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- 10:55, 4 June 2019 diff hist +2 High Temp Oven (Blue M) tool id included for SUM link
- 10:47, 4 June 2019 diff hist +46 N Oven 4 (Fisher) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven current
- 10:47, 4 June 2019 diff hist 0 m Oven 4 (Thermo-Fisher HeraTherm) John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven
- 10:44, 4 June 2019 diff hist +169 N Ovens - Overview of All Lab Ovens created page, generic Tool info
- 10:25, 4 June 2019 diff hist +74 Tool List →Thermal Processing for Photolithography: link to new Ovens Overview page Tag: Visual edit
- 11:23, 31 May 2019 diff hist -14 Filmetrics F40-UV Microscope-Mounted removed "screenshots" section --> "Examples" Tag: Visual edit
- 11:23, 31 May 2019 diff hist +1,293 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: updated examples & confirming removal of SiO2 on Pt Tag: Visual edit
- 11:13, 31 May 2019 diff hist +19 m Filmetrics F40-UV Quick Start formatting current Tag: Visual edit
- 11:11, 31 May 2019 diff hist +131 Filmetrics F40-UV Quick Start →Sample Measurement: clarified good/bad fit & contatc Ning/Demis for help Tag: Visual edit: Switched
- 23:14, 30 May 2019 diff hist 0 m Template:Tool Removed spaces from filename in example.
- 23:10, 30 May 2019 diff hist +34 m Template:Tool →Options: no spaces in Picture filename
- 23:08, 30 May 2019 diff hist +20 m Template:Tool Typo in recipes thermalmproc
- 23:06, 30 May 2019 diff hist 0 m Rapid Thermal Processor (SSI Solaris 150) Corrected typo in recipe link
- 23:04, 30 May 2019 diff hist +14 m Thermal Processing Recipes More accurate description of how partial pressure derived Tag: Visual edit
- 23:00, 30 May 2019 diff hist +93 m Thermal Processing Recipes →Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit
- 22:56, 30 May 2019 diff hist +63 Tube Furnace (Tystar 8300) →About: specified tube 2: unprocessed, Tube3 processed is ok Tag: Visual edit
- 14:01, 30 May 2019 diff hist 0 m Tool List →Optical/Electron Microscopy: moved SEMs to bottom Tag: Visual edit
- 11:28, 30 May 2019 diff hist +565 Probe Station & Curve Tracer link to Keithley manuals etc. Tag: Visual edit
- 14:08, 28 May 2019 diff hist +114 m Thermal Processing Recipes linked to tool pages, minor updates, added HeraTherm for wafer bonding Tag: Visual edit
- 14:05, 28 May 2019 diff hist +1 m Tool List →Thermal Processing: corrected linberg --> lindberg over Tag: Visual edit
- 13:20, 28 May 2019 diff hist +972 Frequently Asked Questions new chemicals: include substrate materiasl Tag: Visual edit
- 13:10, 28 May 2019 diff hist +41 Frequently Asked Questions reordered by importance Tag: Visual edit
- 13:06, 28 May 2019 diff hist +89 m Frequently Asked Questions →Publications acknowledging the Nanofab: minor Tag: Visual edit
- 13:04, 28 May 2019 diff hist +575 Frequently Asked Questions →Wifi Access in the Nanofab: link to iOS/Android Wifi Calling instructions Tag: Visual edit
- 12:56, 28 May 2019 diff hist -217 Template:Announcements deleted Lab Open fan exhaust maintenance
- 12:55, 28 May 2019 diff hist +335 Template:Announcements ASMl PM
- 12:30, 28 May 2019 diff hist +87 Thermal Processing Recipes anned RTP Solaris section Tag: Visual edit: Switched
- 12:28, 28 May 2019 diff hist +1,043 Frequently Asked Questions publications and Wifi access/calling Tag: Visual edit
- 12:13, 28 May 2019 diff hist +522 N Rapid Thermal Processor (SSI Solaris 150) inital page with `todo` listed
- 12:05, 28 May 2019 diff hist +48 Tool List →Thermal Processing: link to RTP Solaris 150 Tag: Visual edit
- 12:04, 28 May 2019 diff hist +1 m Template:News →New Rapid Thermal Annealer Installation: spelling
- 12:03, 28 May 2019 diff hist +320 Template:News SSI RTP installation
- 09:41, 24 May 2019 diff hist +125 MediaWiki:Sidebar added Main Page: Force Refresh, clarified Tempaltes
- 09:37, 24 May 2019 diff hist -19 Template:Announcements lab open, deleted exhaust shutdown
- 00:03, 24 May 2019 diff hist 0 m Filmetrics F40-UV Microscope-Mounted punctiation of tool type
- 21:47, 23 May 2019 diff hist -59 m Filmetrics F40-UV Microscope-Mounted tool descr. update
- 21:44, 23 May 2019 diff hist +11 m Filmetrics F40-UV Microscope-Mounted updated tool description
- 21:39, 23 May 2019 diff hist +583 Filmetrics F40-UV Microscope-Mounted →Screenshots + Examples: Added example of inspecting for SiO2 dry-etch completion. Tag: Visual edit
- 21:36, 23 May 2019 diff hist +72 N File:Filmetrics F40-UV - 2018-11-08 - SiO Etch 4m+4m+1m - Fully Removed.png current
- 21:33, 23 May 2019 diff hist +51 N File:Filmetrics F40-UV - SiO Etch 4m+4m - Incomplete Etch.png current
- 23:33, 21 May 2019 diff hist +10 m Template:Tool showing spaces in photo filename
- 23:31, 21 May 2019 diff hist +78 m Template:Tool updated description
- 23:27, 21 May 2019 diff hist +312 Filmetrics F40-UV Microscope-Mounted added measurement screenshot
- 23:24, 21 May 2019 diff hist +147 N File:Filmetrics F40-UV - Measurement screenshot on metal pad 01.PNG Filmetrics F40-UV - Measurement screenshot on metal pad 01, showing icroscope view and resulting spectrum meas. + curve fitting and film thickness. current
- 23:19, 21 May 2019 diff hist +301 Filmetrics F40-UV Microscope-Mounted added Tool template instead of simple photo
- 12:35, 21 May 2019 diff hist -182 m Template:Tool →Arguments with Specific Values: cleanup options lists
- 12:11, 21 May 2019 diff hist +216 m Template:Tool →Arguments with Specific Values: clearified lists
- 12:07, 21 May 2019 diff hist +1,120 Template:Tool more info on editing supervisor info.
- 11:57, 21 May 2019 diff hist +1,995 Template:Tool info on each argument.
- 11:32, 16 May 2019 diff hist +81 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers pic of manual box
- 11:32, 16 May 2019 diff hist 0 File:Panasonic ICP1 Manual Box - annot v2.png John d uploaded a new version of File:Panasonic ICP1 Manual Box - annot v2.png current
- 11:26, 16 May 2019 diff hist +61 N File:Panasonic ICP1 Manual Box - annot v2.png Pan ICP1 Manual Box annotated to show RF Off & Ethcing Select
- 20:14, 15 May 2019 diff hist 0 m Demis D. John →Tools
- 20:12, 15 May 2019 diff hist +77 Demis D. John →Tools: added laser monitors Tag: Visual edit
- 20:11, 15 May 2019 diff hist +117 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Notice that training required. Tag: Visual edit
- 19:32, 15 May 2019 diff hist +102 Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers Added to press Enable buttons on Manual box. Tag: Visual edit
- 19:05, 15 May 2019 diff hist -22 m Laser Etch Monitoring Monor removed Intellemetrics text die to Horiba and custom system. Tag: Visual edit
- 18:57, 15 May 2019 diff hist +70 N File:Intellemetrics LEP500 Photo.jpg Photo of Intellemetrics LEP 500 laser etch monitor on Panasonic ICP #2 current
- 18:56, 15 May 2019 diff hist +271 Laser Etch Monitoring Added Intellemetrics tool info
- 00:51, 15 May 2019 diff hist +101 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers manual box : etch select Tag: Visual edit
- 00:47, 15 May 2019 diff hist +131 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers HR Tag: Visual edit
- 00:47, 15 May 2019 diff hist +59 m Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers name and date Tag: Visual edit
- 00:39, 15 May 2019 diff hist +4,472 N Intellemetrics Laser Etch Monitor Procedure for Panasonic ICP Etchers INitial procedures for ICP1 & 2 Tag: Visual edit
- 00:00, 15 May 2019 diff hist +1,028 Laser Etch Monitoring →Procedures: general procedure Tag: Visual edit
- 23:50, 14 May 2019 diff hist +568 UCSB NanoFab Microscope Training inserted images for focus on edge, shadow iris, focus knob with gradations
- 23:43, 14 May 2019 diff hist 0 File:Nikon OptiPhot 200 - 6224 - field iris.jpg John d uploaded a new version of File:Nikon OptiPhot 200 - 6224 - field iris.jpg current
- 23:42, 14 May 2019 diff hist +47 N File:Nikon OptiPhot 200 - 6224 - field iris.jpg microscope knob for field aperture/focus shadow
- 23:39, 14 May 2019 diff hist +39 N File:Nikon OptiPhot 200 - 6219 - focus knob - .jpg Microscope - Focus Knob with Gradations current
- 23:29, 14 May 2019 diff hist +38 N File:Microscope Training - focus on edge crop - .jpg microscope - focusing on edge of wafer current
- 23:07, 14 May 2019 diff hist +63 m Fluorescence Microscope (Olympus MX51) included fluor. in description, mentioned calibations locked Tag: Visual edit
- 23:04, 14 May 2019 diff hist +307 m Microscopes update LEXT location, other minor updates
- 22:55, 14 May 2019 diff hist +186 Microscopes updated model numbers, Epi/Dia corrections Tag: Visual edit
- 20:59, 10 May 2019 diff hist +6 m UCSB NanoFab Microscope Training Moved shadow iris to focus sec.
