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- 00:44, 19 October 2022 diff hist +4 Template:Tool2test
- 00:43, 19 October 2022 diff hist -2 Template:Tool2test
- 00:41, 19 October 2022 diff hist 0 Template:Tool2test
- 00:38, 19 October 2022 diff hist +9 Template:Tool2test
- 00:35, 19 October 2022 diff hist +8 DUMMY TOOL
- 00:34, 19 October 2022 diff hist +127 Template:Tool2test make mfg/model not bold and optional (in conditioanls
- 00:30, 19 October 2022 diff hist +37 DUMMY TOOL
- 00:28, 19 October 2022 diff hist +89 Wet Benches →Wafer Toxic Corrosive Benches: changed to tool2, added MikeDay as backup, added materials,mfg,description
- 00:23, 19 October 2022 diff hist +157 Template:Tool2 added "IF" conditional around "recipes" section.
- 00:21, 19 October 2022 diff hist 0 Template:Tool2test
- 00:20, 19 October 2022 diff hist 0 Template:Tool2test
- 00:18, 19 October 2022 diff hist 0 Template:Tool2test
- 00:17, 19 October 2022 diff hist +11 m DUMMY TOOL added type, to remove Category text
- 17:06, 18 October 2022 diff hist +25 Template:Tool2test
- 17:05, 18 October 2022 diff hist -83 DUMMY TOOL try with blank args
- 17:04, 18 October 2022 diff hist +4 DUMMY TOOL trying tool2 updates, tool2test
- 17:03, 18 October 2022 diff hist +7,182 N Template:Tool2test pasted from tool2
- 16:27, 17 October 2022 diff hist +180 Template:Announcements MLA150 software update notes
- 16:24, 17 October 2022 diff hist -229 Template:Announcements Therma Evap 1 up
- 16:23, 17 October 2022 diff hist +232 Template:Announcements ASML maint
- 16:01, 15 October 2022 diff hist +245 Stepper Recipes →Stepper 3 (ASML DUV): LinkedIn to Design Tools section Tag: Visual edit
- 21:53, 13 October 2022 diff hist +55 Lithography Recipes →Chemicals Stocked + Datasheets: added AZ4620 + link to datasheet Tag: Visual edit
- 21:50, 13 October 2022 diff hist -528 Lithography Recipes →General Photolithography Techniques: deleted EBR section, combined it into this section Tag: Visual edit
- 21:49, 13 October 2022 diff hist +451 Photolithography - Manual Edge-Bead Removal Techniques added reasons for EBR and TOC
- 21:43, 13 October 2022 diff hist +2 m Lithography Recipes delete TOC
- 21:42, 13 October 2022 diff hist -2 Lithography Recipes TEMP TOC to get link
- 21:42, 13 October 2022 diff hist +215 Lithography Recipes Other PR processes, added link to reflow info Tag: Visual edit
- 11:14, 8 October 2022 diff hist +37 m Frequently Asked Questions →Authorship on Publications: minor updates Tag: Visual edit
- 20:51, 6 October 2022 diff hist -29 Stepper 2 (AutoStep 200) removed "work in progress" for Mask Making page Tag: Visual edit
- 20:51, 6 October 2022 diff hist +441 Autostep 200 Mask Making Guidance →CAD Files: todo: missing 'reticle handbook" Tag: Visual edit: Switched
- 10:52, 6 October 2022 diff hist -565 Maskless Aligner (Heidelberg MLA150) →Video Trainings: deleted old video link, notice of re-recording Tag: Visual edit
- 23:55, 4 October 2022 diff hist +223 Template:Announcements added NanoFab job openings
- 23:52, 4 October 2022 diff hist -4 m Template:Announcements
- 23:42, 4 October 2022 diff hist 0 Staff List →Process Group: Ning Cao --> OPEN POSITION Tag: Visual edit
- 23:41, 4 October 2022 diff hist +1,071 N Nanofab Job Postings linked to UCSB Jobs pages, instructios, listed Process Technician position Tag: Visual edit
- 23:06, 4 October 2022 diff hist +70 ASML DUV: Edge Bead Removal via Photolithography current Tag: Visual edit
- 23:04, 4 October 2022 diff hist +171 Photolithography - Manual Edge-Bead Removal Techniques →EBR100 Tag: Visual edit
- 23:01, 4 October 2022 diff hist +12 m Lithography Recipes →Edge-Bead Removal: bolded Tag: Visual edit
- 23:00, 4 October 2022 diff hist +41 m Lithography Recipes remove TOC, fix EBR link Tag: Visual edit: Switched
- 22:58, 4 October 2022 diff hist -2 Lithography Recipes TEMP TOC force
- 22:58, 4 October 2022 diff hist +949 Lithography Recipes added edge-bead removal section Tag: Visual edit
- 22:50, 4 October 2022 diff hist -32 DSEIII (PlasmaTherm/Deep Silicon Etcher) fixed link to SOP Tag: Visual edit
- 22:49, 4 October 2022 diff hist +52 N File:Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current Tag: New redirect
- 22:49, 4 October 2022 diff hist 0 m File:PT-DSEiii - Running a process.pdf John d moved page File:Running a process.pdf to File:PT-DSEiii - Running a process.pdf: added tool name to title current
- 22:47, 4 October 2022 diff hist +186 Photolithography - Manual Edge-Bead Removal Techniques linked to DUV Litho EBR Tag: Visual edit
- 13:26, 4 October 2022 diff hist +2 Chemical List →Material Safety Datasheets current Tag: Visual edit
- 13:13, 4 October 2022 diff hist +252 ICP Etching Recipes →Edge-Bead Removal: link to manual RP removal Tag: Visual edit
- 17:08, 3 October 2022 diff hist -360 Template:Announcements deleted GCA's up
- 17:06, 3 October 2022 diff hist +229 Template:Announcements Thermal1 down
- 11:47, 3 October 2022 diff hist +252 m Calculators + Utilities →CAD Design Tips: minor updates Tag: Visual edit
- 10:30, 3 October 2022 diff hist +210 Wet Benches →About: note about HF apron PPE Tag: Visual edit
- 22:52, 1 October 2022 diff hist +76 Tool List →Wet Processing: link to Wafer_Toxic_Corrosive_Bench Tag: Visual edit
- 22:51, 1 October 2022 diff hist +210 Wet Benches →Detailed Specifications: linked KOH bath to SUM Tag: Visual edit
- 16:54, 29 September 2022 diff hist +22 m Dry Etching Recipes fix incorrect color header cell
- 16:47, 29 September 2022 diff hist +74 m Unaxis VLR Etch - Process Control Data bold + colored header row Tag: Visual edit: Switched
- 16:33, 29 September 2022 diff hist +113 ICP Etching Recipes →ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
- 16:31, 29 September 2022 diff hist +186 ICP-Etch (Unaxis VLR) link to recipes, reduce headers to "heading level 1" (were "title" level) current Tag: Visual edit
- 15:44, 29 September 2022 diff hist -145 Template:Announcements ASML network update
- 15:43, 29 September 2022 diff hist -26 Template:Announcements GCA stepper 1 PM done
- 14:28, 29 September 2022 diff hist +245 Filmetrics F40-UV Microscope-Mounted →Good Curve-Fitting: explained reasonable vs. perfect curve fit current Tag: Visual edit
- 08:28, 28 September 2022 diff hist -155 Template:Announcements delete stepper 2 up
- 08:28, 28 September 2022 diff hist -48 Template:Announcements →GCA AutoStep Service: PM complete
- 10:54, 26 September 2022 diff hist -42 Template:Announcements AutoStep up.
