, 30 January 2014 diff hist -1 Dry Etching Recipes
- 17:07, 30 January 2014 diff hist -7 Dry Etching Recipes
- 16:59, 30 January 2014 diff hist 0 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 16:59, 30 January 2014 diff hist 0 N File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf current
- 16:58, 30 January 2014 diff hist 0 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 16:57, 30 January 2014 diff hist 0 N File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf current
- 16:44, 30 January 2014 diff hist +37 HF Vapor Etch →Documentation
- 16:44, 30 January 2014 diff hist 0 N File:SPTS-Primaxx uEtch Presentation-b.pdf current
- 16:43, 30 January 2014 diff hist +26 HF Vapor Etch →Documentation
- 16:43, 30 January 2014 diff hist +37 HF Vapor Etch →Documentation
- 16:41, 30 January 2014 diff hist 0 N File:SPTS-Primaxx uEtch Presentation-a.pdf current
- 16:41, 30 January 2014 diff hist -22 Vapor HF Etch (uETCH) →Documentation current
- 12:48, 30 January 2014 diff hist -5 HF Vapor Etch →Documentation
- 12:47, 30 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 12:47, 30 January 2014 diff hist +67 HF Vapor Etch →Documentation
- 12:45, 30 January 2014 diff hist -7 HF Vapor Etch →Documentation
- 12:43, 30 January 2014 diff hist -1 HF Vapor Etch
- 12:40, 30 January 2014 diff hist -50 HF Vapor Etch
- 12:40, 30 January 2014 diff hist +64 HF Vapor Etch
- 12:39, 30 January 2014 diff hist 0 N File:IMG 2416 1.jpg current
- 12:38, 30 January 2014 diff hist -14 HF Vapor Etch
- 12:36, 30 January 2014 diff hist -53 HF Vapor Etch
- 12:35, 30 January 2014 diff hist +58 HF Vapor Etch
- 12:27, 30 January 2014 diff hist -1 HF Vapor Etch
- 12:07, 30 January 2014 diff hist +10 HF Vapor Etch
- 12:06, 30 January 2014 diff hist -13 HF Vapor Etch
- 11:55, 30 January 2014 diff hist +11 HF Vapor Etch
- 11:53, 30 January 2014 diff hist +450 HF Vapor Etch
- 11:39, 30 January 2014 diff hist -1 HF Vapor Etch