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- 15:28, 18 March 2014 diff hist 0 N File:28-Very-low-pin-hole-density SiNx film at 300 C.pdf current
- 15:28, 18 March 2014 diff hist +61 PECVD Recipes →SiN (2% SiH4)
- 15:10, 18 March 2014 diff hist +47 PECVD Recipes →SiN (100% SiH4 )
- 15:09, 18 March 2014 diff hist 0 N File:27-SiNx Film (Bias=50W) Sidewall Coverage.pdf current
- 15:08, 18 March 2014 diff hist -57 PECVD Recipes →SiN (100% SiH4 )
- 14:04, 18 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 14:03, 18 March 2014 diff hist 0 N File:23-Tungsten Sputtering Film-Sputter-4-Ar.pdf current
- 17:06, 31 January 2014 diff hist +3 Vapor HF Etch →About
- 17:05, 31 January 2014 diff hist +9 Vapor HF Etch →About
- 16:25, 31 January 2014 diff hist +4 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist -3 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist 0 Tool List →Dry Etch
- 15:51, 31 January 2014 diff hist +4 HF Vapor Etch →About current
- 15:49, 31 January 2014 diff hist -3 HF Vapor Etch →About
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:36, 31 January 2014 diff hist -124 HF Vapor Etch →Documentation
- 09:04, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 09:03, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 17:13, 30 January 2014 diff hist +1,398 N Vapor HF Etch Created page with "{{tool|{{PAGENAME}} |picture=IMG_2416_1.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = Vapor HF Etch..."