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- 16:50, 23 February 2018 diff hist -110 Template:Announcements jeol sem up
- 15:06, 21 February 2018 diff hist -7 m Stepper 3 (ASML DUV) →About: minor tweak Tag: Visual edit
- 15:05, 21 February 2018 diff hist +10 m Stepper 3 (ASML DUV) →Operating Procedures: updat elink text Tag: Visual edit
- 15:05, 21 February 2018 diff hist -146 Stepper 3 (ASML DUV) →About: removed field sizes text, pointed to mask making page Tag: Visual edit
- 15:03, 21 February 2018 diff hist -5 Stepper 3 (ASML DUV) →Operating Procedures: linked to Wiki version of Mask making Guidelines Tag: Visual edit
- 14:58, 21 February 2018 diff hist +37 N File:ASML Stepper 3 - Field Sizes - Screen Shot 2018-02-21 at 1.40.22 PM.png current
- 14:27, 21 February 2018 diff hist +510 Stepper 3 (ASML DUV) →About: updated capabilities, moved mask sizes to separate paragraph. Tag: Visual edit
- 08:41, 21 February 2018 diff hist -50 m Template:Announcements sigfix
- 08:40, 21 February 2018 diff hist +673 Template:Announcements stepper 1 + 2 maintenance scheduled
- 08:37, 21 February 2018 diff hist -98 Template:Announcements removed ICP#1
- 00:08, 21 February 2018 diff hist -31 Template:News →Metal Processes on the Atomic Layer Deposition
- 00:07, 21 February 2018 diff hist +83 m Template:News →Metal Processes on the Atomic Layer Deposition: timestamp
- 18:36, 20 February 2018 diff hist +63 Template:Announcements jeol update
- 22:44, 19 February 2018 diff hist +2 m Template:Announcements →Gasonics: Up: grammar
- 08:08, 17 February 2018 diff hist 0 m Template:Announcements →JEOL SEM #2: Up: typo
- 23:30, 16 February 2018 diff hist +49 Template:Announcements →JEOL SEM #2: Down: up temp.
- 02:34, 16 February 2018 diff hist -32 Template:Announcements →ICP#1: Down: up
- 11:19, 15 February 2018 diff hist +274 Lithography Recipes →Chemical Datasheets: explain Chemical Datasheets - lists chemicals availabel in lab Tag: Visual edit
- 14:42, 14 February 2018 diff hist +3 m Template:Announcements →ICP#1: Down: slasshes
- 14:42, 14 February 2018 diff hist -27 m Template:Announcements sig fix
- 14:41, 14 February 2018 diff hist 0 Template:Announcements icp1 dpwn, delete ASML
- 14:40, 14 February 2018 diff hist -27 m Template:Announcements →JEOL SEM #2: Down: sigfix
- 14:40, 14 February 2018 diff hist +16 Template:Announcements →JEOL SEM #2: Up: down
- 17:01, 13 February 2018 diff hist -25 m Template:Announcements sig fix
- 17:01, 13 February 2018 diff hist -228 Template:Announcements jeol sem up
- 17:52, 12 February 2018 diff hist +5 m Template:Announcements cary down title
- 17:52, 12 February 2018 diff hist -27 m Template:Announcements sig fix
- 17:51, 12 February 2018 diff hist +266 Template:Announcements sem2 update
- 14:48, 12 February 2018 diff hist -27 m Template:Announcements sig fixes
- 14:47, 12 February 2018 diff hist +27 Template:Announcements cary update
- 14:46, 12 February 2018 diff hist +155 Template:Announcements gasonics up, mech. pump notice
- 11:16, 12 February 2018 diff hist -5 m Template:Announcements remove spaces
- 11:15, 12 February 2018 diff hist -13 m Template:Announcements sig
- 11:14, 12 February 2018 diff hist +133 Template:Announcements gasnoics down
- 19:53, 10 February 2018 diff hist -24 m Template:Announcements sig
- 19:52, 10 February 2018 diff hist +185 Template:Announcements asml pm done
- 14:34, 9 February 2018 diff hist +110 m Template:News laser mon: links to tools
- 12:56, 9 February 2018 diff hist +8 Template:News sig fixes to "posted"
- 12:54, 9 February 2018 diff hist -2 m Template:News typo
- 12:53, 9 February 2018 diff hist -3 Template:News sig fix
- 12:53, 9 February 2018 diff hist +405 Template:News laser monitors
- 16:52, 8 February 2018 diff hist +6 m Template:Announcements minor format
- 16:40, 8 February 2018 diff hist -27 Template:Announcements sig fix
- 16:40, 8 February 2018 diff hist +154 Template:Announcements jeol gate issue
- 22:16, 6 February 2018 diff hist +369 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added height conversion for Sputt3 Tag: Visual edit
- 22:11, 6 February 2018 diff hist 0 N File:Sputter 3 - height conversion v1.PNG current
- 22:09, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize sputt4 table Tag: Visual edit
- 22:07, 6 February 2018 diff hist +95 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added Al2O3 sputt3 Tag: Visual edit
- 22:00, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): alphabetize table sputt3 Tag: Visual edit
- 19:02, 6 February 2018 diff hist +99 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): link to AJA4 Al2O3 page Tag: Visual edit
- 19:01, 6 February 2018 diff hist +40 m ICP Etching Recipes →Al2O3 Etching (Panasonic 2): ack brian markman Tag: Visual edit
- 19:00, 6 February 2018 diff hist +296 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): Al2O3 etch data Tag: Visual edit: Switched
- 18:56, 6 February 2018 diff hist 0 N File:Brian Markman - Al2O3 ICP2 Etch Rates 2018.pdf current
- 18:46, 6 February 2018 diff hist +72 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): unfinished Al2O3 etching on ICP2 Tag: Visual edit
- 18:44, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize TiN Tag: Visual edit
- 18:43, 6 February 2018 diff hist 0 Sputtering Recipes →Al2O3 Deposition (Sputter 4): alphabetize Tag: Visual edit
- 18:40, 6 February 2018 diff hist +57 Vacuum Deposition Recipes added "R" for Sput4 Al & Al2O3 Tag: Visual edit: Switched
- 18:35, 6 February 2018 diff hist +253 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 Dep sputter 4 + cauchy params Tag: Visual edit
- 18:30, 6 February 2018 diff hist +102 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 addition to table Tag: Visual edit
- 18:18, 6 February 2018 diff hist +84 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Al2O3 (AJA#4) in 300 MiF Tag: Visual edit
- 12:42, 30 January 2018 diff hist +745 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added HF etch rates for PECVD SiO2, and IBD Al2O3 HF/700-MIF rates Tag: Visual edit
- 08:14, 26 January 2018 diff hist -4 Demis D. John update email addr.