- 20:57, 10 May 2019 diff hist +325 UCSB NanoFab Microscope Training Move TOC, shadow iris
- 10:16, 10 May 2019 diff hist +717 Microscopes updates on ProgRes/LEXT/DUV to specify user-editable vs. locked calibrations Tag: Visual edit
- 11:16, 7 May 2019 diff hist +9 m Calculators + Utilities →Analysis Programs: minor typos Tag: Visual edit
- 09:21, 7 May 2019 diff hist +27 N User:Zuzunaga lu redirect to Luis Zuzunaga staff page current
- 22:34, 6 May 2019 diff hist +73 m Stocked Chemical List su-8 = PR Tag: Visual edit
- 20:57, 6 May 2019 diff hist +1,088 Stocked Chemical List added alternate names col Tag: Visual edit
- 16:33, 6 May 2019 diff hist -2 Lithography Recipes →Photolithography Recipes: UVN2300-->UVN Tag: Visual edit
- 16:33, 6 May 2019 diff hist -4 Stepper Recipes →Negative Resist (ASML DUV): updates UVN2300 --> UVN30, from S.Cronin Traveler Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: updated recipe slink Tag: Visual edit
- 11:53, 3 May 2019 diff hist +26 m Stepper 1 (GCA 6300) →Process Information: minor text update Tag: Visual edit
- 08:25, 3 May 2019 diff hist +309 m UCSB NanoFab Microscope Training →General Focusing: minor updates Tag: Visual edit
- 23:29, 1 May 2019 diff hist 0 m Calculators + Utilities →Scripts + Programs: moved nk.py to python scripts section.
- 23:15, 1 May 2019 diff hist +121 N Talk:Vacuum Deposition Recipes Trying out mentioning brianT, curious if it’ll send him a notification. current
- 23:04, 1 May 2019 diff hist +486 m Frequently Asked Questions →How do I edit a page?: clarify restricted pages and course of action Tag: Visual edit
- 21:11, 1 May 2019 diff hist +191 m Frequently Asked Questions →Wiki Questions: encourage users to edit Tag: Visual edit
- 21:09, 1 May 2019 diff hist +147 m Editing Tutorials Minor intro Tag: Visual edit
- 21:08, 1 May 2019 diff hist +27 N Wiki Admin Redirect to Demis page current
- 21:03, 1 May 2019 diff hist +484 m Editing Tutorials Explain user/admin permissions, link to wiki Admin, highlight visual editor is recommended. Tag: Visual edit
- 20:50, 26 April 2019 diff hist +13 m Probe Station & Curve Tracer →About: minor grammar Tag: Visual edit
- 13:43, 26 April 2019 diff hist +9,961 N Filmetrics F50 - Operating Procedure inital copy of Ning's, formatted to numbered headings current Tag: Visual edit
- 13:37, 26 April 2019 diff hist +145 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) →Operating Procedures: link to SOP & adding a new model (placeholder) Tag: Visual edit
- 13:28, 26 April 2019 diff hist +109 m Probe Station & Curve Tracer →Installed Equipment: computer control specified Tag: Visual edit
- 13:27, 26 April 2019 diff hist +520 Probe Station & Curve Tracer images of each equipemnt Tag: Visual edit: Switched
- 13:25, 26 April 2019 diff hist +41 N File:BK Precision 1672 DC supply.png current
- 13:24, 26 April 2019 diff hist +26 N File:HP 3466A DMM.png current
- 13:24, 26 April 2019 diff hist +34 N File:HP 34401A multimeter.png current
- 13:23, 26 April 2019 diff hist +31 N File:Keithley 2400 SMU.png current