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- 10:44, 3 March 2020 diff hist +160 Research added Select Publications Tag: Visual edit
- 16:12, 28 February 2020 diff hist +130 Test Data of etching SiO2 with CHF3/CF4-ICP1 added note about incorrect sidewall profile Tag: Visual edit: Switched
- 14:12, 28 February 2020 diff hist -1 m Lab Rules moved sub-title to top
- 14:10, 28 February 2020 diff hist +204 m Lab Rules additional note at top regarding searching/FAQ/TOC Tag: Visual edit: Switched
- 13:59, 28 February 2020 diff hist +517 Services updated titles and slight formatting Tag: Visual edit
- 12:30, 28 February 2020 diff hist +88 m Services instruciton before, TOC
- 12:23, 28 February 2020 diff hist +32 m Services
- 12:10, 28 February 2020 diff hist +89 Services added TOC manually, forced
- 12:08, 28 February 2020 diff hist +3,156 N Services initial page with copy/pasted precodures and 3 headings Tag: Visual edit
- 15:18, 26 February 2020 diff hist +259 Template:Publications added title URLs
- 19:06, 25 February 2020 diff hist +3 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: minor slash
- 19:06, 25 February 2020 diff hist +52 m Template:News →TechTalk: Dr. Renan Moreira & Grégoire Coiffard: added date for RSS
- 19:04, 25 February 2020 diff hist +50 m Template:News →KLA Tencor Profilometer Installed: link to Brian Lingg's page
- 19:03, 25 February 2020 diff hist +13 m Template:News →Filmetrics Optical Measurement Systems: add link to Ning's page
- 19:02, 25 February 2020 diff hist -669 Template:News deleted Profilm3D article
- 19:01, 25 February 2020 diff hist -89 Tool List →Inspection, Test and Characterization: deleted Filmetrics Profilm3D link Tag: Visual edit
- 10:07, 25 February 2020 diff hist +301 m Calculators + Utilities →CAD Design Tips: added OASIS and "save session" note Tag: Visual edit
- 20:27, 24 February 2020 diff hist +472 ASML 5500 Mask Making Guidelines →Design Guidelines: added CAD tips Tag: Visual edit
- 15:32, 21 February 2020 diff hist +194 Frequently Asked Questions →Publications acknowledging the Nanofab: added code citing info Tag: Visual edit
- 12:40, 19 February 2020 diff hist +170 m Frequently Asked Questions →Where do I get these supplies for my lab?: link to UCBS sotrerooms Tag: Visual edit
- 12:35, 19 February 2020 diff hist +164 m Wet Benches →Detailed Specifications: added temp. check, minor rearrange Tag: Visual edit
- 12:21, 19 February 2020 diff hist +79 Ovens - Overview of All Lab Ovens added heramtherm max temp Tag: Visual edit
- 12:16, 19 February 2020 diff hist +81 Ovens - Overview of All Lab Ovens added SUM link for HeraTherm Tag: Visual edit
- 15:00, 18 February 2020 diff hist -276 m Template:Announcements deleted SUM testing
- 11:49, 16 February 2020 diff hist +13 Brian Thibeault updated position title
- 11:58, 12 February 2020 diff hist +16 Template:Announcements moved N2 DryBox to top, since it's imminent
- 11:54, 12 February 2020 diff hist +11 m Template:Announcements →ASML Maintenance: March 30th: minor text
- 11:53, 12 February 2020 diff hist +82 Template:Announcements updated GCA posts to 5-equals instead of 4
- 11:52, 12 February 2020 diff hist +28 Template:Announcements →SignupMonkey Testing: Fri Feb 7th, 7am: updated to 17th
- 20:03, 10 February 2020 diff hist -18 Ashers (Technics PEII) added model to Tool panel
- 19:40, 10 February 2020 diff hist -40 RIE 5 (PlasmaTherm) added model to Tool panel
- 19:33, 10 February 2020 diff hist -26 CAIBE (Oxford Ion Mill) added model to Tool panel
- 13:05, 31 January 2020 diff hist +48 Frequently Asked Questions →Publications acknowledging the Nanofab: added "local UCSB researchers" Tag: Visual edit