- 18:56, 24 January 2018 diff hist +18 Film Stress (Tencor Flexus) Added model
- 16:27, 24 January 2018 diff hist +734 Frequently Asked Questions Added Nanofiles info. Tag: Visual edit
- 16:20, 24 January 2018 diff hist +125 Calculators + Utilities →General Calculators: link to pyvisa Tag: Visual edit
- 16:18, 24 January 2018 diff hist -16 m Calculators + Utilities →General Calculators: minor italics remove Tag: Visual edit
- 16:16, 24 January 2018 diff hist +1 Tube Furnace (Tystar 8300) fix 'model' typo
- 16:14, 24 January 2018 diff hist +177 Template:Tool added Mike Day & Demis to the staff info template as options. Removed duplicate "model" variable
- 16:06, 24 January 2018 diff hist +89 Template:Tool added Model field
- 16:03, 24 January 2018 diff hist +20 Tube Furnace (Tystar 8300) added model
- 16:01, 24 January 2018 diff hist -55 m Tube Furnace (Tystar 8300) →See Also: fix typo Tag: Visual edit
- 16:01, 24 January 2018 diff hist +307 Tube Furnace (Tystar 8300) →See Also: link to stanford TOX calc Tag: Visual edit
- 15:58, 24 January 2018 diff hist +588 Tube Furnace (Tystar 8300) →Process Information: recipe descriptions, added AlGaAs.001 Tag: Visual edit
- 15:39, 24 January 2018 diff hist +4 m Calculators + Utilities minor italics Tag: Visual edit
- 15:39, 24 January 2018 diff hist +212 Calculators + Utilities →Fabrication Processes & Converters: added Stanford thermal ox calc Tag: Visual edit
- 14:39, 20 January 2018 diff hist +33 m Microscopes →Nikon: make measurements Tag: Visual edit
- 14:38, 20 January 2018 diff hist +101 m Tool List placeholder link for microscope mounted Filmetrics Tag: Visual edit
- 14:36, 20 January 2018 diff hist +24 Optical Film Thickness (Filmetrics) added model
- 08:32, 18 January 2018 diff hist -37 m Wet Etching Recipes update links to master table Tag: Visual edit
- 08:30, 18 January 2018 diff hist +25 m Wet Etching Recipes →Compound Semiconductor Etching: update HLink
- 08:29, 18 January 2018 diff hist +651 Wet Etching Recipes added references section Tag: Visual edit
- 08:44, 17 January 2018 diff hist +210 Atomic Layer Deposition Recipes added "contact bill mitchell" and Added Ru Tag: Visual edit
- 14:36, 16 January 2018 diff hist +22 Optical Film Thickness (Filmetrics) updated tool location & description in template Tag: Visual edit
- 09:49, 12 January 2018 diff hist +177 Chemical List - OLD 2018-09-05 added "1020" to chromium mask etchant to clarify which one we have Tag: Visual edit
- 17:10, 11 January 2018 diff hist +63 Tom Reynolds →Current Work: contact to get lab access Tag: Visual edit
- 13:22, 10 January 2018 diff hist -23 m Template:News fix comment tag
- 13:21, 10 January 2018 diff hist 0 Template:News fix feed tags
- 13:19, 10 January 2018 diff hist +29 m Template:News disabled feedburner link
- 13:19, 8 January 2018 diff hist -1 m Dry Etching Recipes fixed RIE5 GaN link Tag: Visual edit: Switched
- 13:17, 8 January 2018 diff hist +1 Dry Etching Recipes fixed RIE5 links Tag: Visual edit
- 13:15, 8 January 2018 diff hist +19 m Template:Rl/doc arguments heading current
- 13:14, 8 January 2018 diff hist +795 Template:Rl/doc added example, verbose description
- 13:01, 8 January 2018 diff hist +81 Dry Etching Recipes Added "hptotoresist & ARC" row, with A recipes Tag: Visual edit: Switched
- 10:42, 8 January 2018 diff hist +27 Dry Etching Recipes added space to ICP1/2 recipe links, hopefully fixes targeted links Tag: Visual edit
- 11:02, 4 January 2018 diff hist +1 m Template:Announcements typo
- 11:01, 4 January 2018 diff hist +64 Template:Announcements add description
- 11:00, 4 January 2018 diff hist +5 Template:Announcements disable feedburner
- 10:59, 4 January 2018 diff hist -26 m Template:Announcements sig
- 10:58, 4 January 2018 diff hist -166 Template:Announcements no announcments
- 12:51, 28 December 2017 diff hist 0 m MediaWiki:Sidebar minor templates link format