- 07:34, 22 September 2022 diff hist +197 Template:Announcements corrected EB3 --> EB2, AUtostep down RMS
- 15:40, 21 September 2022 diff hist +122 Template:Announcements EB2 heater down
- 14:27, 21 September 2022 diff hist -8 Template:Announcements SEM#1 UP
- 08:33, 19 September 2022 diff hist +87 Template:Announcements GCA 6300 PM update
- 08:30, 19 September 2022 diff hist -11 Template:Announcements gca autostep 200 PM update
- 01:53, 17 September 2022 diff hist +77 Template:Announcements asml network update
- 15:50, 16 September 2022 diff hist +85 Sputter 5 (AJA ATC 2200-V) Added detailed specs section & ion mill current Tag: Visual edit
- 09:49, 14 September 2022 diff hist -6 m Template:Announcements
- 13:00, 13 September 2022 diff hist +192 Template:Announcements SEM1 down
- 12:52, 13 September 2022 diff hist +41 Ellipsometer (Woollam) updated wafer size Tag: Visual edit
- 10:04, 13 September 2022 diff hist +86 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →Equipment Specifications: addded spot size and glass slides for small samples current Tag: Visual edit
- 10:03, 13 September 2022 diff hist +73 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Added meas spot size current Tag: Visual edit
- 10:02, 13 September 2022 diff hist +111 Filmetrics F40-UV Microscope-Mounted →Capabilities: added spot size and film thickness limits Tag: Visual edit
- 09:59, 13 September 2022 diff hist +46 Ellipsometer (Woollam) →Specifications: added sample size Tag: Visual edit
- 07:50, 13 September 2022 diff hist -148 Template:Announcements
- 07:50, 13 September 2022 diff hist -49 Template:Announcements aja 4 update
- 09:28, 12 September 2022 diff hist +156 Template:Announcements Sputter 4 down
- 11:05, 9 September 2022 diff hist +26 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): convert to nm/min ER Tag: Visual edit
- 09:58, 9 September 2022 diff hist -683 CC-PRIME OnBoarding 2022-08 linked to QSF video/PDF, removed UCSBNetID requireemnts current Tag: Visual edit
- 09:58, 9 September 2022 diff hist +63 N File:QSF-SOP-020 Policy Guidelines and CHP Rev 2.022.pdf CC-PRIME Onboarding - safety training doc for QSF current
- 19:32, 7 September 2022 diff hist +123 KLayout Design Tips →File Types: Mentioned that MLA150 requires GDS Tag: Visual edit
- 19:30, 7 September 2022 diff hist +370 KLayout Design Tips →File Types: clarify OASIS GDS compatibility Tag: Visual edit
- 18:58, 7 September 2022 diff hist +215 KLayout Design Tips →How to draw circles: better method to convert all Cells to Static Cells Tag: Visual edit
- 18:55, 7 September 2022 diff hist +35 KLayout Design Tips added author credit Tag: Visual edit
- 10:03, 7 September 2022 diff hist -5 m Michael Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +4 m User:Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +32 N User:Barreraz linked to staff page Tag: Visual edit
- 08:37, 3 September 2022 diff hist -14 Microscopes →Microscope #1: Olympus BHMJL (removed temporarily): changed to Room 1111 Tag: Visual edit
- 08:35, 3 September 2022 diff hist +1,199 KLayout Design Tips link to QNFCF Youtube videos on Cells Tag: Visual edit
- 06:58, 2 September 2022 diff hist +289 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added SiO2 recipes Tag: Visual edit
- 10:15, 1 September 2022 diff hist +250 Template:Announcements added GCA Autostep service (Millerski)
- 10:07, 1 September 2022 diff hist -9 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: updated that it texts the supervisor Tag: Visual edit
- 15:01, 31 August 2022 diff hist 0 m Template:Announcements →Chlorine gasses available
- 14:58, 31 August 2022 diff hist +153 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added to gently DI rinse current Tag: Visual edit
- 10:57, 31 August 2022 diff hist -486 Template:Announcements Cl2 repair
- 14:36, 30 August 2022 diff hist 0 m Template:Announcements →All Chlorine gasses disabled
- 14:35, 30 August 2022 diff hist +66 Template:Announcements Cl2 update