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- 15:28, 18 March 2014 diff hist 0 N File:28-Very-low-pin-hole-density SiNx film at 300 C.pdf current
- 15:28, 18 March 2014 diff hist +61 PECVD Recipes →SiN (2% SiH4)
- 15:10, 18 March 2014 diff hist +47 PECVD Recipes →SiN (100% SiH4 )
- 15:09, 18 March 2014 diff hist 0 N File:27-SiNx Film (Bias=50W) Sidewall Coverage.pdf current
- 15:08, 18 March 2014 diff hist -57 PECVD Recipes →SiN (100% SiH4 )
- 14:04, 18 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 14:03, 18 March 2014 diff hist 0 N File:23-Tungsten Sputtering Film-Sputter-4-Ar.pdf current
- 17:06, 31 January 2014 diff hist +3 Vapor HF Etch →About
- 17:05, 31 January 2014 diff hist +9 Vapor HF Etch →About
- 16:25, 31 January 2014 diff hist +4 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist -3 Vapor HF Etch →About
- 16:24, 31 January 2014 diff hist 0 Tool List →Dry Etch
- 15:51, 31 January 2014 diff hist +4 HF Vapor Etch →About current
- 15:49, 31 January 2014 diff hist -3 HF Vapor Etch →About
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:37, 31 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 15:36, 31 January 2014 diff hist -124 HF Vapor Etch →Documentation
- 09:04, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 09:03, 31 January 2014 diff hist 0 Vapor HF Etch →Documentation
- 17:13, 30 January 2014 diff hist +1,398 N Vapor HF Etch Created page with "{{tool|{{PAGENAME}} |picture=IMG_2416_1.jpg |type = Dry Etch |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 2 |email=silva@ece.ucsb.edu |description = Vapor HF Etch..."
- 17:10, 30 January 2014 diff hist -8 Dry Etching Recipes
- 17:08, 30 January 2014 diff hist -1 Dry Etching Recipes
- 17:07, 30 January 2014 diff hist -7 Dry Etching Recipes
- 16:59, 30 January 2014 diff hist 0 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 16:59, 30 January 2014 diff hist 0 N File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf current
- 16:58, 30 January 2014 diff hist 0 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 16:57, 30 January 2014 diff hist 0 N File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf current
- 16:44, 30 January 2014 diff hist +37 HF Vapor Etch →Documentation
- 16:44, 30 January 2014 diff hist 0 N File:SPTS-Primaxx uEtch Presentation-b.pdf current
- 16:43, 30 January 2014 diff hist +26 HF Vapor Etch →Documentation
- 16:43, 30 January 2014 diff hist +37 HF Vapor Etch →Documentation
- 16:41, 30 January 2014 diff hist 0 N File:SPTS-Primaxx uEtch Presentation-a.pdf current
- 16:41, 30 January 2014 diff hist -22 Vapor HF Etch (uETCH) →Documentation current
- 12:48, 30 January 2014 diff hist -5 HF Vapor Etch →Documentation
- 12:47, 30 January 2014 diff hist +62 HF Vapor Etch →Documentation
- 12:47, 30 January 2014 diff hist +67 HF Vapor Etch →Documentation
- 12:45, 30 January 2014 diff hist -7 HF Vapor Etch →Documentation
- 12:43, 30 January 2014 diff hist -1 HF Vapor Etch
- 12:40, 30 January 2014 diff hist -50 HF Vapor Etch
- 12:40, 30 January 2014 diff hist +64 HF Vapor Etch
- 12:39, 30 January 2014 diff hist 0 N File:IMG 2416 1.jpg current
- 12:38, 30 January 2014 diff hist -14 HF Vapor Etch
- 12:36, 30 January 2014 diff hist -53 HF Vapor Etch
- 12:35, 30 January 2014 diff hist +58 HF Vapor Etch
- 12:27, 30 January 2014 diff hist -1 HF Vapor Etch
- 12:07, 30 January 2014 diff hist +10 HF Vapor Etch
- 12:06, 30 January 2014 diff hist -13 HF Vapor Etch
- 11:55, 30 January 2014 diff hist +11 HF Vapor Etch
- 11:53, 30 January 2014 diff hist +450 HF Vapor Etch
- 11:39, 30 January 2014 diff hist -1 HF Vapor Etch
- 11:33, 30 January 2014 diff hist -839 HF Vapor Etch
- 11:13, 30 January 2014 diff hist +1 HF Vapor Etch
- 11:06, 30 January 2014 diff hist +12 HF Vapor Etch
- 10:58, 30 January 2014 diff hist +26 HF Vapor Etch
- 10:55, 30 January 2014 diff hist -2 HF Vapor Etch
- 10:53, 30 January 2014 diff hist -24 HF Vapor Etch
- 10:41, 30 January 2014 diff hist +1,490 N Vapor HF Etch (uETCH) Created page with " XeF2 Etch (Xetch) Jump to: navigation, search XeF2 Etch (Xetch) XeF2.jpg Tool Type Dry Etch Location Bay 2 Supervisor Don Freeborn Supervisor Phone (805) 893-3918x216 Sup..."
- 10:29, 30 January 2014 diff hist 0 Dry Etching Recipes
- 10:29, 30 January 2014 diff hist 0 Dry Etching Recipes
- 10:17, 30 January 2014 diff hist +5 Dry Etching Recipes
- 10:15, 30 January 2014 diff hist +1 Dry Etching Recipes
- 10:13, 30 January 2014 diff hist +12 Dry Etching Recipes
- 10:09, 30 January 2014 diff hist +1 Dry Etching Recipes
- 10:07, 30 January 2014 diff hist +62 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:06, 30 January 2014 diff hist +4 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:04, 30 January 2014 diff hist -69 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:04, 30 January 2014 diff hist +41 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:03, 30 January 2014 diff hist +130 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 17:03, 28 January 2014 diff hist +13 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 17:00, 28 January 2014 diff hist +56 Other Dry Etching Recipes →XeF2 Etch (Xetch)
- 16:56, 28 January 2014 diff hist +47 Dry Etching Recipes
- 16:53, 28 January 2014 diff hist +4 Dry Etching Recipes
- 16:48, 28 January 2014 diff hist +74 Dry Etching Recipes
- 16:46, 28 January 2014 diff hist +8 Dry Etching Recipes
- 16:44, 28 January 2014 diff hist +36 Dry Etching Recipes
- 16:40, 28 January 2014 diff hist +10 Dry Etching Recipes
- 16:37, 28 January 2014 diff hist +12 Dry Etching Recipes
- 16:36, 28 January 2014 diff hist +4 Dry Etching Recipes
- 16:35, 28 January 2014 diff hist +2 Dry Etching Recipes
- 16:32, 28 January 2014 diff hist +2 Dry Etching Recipes
- 16:28, 28 January 2014 diff hist +96 Dry Etching Recipes
- 16:23, 28 January 2014 diff hist -11 Dry Etching Recipes
- 16:22, 28 January 2014 diff hist +12 Dry Etching Recipes
- 12:30, 5 November 2013 diff hist +47 Vacuum Deposition Recipes
- 12:29, 5 November 2013 diff hist +47 Vacuum Deposition Recipes
- 12:25, 5 November 2013 diff hist +38 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:23, 5 November 2013 diff hist 0 N File:24-Ni and Ta Films using Sputter-3.pdf current
- 12:23, 5 November 2013 diff hist +80 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:12, 4 November 2013 diff hist +45 Vacuum Deposition Recipes
- 16:10, 4 November 2013 diff hist +41 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 4 November 2013 diff hist +64 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:26, 28 October 2013 diff hist 0 Vacuum Deposition Recipes
- 10:24, 28 October 2013 diff hist +48 Vacuum Deposition Recipes
- 10:22, 28 October 2013 diff hist +26 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:22, 28 October 2013 diff hist 0 N File:22-TiO2-Film-Sputter-2.pdf current
- 10:21, 28 October 2013 diff hist +93 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:41, 10 October 2013 diff hist -1 Vacuum Deposition Recipes
- 10:40, 10 October 2013 diff hist +48 Vacuum Deposition Recipes
- 10:38, 10 October 2013 diff hist +40 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:37, 10 October 2013 diff hist 0 N File:21-Au-Sputter-film-recipes-Sputter-2.pdf current