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- 12:34, 26 August 2022 diff hist +67 N File:AmScope - Layers Merge - annot.png current
- 12:30, 26 August 2022 diff hist +69 N File:AmScope - 06 chose mic2-150x annot.png current
- 12:27, 26 August 2022 diff hist +64 N File:AmScope - 02 annot.png current
- 12:23, 26 August 2022 diff hist +1,273 UCSB NanoFab Microscope Training measurements section, mostly copy/pasted from parent page Tag: Visual edit
- 12:17, 26 August 2022 diff hist -1 m Microscopes →Microscope Training Guide Tag: Visual edit
- 00:53, 26 August 2022 diff hist +1 Oxford ICP Etcher - Process Control Data added NH4OH dilution Tag: Visual edit
- 00:46, 26 August 2022 diff hist +44 Oxford ICP Etcher - Process Control Data cahnged headings and added TOC Tag: Visual edit
- 00:45, 26 August 2022 diff hist +8 Oxford ICP Etcher - Process Control Data forced TOC
- 09:55, 25 August 2022 diff hist +870 N Equipment Group - Video Training Procedures pasted video training from parent page current Tag: Visual edit
- 09:55, 25 August 2022 diff hist -754 Nanofab Staff Internal Pages moving Video Trianing to separate Equip Group pages Tag: Visual edit
- 16:35, 24 August 2022 diff hist +41 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added software login Tag: Visual edit
- 16:34, 24 August 2022 diff hist +273 ASML 5500: Recovering from an Error addl info on unload wafers + reticles Tag: Visual edit
- 16:30, 24 August 2022 diff hist +12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration Tag: Visual edit
- 16:28, 24 August 2022 diff hist -13 ASML Stepper 3: Wafer Handler Reset Procedure current Tag: Visual edit
- 16:27, 24 August 2022 diff hist +103 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to Log window full proc. Tag: Visual edit
- 16:26, 24 August 2022 diff hist +55 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: minor updates Tag: Visual edit
- 16:26, 24 August 2022 diff hist +293 ASML Stepper 3 Standard Operating Procedure added to check Warnings window before starting Tag: Visual edit
- 16:21, 24 August 2022 diff hist +1,842 N ASML Stepper 3: Wafer Handler Reset Procedure pasted from gDocs Tag: Visual edit
- 16:18, 24 August 2022 diff hist +16 Stepper 3 (ASML DUV) →Operating Procedures Tag: Visual edit
- 16:17, 24 August 2022 diff hist -874 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration wafer handler reset - link to new page Tag: Visual edit
- 16:13, 24 August 2022 diff hist -626 ASML Stepper 3 Standard Operating Procedure pasted from Word Doc rev. 2022-08-23 DJ Tag: Visual edit
- 11:25, 23 August 2022 diff hist +11 Oven 4 (Thermo-Fisher HeraTherm) added toolid for SUM
- 08:44, 20 August 2022 diff hist +22 Dan Read current Tag: Visual edit
- 08:22, 20 August 2022 diff hist +6 Staff List →Facilities Group: bolded all managers/leads for each group Tag: Visual edit
- 09:36, 18 August 2022 diff hist +377 Template:Publications added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides current
- 23:28, 14 August 2022 diff hist +4 E-Beam Lithography System (JEOL JBX-6300FS) added "JBX-" to model # current
- 18:01, 10 August 2022 diff hist +257 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: winscp - multipel settings locations Tag: Visual edit
- 11:35, 6 August 2022 diff hist -5 m Sputter 3 (AJA ATC 2000-F) changed Documentation --> procedures to match the other tools Tag: Visual edit
- 11:34, 6 August 2022 diff hist +5 Sputter 5 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:34, 6 August 2022 diff hist +9 Sputter 4 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:33, 6 August 2022 diff hist +7 Sputter 3 (AJA ATC 2000-F) →Documentation: made training video section linkable Tag: Visual edit
- 14:02, 5 August 2022 diff hist +240 Nanofab Staff Internal Pages added Useful UCSB Pages > Faciltiies work requests Tag: Visual edit
