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- 09:14, 23 April 2020 diff hist -19 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor format Tag: Visual edit
- 09:12, 23 April 2020 diff hist +3 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 09:11, 23 April 2020 diff hist +43 m Test Data of etching SiO2 with CHF3/CF4-ICP1 formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +6 m Test Data of etching SiO2 with CHF3/CF4-ICP1 minor formatting Tag: Visual edit
- 09:10, 23 April 2020 diff hist +84 Test Data of etching SiO2 with CHF3/CF4-ICP1 comments on sidewall angle Tag: Visual edit
- 16:18, 22 April 2020 diff hist +495 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide updated to indicate the 2 methods of choosing cals Tag: Visual edit
- 15:44, 22 April 2020 diff hist +1,432 N Measurements and Imaging with Amscope Camera - Quickstart Usage Guide copy/pasted BrianT's email from Jul 26, 2019 Tag: Visual edit
- 15:36, 22 April 2020 diff hist +37 Microscopes →Image Analysis Software: link to Amscope Quickstart Tag: Visual edit
- 12:26, 22 April 2020 diff hist +98 N File:UCSB Service Agreement.pdf UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.
- 14:45, 21 April 2020 diff hist +291 PECVD Recipes →Cleaning Recipes (PECVD #2): changed Clean recipe to link to the screenshot instead of embedding in recipes page. added description of the clean Tag: Visual edit
- 14:42, 21 April 2020 diff hist +228 PECVD Recipes →Cleaning Recipes (PECVD #1): changed cleaning recipe image to Link to image, instead of embedded in page. Small description of the recipe. Tag: Visual edit
- 14:37, 21 April 2020 diff hist +20 m File:PECVD1-cleaning.png description update current
- 18:06, 13 April 2020 diff hist +204 Services formatting/clarify Tag: Visual edit
- 18:02, 13 April 2020 diff hist +62 Template:Links updated remote work/lab access links
- 11:54, 8 April 2020 diff hist +46 m Wafer scanning process traveler added author and spelling Tag: Visual edit
- 11:49, 8 April 2020 diff hist +128 Wafer scanning process traveler added wafers to use section and summary at top
- 09:06, 8 April 2020 diff hist +5 Stocked Chemical List added "IPA" to propanol names/notes Tag: Visual edit
- 08:59, 8 April 2020 diff hist +31 Stocked Chemical List added BHF % concentration Tag: Visual edit
- 12:45, 4 April 2020 diff hist +148 Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to template + CAD files Tag: Visual edit
- 15:49, 30 March 2020 diff hist +12 ICP Etching Recipes →Al Etch (Panasonic 1) Tag: Visual edit
- 15:48, 30 March 2020 diff hist +6 ICP Etching Recipes →Al Etch (Panasonic 2)
- 10:42, 30 March 2020 diff hist +6 ICP-PECVD (Unaxis VLR) →Documentation: fixed link
- 10:21, 30 March 2020 diff hist +4 m Stepper 2 (AutoStep 200) →Staff Procedures Tag: Visual edit
- 10:13, 30 March 2020 diff hist -4,103 Autostep 200 Troubleshooting and Recovery moved system restarting procedure to own page
- 10:11, 30 March 2020 diff hist +193 Stepper 2 (AutoStep 200) added shutartup-shutdown link Tag: Visual edit
- 15:05, 26 March 2020 diff hist +92 Mike Day added Tools > PEii ashers current Tag: Visual edit
- 15:04, 26 March 2020 diff hist -80 Staff List →Equipment Group: Deleted TomR from Equip. group (also in Facilities) Tag: Visual edit
- 15:03, 26 March 2020 diff hist +16 Biljana Stamenic Added "Tools" heading Tag: Visual edit
- 15:01, 26 March 2020 diff hist -1 m Tom Reynolds changed to May 2018 Tag: Visual edit
- 14:53, 26 March 2020 diff hist +77 N File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx CAD Tutorial - example programming spreadsheet for ASML Stepper current
- 14:48, 26 March 2020 diff hist +83 N File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03 current
- 14:35, 26 March 2020 diff hist -24 m Calculators + Utilities →Example CAD File: fixed link Tag: Visual edit: Switched
- 14:29, 26 March 2020 diff hist +471 Calculators + Utilities →Example CAD File: link to ASML Example CAD file and Programming page Tag: Visual edit: Switched
- 14:27, 26 March 2020 diff hist +88 N File:DEMISJAN2020 - Reticle Layout v1.GDS CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer current
- 12:31, 26 March 2020 diff hist +1,201 Calculators + Utilities →CAD Design Tips: added CAD tutorial - partial Tag: Visual edit
- 12:25, 26 March 2020 diff hist +78 N File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png current
- 11:50, 26 March 2020 diff hist +63 N File:CAD Tutorial for ASML Reticle v1.OAS Mask layout CAD tutorial for ASML Stepper reticle current
- 12:22, 24 March 2020 diff hist -37 Claudia Gutierrez initial stab at info. Tag: Visual edit
- 12:18, 24 March 2020 diff hist -9 m Ning Cao removed periods/spaces current Tag: Visual edit
- 14:33, 23 March 2020 diff hist -2 m E-Beam 1 (Sharon) removed link on "Documentation" heading
- 14:32, 23 March 2020 diff hist +769 Editing Tutorials →Linking to a PDF or other file: added "linking to an existing file", also corrected image indenting in Source Tag: Visual edit: Switched
- 14:27, 23 March 2020 diff hist +103 N File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png current
- 11:57, 23 March 2020 diff hist +548 Demis D. John added "COntact If..." section Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Bill Mitchell deleted Lorem Ipsum current Tag: Visual edit
- 11:32, 23 March 2020 diff hist -1,215 Ning Cao deleted Lorem ipsum Tag: Visual edit
- 11:31, 23 March 2020 diff hist +1 Tom Reynolds moved Lab Manager text Tag: Visual edit: Switched
- 11:28, 23 March 2020 diff hist -1,216 Brian Lingg removed lorem ipsum Tag: Visual edit
- 11:27, 23 March 2020 diff hist -15 Don Freeborn removed text Tag: Visual edit
- 11:27, 23 March 2020 diff hist -1,215 Luis Zuzunaga removed lorem ipsum Tag: Visual edit
- 11:26, 23 March 2020 diff hist -1,216 Tino Sy removed lorem ipsum current Tag: Visual edit