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- 13:53, 8 October 2021 diff hist +128 Dry Etching Recipes link to Oxford InP/PnGaAsP recipes Tag: Visual edit
- 16:23, 7 October 2021 diff hist +253 Template:Announcements microscopy tech service
- 09:54, 7 October 2021 diff hist 0 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
- 09:53, 7 October 2021 diff hist +132 Stepper 3 (ASML DUV) →Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit
- 09:36, 7 October 2021 diff hist +45 Calculators + Utilities →Python Scripts: "pythonXY" --> "Spyder" Tag: Visual edit
- 10:39, 4 October 2021 diff hist -264 Template:Announcements deleted ASML PM
- 17:13, 1 October 2021 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications Tag: Visual edit
- 17:12, 1 October 2021 diff hist +318 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
- 17:10, 1 October 2021 diff hist +289 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added small-sample mounting notes Tag: Visual edit
- 17:07, 1 October 2021 diff hist -941 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) deleted old mounting/Bosch process info Tag: Visual edit
- 08:00, 30 September 2021 diff hist -1 m Template:Announcements
- 08:00, 30 September 2021 diff hist -122 Template:Announcements Oxford ICP
- 21:30, 29 September 2021 diff hist -7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 21:29, 29 September 2021 diff hist -10 m Template:News
- 16:09, 29 September 2021 diff hist -23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 12:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 11:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 11:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 11:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 10:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit