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- 11:33, 30 January 2014 diff hist -839 HF Vapor Etch
- 11:13, 30 January 2014 diff hist +1 HF Vapor Etch
- 11:06, 30 January 2014 diff hist +12 HF Vapor Etch
- 10:58, 30 January 2014 diff hist +26 HF Vapor Etch
- 10:55, 30 January 2014 diff hist -2 HF Vapor Etch
- 10:53, 30 January 2014 diff hist -24 HF Vapor Etch
- 10:41, 30 January 2014 diff hist +1,490 N Vapor HF Etch (uETCH) Created page with " XeF2 Etch (Xetch) Jump to: navigation, search XeF2 Etch (Xetch) XeF2.jpg Tool Type Dry Etch Location Bay 2 Supervisor Don Freeborn Supervisor Phone (805) 893-3918x216 Sup..."
- 10:29, 30 January 2014 diff hist 0 Dry Etching Recipes
- 10:29, 30 January 2014 diff hist 0 Dry Etching Recipes
- 10:17, 30 January 2014 diff hist +5 Dry Etching Recipes
- 10:15, 30 January 2014 diff hist +1 Dry Etching Recipes
- 10:13, 30 January 2014 diff hist +12 Dry Etching Recipes
- 10:09, 30 January 2014 diff hist +1 Dry Etching Recipes
- 10:07, 30 January 2014 diff hist +62 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:06, 30 January 2014 diff hist +4 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:04, 30 January 2014 diff hist -69 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:04, 30 January 2014 diff hist +41 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 10:03, 30 January 2014 diff hist +130 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 17:03, 28 January 2014 diff hist +13 Other Dry Etching Recipes →Vapor HF Etch (uETCH)
- 17:00, 28 January 2014 diff hist +56 Other Dry Etching Recipes →XeF2 Etch (Xetch)
- 16:56, 28 January 2014 diff hist +47 Dry Etching Recipes
- 16:53, 28 January 2014 diff hist +4 Dry Etching Recipes
- 16:48, 28 January 2014 diff hist +74 Dry Etching Recipes
- 16:46, 28 January 2014 diff hist +8 Dry Etching Recipes
- 16:44, 28 January 2014 diff hist +36 Dry Etching Recipes
- 16:40, 28 January 2014 diff hist +10 Dry Etching Recipes
- 16:37, 28 January 2014 diff hist +12 Dry Etching Recipes
- 16:36, 28 January 2014 diff hist +4 Dry Etching Recipes
- 16:35, 28 January 2014 diff hist +2 Dry Etching Recipes
- 16:32, 28 January 2014 diff hist +2 Dry Etching Recipes
- 16:28, 28 January 2014 diff hist +96 Dry Etching Recipes
- 16:23, 28 January 2014 diff hist -11 Dry Etching Recipes
- 16:22, 28 January 2014 diff hist +12 Dry Etching Recipes
- 12:30, 5 November 2013 diff hist +47 Vacuum Deposition Recipes
- 12:29, 5 November 2013 diff hist +47 Vacuum Deposition Recipes
- 12:25, 5 November 2013 diff hist +38 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:23, 5 November 2013 diff hist 0 N File:24-Ni and Ta Films using Sputter-3.pdf current
- 12:23, 5 November 2013 diff hist +80 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:12, 4 November 2013 diff hist +45 Vacuum Deposition Recipes
- 16:10, 4 November 2013 diff hist +41 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 4 November 2013 diff hist +64 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 10:26, 28 October 2013 diff hist 0 Vacuum Deposition Recipes
- 10:24, 28 October 2013 diff hist +48 Vacuum Deposition Recipes
- 10:22, 28 October 2013 diff hist +26 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:22, 28 October 2013 diff hist 0 N File:22-TiO2-Film-Sputter-2.pdf current
- 10:21, 28 October 2013 diff hist +93 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:41, 10 October 2013 diff hist -1 Vacuum Deposition Recipes
- 10:40, 10 October 2013 diff hist +48 Vacuum Deposition Recipes
- 10:38, 10 October 2013 diff hist +40 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 10:37, 10 October 2013 diff hist 0 N File:21-Au-Sputter-film-recipes-Sputter-2.pdf current
- 10:37, 10 October 2013 diff hist +66 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:21, 7 October 2013 diff hist +47 Vacuum Deposition Recipes