- 12:33, 3 August 2022 diff hist +214 CC-PRIME OnBoarding 2022-08 →Location & Parking: added map and gMaps link Tag: Visual edit
- 12:24, 3 August 2022 diff hist +44 N File:CC-PRIME - Parking Lot 10 and CNSI - Annotated.png current
- 11:59, 3 August 2022 diff hist +8 Sputtering Recipes →Materials Table (Sputter 3): specified Tilt is in mm, since tool has both In & mm listed. Tag: Visual edit
- 11:58, 3 August 2022 diff hist -18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 11:57, 3 August 2022 diff hist +54 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): updated Au to 200W dep rate Tag: Visual edit
- 22:39, 2 August 2022 diff hist +7 DUMMY TOOL testing lenvik & Michael Barreraz
- 22:38, 2 August 2022 diff hist +54 Template:Tool2 added barreraz, millerksi, lenvik to allowed list (after updateing StaffContactInfo_DJ)
- 22:37, 2 August 2022 diff hist +357 Template:StaffContactInfo DJ added barreraz, millerski, lenvik current
- 22:27, 2 August 2022 diff hist +131 Template:Tool2 →Arguments with Specific Values: explanation where values come from
- 22:23, 2 August 2022 diff hist +125 Template:StaffContactInfo DJ added explanation
- 22:18, 2 August 2022 diff hist +509 Template:StaffContactInfo DJ added documentation, listing available staff names
- 22:04, 2 August 2022 diff hist +28 N Template:Tool2 DJ John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template current Tag: New redirect
- 22:04, 2 August 2022 diff hist 0 m Template:Tool2 John d moved page Template:Tool2 DJ to Template:Tool2: make it the standard tool2 template
- 21:59, 2 August 2022 diff hist -3 DUMMY TOOL change to tool2 tempalte
- 21:57, 2 August 2022 diff hist 0 m Template:Tool2 NLV John d moved page Template:Tool2 to Template:Tool2 NLV: deprecated old version current
- 15:58, 2 August 2022 diff hist +330 CC-PRIME OnBoarding 2022-08 art wafer photo Tag: Visual edit
- 15:56, 2 August 2022 diff hist +1,408 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 08:52, 2 August 2022 diff hist +83 N File:Directions to NanoFab - ESB map + P10 parking - Geo MapDev.png current
- 13:28, 1 August 2022 diff hist +26 CC-PRIME OnBoarding 2022-08 →Attire for In-Person Cleanroom Access Tag: Visual edit
- 13:06, 1 August 2022 diff hist +506 CC-PRIME OnBoarding 2022-08 guesses of Attire Tag: Visual edit
- 13:02, 1 August 2022 diff hist +237 CC-PRIME OnBoarding 2022-08 directions/parking Tag: Visual edit
- 12:40, 1 August 2022 diff hist +821 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 12:06, 1 August 2022 diff hist +328 CC-PRIME OnBoarding 2022-08 Tag: Visual edit
- 11:59, 1 August 2022 diff hist +692 N CC-PRIME OnBoarding 2022-08 Created page with "The tasks needed for signing up for CNSI's Technician Cleanroom Training class is below. Contact [mailto:demis@ucsb.edu;rlschoeppner@ucsb.edu?subject=CCPRIME%20Cleanroom%20Tr..." Tag: Visual edit
- 16:45, 29 July 2022 diff hist +197 MLA150 - Large Image GDS Generation updated formatting/numbered list current Tag: Visual edit
- 11:56, 29 July 2022 diff hist -29 Photoluminescence PL Setup (Custom) →Pump Lasers Available: added 532nm laser Tag: Visual edit
- 09:00, 22 July 2022 diff hist -116 Template:Announcements updated ASML note
- 06:11, 22 July 2022 diff hist +118 MLA150 - Troubleshooting →Solutions for small substrates: starting exp on uniform area. Tag: Visual edit
- 11:06, 20 July 2022 diff hist +4 m Template:Tool2
- 11:06, 20 July 2022 diff hist -3 Stepper 2 (AutoStep 200) update to Tool2: added Lee Sawyer as Super2
- 16:25, 19 July 2022 diff hist +22 m Ashers (Technics PEII) →Detailed Specifications Tag: Visual edit
- 11:50, 19 July 2022 diff hist +1 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): added PR selectivity Tag: Visual edit