- 00:04, 30 January 2020 diff hist +248 Template:Announcements SUM testing feb 7
- 18:14, 28 January 2020 diff hist +9 m UCSB NanoFab Microscope Training →General Focusing: reorg danger of crashing at top Tag: Visual edit
- 18:12, 28 January 2020 diff hist +79 m UCSB NanoFab Microscope Training →Focusing on a sample with no features (Focus Stop): caption update Tag: Visual edit
- 18:10, 28 January 2020 diff hist +229 UCSB NanoFab Microscope Training added F-stop image to table in the F-stop section Tag: Visual edit: Switched
- 18:06, 28 January 2020 diff hist +85 N File:Microscope Training - UScope F-stop example annotated 1000px.png current
- 11:38, 28 January 2020 diff hist +2 m ICP Etching Recipes →ARC Etching: DUV-42P or AR6: formatting Tag: Visual edit
- 11:36, 28 January 2020 diff hist +96 m ICP Etching Recipes →Photoresist and ARC etching: added names for contact for etch rates Tag: Visual edit
- 17:09, 27 January 2020 diff hist +125 Frequently Asked Questions →Bring a new chemical/material into the lab: clarified requiremnt to ask brianT Tag: Visual edit
- 08:30, 27 January 2020 diff hist -154 Template:Announcements shortened ASML
- 18:00, 23 January 2020 diff hist +139 Test Data of etching SiO2 with CHF3/CF4-ICP1 added row explaining chamber clean. Tag: Visual edit
- 20:51, 22 January 2020 diff hist +117 UCSB NanoFab Microscope Training →Shadow Iris/Aperture for Focusing: added technical term “focus stop” Tag: Visual edit
- 12:11, 22 January 2020 diff hist +1,235 Microscopes links to Amscope & FIJI Tag: Visual edit: Switched
- 10:48, 22 January 2020 diff hist +64 Filmetrics F40-UV Microscope-Mounted →About: add BHJML model Tag: Visual edit
- 01:48, 19 January 2020 diff hist +433 Calculators + Utilities →Analysis Programs: added AmScope calibration file Tag: Visual edit
- 13:55, 18 January 2020 diff hist +4 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: link to github repo Tag: Visual edit
- 13:55, 18 January 2020 diff hist +10 Stepper 3 (ASML DUV) moved UCSB Test reticles to "Design & Fabrication Tools" section Tag: Visual edit: Switched
- 13:53, 18 January 2020 diff hist +198 Stepper 3 (ASML DUV) moved Mask Making Guidelines to "Design Tools" section Tag: Visual edit
- 09:03, 17 January 2020 diff hist +112 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
- 09:02, 17 January 2020 diff hist +166 ICP Etching Recipes →SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
- 08:59, 17 January 2020 diff hist +46 ICP Etching Recipes →SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit
- 17:25, 16 January 2020 diff hist -36 Template:Announcements asml PM moved
- 17:03, 14 January 2020 diff hist +247 Template:Announcements ASML PM Feb
- 10:27, 13 January 2020 diff hist +18 Template:Announcements ASML up
- 09:13, 13 January 2020 diff hist -3 Template:Announcements ASML down
- 23:36, 9 January 2020 diff hist +57 m Calculators + Utilities →Refractive Indices Tag: Visual edit
- 23:30, 9 January 2020 diff hist +109 m ASML 5500 Mask Making Guidelines →Submission Details Tag: Visual edit
- 23:25, 9 January 2020 diff hist +157 m ASML 5500 Mask Making Guidelines →Templates: alignment Mark not symmetric Tag: Visual edit
- 11:00, 9 January 2020 diff hist -102 Template:Announcements →ASML is DOWN: Repair Expected Monday: system up
- 15:14, 2 January 2020 diff hist -13 Template:Announcements asml update
- 13:33, 2 January 2020 diff hist +24 m Template:Announcements update ASML title
- 13:33, 2 January 2020 diff hist -118 Template:Announcements removed CR=OPEN, ASML update
- 18:57, 1 January 2020 diff hist +587 PECVD Recipes Added section sub-headings Tag: Visual edit
- 18:42, 1 January 2020 diff hist +405 PECVD 2 (Advanced Vacuum) link to recipes page Tag: Visual edit
