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- 17:25, 21 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 17:23, 21 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds current
- 17:21, 21 September 2021 diff hist -1,195 Calculators + Utilities →KLayout: moved KLayout tips to separate Klayout tips page Tag: Visual edit
- 17:20, 21 September 2021 diff hist +1,952 KLayout Design Tips pasted more tips from Calc+Utilities page Tag: Visual edit
- 17:08, 21 September 2021 diff hist +374 Calculators + Utilities →Material Parameters: added Lesker links Tag: Visual edit
- 17:04, 21 September 2021 diff hist +302 Calculators + Utilities →KLayout: minor updates to KLayout / Circles Tag: Visual edit
- 16:02, 21 September 2021 diff hist -168 Calculators + Utilities →L-Edit: updated to ECE's license Tag: Visual edit
- 17:32, 20 September 2021 diff hist +23 m Template:Announcements
- 17:32, 20 September 2021 diff hist +253 Template:Announcements UCSB netowrk problems
- 14:18, 11 September 2021 diff hist +1 Dry Etching Recipes FL-ICP: SiN = A Tag: Visual edit
- 21:44, 10 September 2021 diff hist +381 Sputter 5 (AJA ATC 2200-V) link to sputter 3/4 procedures, link to SUM page for targets, and ToolInfo toolID added Tag: Visual edit
- 21:36, 10 September 2021 diff hist +62 m Sputter 3 (AJA ATC 2000-F) →Materials Table: minor cleanup Tag: Visual edit
- 21:34, 10 September 2021 diff hist +290 Sputter 4 (AJA ATC 2200-V) link to recipes page, rearranged specs, materials at bottom Tag: Visual edit
- 17:07, 9 September 2021 diff hist +1,173 Stepper Recipes linked to PR datasheets Tag: Visual edit
- 15:59, 9 September 2021 diff hist +67 Stepper 2 (AutoStep 200) move mask-making to "process info" Tag: Visual edit
- 15:40, 9 September 2021 diff hist +687 Stepper 2 (AutoStep 200) →Process Information: aded CAD files section Tag: Visual edit
- 15:38, 9 September 2021 diff hist +68 N File:GCA Local Alignment Mark Dotted.gds current
- 15:36, 9 September 2021 diff hist +48 N File:GCA Local Alignment Mark.gds current
- 15:31, 9 September 2021 diff hist +12 Stepper 1 (GCA 6300) →Process Information: added CAD Files heading Tag: Visual edit
- 15:29, 9 September 2021 diff hist +522 Stepper 1 (GCA 6300) →Process Information: links to Photomask & Alignment CAD files Tag: Visual edit
- 15:27, 9 September 2021 diff hist +46 N File:GCA Global Mark.gds current
- 15:19, 8 September 2021 diff hist +650 Template:Announcements added MikeS's Stepper 1+2 PM's
- 22:39, 7 September 2021 diff hist +54 Template:Announcements →New COVID Protocols: link to full policies
- 16:13, 7 September 2021 diff hist +156 Stepper 3 (ASML DUV) reorganization Tag: Visual edit
- 16:04, 7 September 2021 diff hist +380 Template:Announcements Aidan's fire alarm email
- 16:03, 7 September 2021 diff hist +270 Template:Announcements ASML PM Feb March 8th
- 15:00, 3 September 2021 diff hist -28 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Recipes: corrected link to recipes Tag: Visual edit
- 14:12, 3 September 2021 diff hist +48 Dry Etching Recipes corrected Oxford link Tag: Visual edit
- 14:10, 3 September 2021 diff hist +705 ICP Etching Recipes Added Oxfrod ICP section and placeholder recipes Tag: Visual edit
- 14:04, 3 September 2021 diff hist +360 m Dry Etching Recipes corrected Row Bg colors
- 13:58, 3 September 2021 diff hist +973 Dry Etching Recipes Updated formatting- smaller font for model #, header colors
- 13:41, 3 September 2021 diff hist +231 Dry Etching Recipes inserted Oxford ICP column Tag: Visual edit
- 13:38, 3 September 2021 diff hist +2,774 N Oxford ICP Etcher (PlasmaPro 100 Cobra) first attempt at page
- 13:33, 3 September 2021 diff hist -4 m DSEIII (PlasmaTherm/Deep Silicon Etcher) corrected header level Tag: Visual edit
- 13:14, 3 September 2021 diff hist +359 Laser Etch Monitoring →Specific Procedures: Added Oxford Laser Mon Tag: Visual edit
- 13:13, 3 September 2021 diff hist +40 Tool List →ICP-RIE: link to Oxford ICP new page Tag: Visual edit
- 12:55, 3 September 2021 diff hist 0 File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg John d uploaded a new version of File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg current
- 09:35, 30 August 2021 diff hist -729 Template:Announcements deleted aidan's announcements
- 14:47, 27 August 2021 diff hist +299 Microscopes added Filmetrics F40-UV Tag: Visual edit
- 14:43, 27 August 2021 diff hist +139 Microscopes →Procedures & Tools: General-Use vs. Training-Required sections Tag: Visual edit
- 10:25, 26 August 2021 diff hist +1 m Services →Other U.C. Campuses: indent Attachment A
- 10:25, 26 August 2021 diff hist 0 m Services →Other U.C. Campuses: indent Attachment A
- 10:24, 26 August 2021 diff hist -8 m Services →Other U.C> Campuses: removed redlink to questionnaire, →Fabrication Services by NanoFab Staff: minor wording/formatting Tag: Visual edit
- 08:34, 26 August 2021 diff hist +135 Process Group - Remote Fabrication Jobs direct link to Fab Svc wall Tag: Visual edit
- 08:21, 26 August 2021 diff hist +143 Services →Fabrication Services by NanoFab Staff: formatting updates Tag: Visual edit: Switched
- 14:47, 24 August 2021 diff hist +30 PECVD 2 (Advanced Vacuum) moved recipes to bottom (like other pages) Tag: Visual edit
- 14:46, 24 August 2021 diff hist +8 PECVD 1 (PlasmaTherm 790) →Recipes & Process Data: renamed to Recipes and Historical Tag: Visual edit
- 14:45, 24 August 2021 diff hist +40 PECVD 2 (Advanced Vacuum) →Recipes: renamed to Recipes & Historical Tag: Visual edit
- 15:05, 23 August 2021 diff hist +81 Template:Announcements slashes on users
- 15:03, 23 August 2021 diff hist +6 m Template:Announcements changed CDA to Aidan