- 11:45, 19 July 2022 diff hist -3 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: updated Process Control Data text Tag: Visual edit
- 08:18, 17 July 2022 diff hist -17 m Probe Station & Curve Tracer →Operation Procedures & Manuals Tag: Visual edit
- 16:23, 9 July 2022 diff hist +43 ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): mentioned PR mask Tag: Visual edit
- 11:09, 8 July 2022 diff hist +148 Thermal Processing Recipes →Thermal Oxidation of Silicon - Calculating Oxidation Times: link to BYU ox calc Tag: Visual edit
- 16:00, 7 July 2022 diff hist -424 Template:Announcements deleted PureStrip bath, Unaxis Dep
- 15:59, 7 July 2022 diff hist +134 Dry Etching Recipes added LiNbO3, SU8, BCB Tag: Visual edit
- 15:50, 7 July 2022 diff hist +121 Template:Recipe Table Explanation note that this template is no longer used current
- 15:48, 7 July 2022 diff hist +159 Lithography Recipes →Photolithography Recipes: removed recipe table explanation template Tag: Visual edit
- 15:46, 7 July 2022 diff hist +158 Dry Etching Recipes smaller fonts to make table more obvious Tag: Visual edit
- 15:44, 7 July 2022 diff hist +17 m Vacuum Deposition Recipes →Process Control Data: smaller font current Tag: Visual edit
- 15:44, 7 July 2022 diff hist +157 Vacuum Deposition Recipes →Deposition Tools/Materials Table: removed tempalte for smaller table explanation Tag: Visual edit
- 10:35, 7 July 2022 diff hist -1 m Ellipsometer (Woollam)
- 10:34, 7 July 2022 diff hist -19 Ellipsometer (Woollam) updated to tool2, added Aidan + Demis as super/super2
- 16:58, 6 July 2022 diff hist +263 MLA150 - Troubleshooting →Solution for 3-4 inch wafers: added CAD reduction by ≥10mm Tag: Visual edit
- 16:05, 6 July 2022 diff hist +11 Wet Etching Recipes force TOC above link to Master Table
- 16:04, 6 July 2022 diff hist -192 Wet Etching Recipes moved and emphasized link to master table. Tag: Visual edit: Switched
- 11:52, 6 July 2022 diff hist +22 Maskless Aligner (Heidelberg MLA150) added 2nd supervisor via {{tool2}} template, Lee Sawyer
- 08:16, 6 July 2022 diff hist +2,838 UCSB NanoFab Microscope Training Added Optical Filters & DIC sections Tag: Visual edit
- 08:04, 6 July 2022 diff hist +46 N File:Microscopes - DIC filters and light path.png current
- 07:49, 6 July 2022 diff hist +52 N File:Microscopes - Filter Out position-detent.png current
- 16:03, 5 July 2022 diff hist +6 m ASML 5500 Mask Making Guidelines →Design Guidelines Tag: Visual edit
- 10:18, 5 July 2022 diff hist -64 Template:Announcements updateD ASML
- 09:45, 5 July 2022 diff hist +61 DUMMY TOOL testing Tag: Visual edit
- 17:19, 4 July 2022 diff hist +49 m Packaging Recipes →Wax-Mounting to Carrier: writing creidts Tag: Visual edit
- 17:16, 4 July 2022 diff hist +2,819 Packaging Recipes →Mounting/Unmounting Samples: added “wax mounting to carrier” Tag: Visual edit
- 07:47, 1 July 2022 diff hist +69 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150): links to MJB/MA6 for Flood exp Tag: Visual edit
- 21:58, 30 June 2022 diff hist +211 Direct-Write Lithography Recipes →Positive Resist (MLA150): clarify “PEB” Tag: Visual edit
- 09:44, 28 June 2022 diff hist -179 Template:Announcements ASML update, system up, software fixed
- 18:59, 27 June 2022 diff hist +41 Template:Announcements asml UP, editing issue
- 03:09, 27 June 2022 diff hist +37 Template:Tool2 →Options
- 03:08, 27 June 2022 diff hist +148 Template:Tool2
- 03:06, 27 June 2022 diff hist +134 Template:Tool2 added example image
- 03:02, 27 June 2022 diff hist +41 N File:TOOL template - example image.png example of the tool infobox current
- 03:00, 27 June 2022 diff hist +21 Template:Tool2 added <includeonly>
- 02:56, 27 June 2022 diff hist +7 Template:StaffInfoSecondary DJ current
- 02:56, 27 June 2022 diff hist +15 Template:StaffInfo DJ current