- 09:19, 7 October 2013 diff hist +35 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:19, 7 October 2013 diff hist 0 N File:20-Al-Sputtering-Film-Sputter-2.pdf current
- 09:18, 7 October 2013 diff hist +66 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:09, 7 October 2013 diff hist -1 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:07, 7 October 2013 diff hist -13 Vacuum Deposition Recipes
- 09:05, 7 October 2013 diff hist +60 Vacuum Deposition Recipes
- 09:02, 7 October 2013 diff hist +36 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:02, 7 October 2013 diff hist 0 N File:19-AlN-Sputtering-Film-Sputter-2.pdf current
- 09:01, 7 October 2013 diff hist 0 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 09:01, 7 October 2013 diff hist +24 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 08:56, 7 October 2013 diff hist 0 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 08:56, 7 October 2013 diff hist +69 Sputtering Recipes →Sputter 2 (SFI Endeavor)
- 14:48, 3 October 2013 diff hist +8 Contact Alignment Recipes
- 14:39, 3 October 2013 diff hist +9 Contact Alignment Recipes
- 14:36, 3 October 2013 diff hist +54 Lithography Recipes →Photolithography Recipes
- 14:33, 3 October 2013 diff hist +126 Contact Alignment Recipes
- 10:41, 3 October 2013 diff hist +32 ICP Etching Recipes →InP Etch
- 10:40, 3 October 2013 diff hist 0 N File:18-InP-based etching-Cl2N2Ar.pdf current
- 10:40, 3 October 2013 diff hist +15 ICP Etching Recipes →InP Etch
- 10:39, 3 October 2013 diff hist +37 ICP Etching Recipes →InP Etch
- 08:20, 3 October 2013 diff hist +43 ICP Etching Recipes →InP Etch (H2 Ar)
- 08:19, 3 October 2013 diff hist 0 N File:17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf current
- 08:18, 3 October 2013 diff hist +61 ICP Etching Recipes →InP Etch (H2 Ar)
- 16:14, 2 October 2013 diff hist +50 Dry Etching Recipes
- 16:11, 2 October 2013 diff hist +22 ICP Etching Recipes →GaAs Etch (Panasonic 2)
- 16:11, 2 October 2013 diff hist 0 N File:16-GaAs etch-ICP-2.pdf current
- 16:10, 2 October 2013 diff hist +74 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 13:50, 2 October 2013 diff hist +50 Dry Etching Recipes
- 13:48, 2 October 2013 diff hist +41 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 13:47, 2 October 2013 diff hist 0 N File:14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf current
- 13:47, 2 October 2013 diff hist +56 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 13:44, 2 October 2013 diff hist +49 Dry Etching Recipes
- 13:41, 2 October 2013 diff hist +34 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 13:41, 2 October 2013 diff hist 0 N File:15-GaAs etch-Unaxis ICP etcher.pdf current
- 13:40, 2 October 2013 diff hist +52 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 11:29, 2 October 2013 diff hist +46 Dry Etching Recipes
- 11:27, 2 October 2013 diff hist +32 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:26, 2 October 2013 diff hist 0 N File:13-GaAs-AlGaAs Etching-RIE-5.pdf current
- 11:25, 2 October 2013 diff hist -146 RIE Etching Recipes →AlGaAs Etching (RIE 5)=
- 11:25, 2 October 2013 diff hist +86 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:25, 2 October 2013 diff hist +59 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:23, 2 October 2013 diff hist -146 RIE Etching Recipes →AlGaAs Etching (RIE 5)=
- 11:22, 2 October 2013 diff hist -146 RIE Etching Recipes →AlGaAs Etching (RIE 5)=
- 11:22, 2 October 2013 diff hist +146 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:21, 2 October 2013 diff hist +147 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:20, 2 October 2013 diff hist +59 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 11:02, 2 October 2013 diff hist +52 Dry Etching Recipes
- 10:59, 2 October 2013 diff hist +54 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)