- 18:33, 1 January 2020 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4 shortened link text Tag: Visual edit: Switched
- 14:00, 30 December 2019 diff hist -5 m Template:Announcements Undo revision 157023 by John d (talk) Tag: Undo
- 14:00, 30 December 2019 diff hist +5 m Template:Announcements br
- 13:58, 30 December 2019 diff hist -2 m Template:Announcements removed whitespace
- 13:57, 30 December 2019 diff hist -5 m Template:Announcements title HR
- 13:56, 30 December 2019 diff hist +16 m Template:Announcements header level remove
- 11:57, 30 December 2019 diff hist -4 m Template:Announcements title heading level 2
- 11:57, 30 December 2019 diff hist +2 m Template:Announcements title heading level 4
- 11:56, 30 December 2019 diff hist +2 Template:Announcements title heading level
- 11:54, 30 December 2019 diff hist -50 Template:Announcements →ASML is DOWN: level sensor update
- 11:01, 30 December 2019 diff hist +68 Template:Announcements →ASML is DOWN: light bulb update
- 09:50, 28 December 2019 diff hist -29 Template:Announcements nanofab open, asml down
- 16:24, 19 December 2019 diff hist -625 Template:Publications updated notes to show how to make new post
- 16:15, 19 December 2019 diff hist +60 Template:Publications try URL in post title
- 16:13, 19 December 2019 diff hist +1,229 Template:Publications added some selected publications
- 15:56, 19 December 2019 diff hist +2,237 N Template:Publications dummy articles
- 11:06, 19 December 2019 diff hist +107 m Tool List →Lithography Support: link to POLOS section Tag: Visual edit
- 11:05, 19 December 2019 diff hist +279 Tool List →Lithography: added POLOS spinners Tag: Visual edit
- 11:02, 19 December 2019 diff hist -191 Wet Benches enabled automatic TOC
- 11:01, 19 December 2019 diff hist +1,501 Wet Benches Added POLOS section, reformatting headings to use correct level. Tag: Visual edit
- 10:25, 19 December 2019 diff hist -3 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration typo Tag: Visual edit
- 10:25, 19 December 2019 diff hist +192 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added some common warnings Tag: Visual edit
- 10:22, 19 December 2019 diff hist +454 Stepper 3 (ASML DUV) →Operating Procedures: added Software options section Tag: Visual edit
- 14:48, 10 December 2019 diff hist +2 m Calculators + Utilities →Fabrication Processes & Converters: fixed BYU URL
- 11:03, 6 December 2019 diff hist +152 m Frequently Asked Questions →Specific Equipment Problem: update equipment problem reporting, added SUM contact info Tag: Visual edit
- 17:19, 3 December 2019 diff hist +778 Calculators + Utilities →CAD Layout Programs: added CAD tips re: Cells Tag: Visual edit
- 12:55, 3 December 2019 diff hist +46 Microscopes →Microscope #1: Olympus BHMJL (Char. Lab, Room 1111): added user manual Tag: Visual edit
- 12:49, 3 December 2019 diff hist +211 Microscopes corrected microscope 1 to olympus, afdded # 5, 6 to Olympus Flour/DUV scopes Tag: Visual edit
- 12:47, 3 December 2019 diff hist +63 N File:Microscope 01 Olympus BHMJL crop.png current
- 02:37, 30 November 2019 diff hist +22 m Lift-Off with DUV Imaging + PMGI Underlayer →Images / Examples: image acknowledgement Tag: Visual edit
- 02:31, 30 November 2019 diff hist +38 Lift-Off with DUV Imaging + PMGI Underlayer Acknowledge development by demis Tag: Visual edit
- 15:33, 27 November 2019 diff hist +42 Frequently Asked Questions →Authorship on Publications: added "if images/data included in paper" Tag: Visual edit
- 15:29, 27 November 2019 diff hist -128 Template:Announcements deleted ASML Down
- 15:26, 27 November 2019 diff hist +12 m ICP-PECVD (Unaxis VLR) →Cluster Configuration: bold Tag: Visual edit