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- 22:09, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize sputt4 table Tag: Visual edit
- 22:07, 6 February 2018 diff hist +95 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): added Al2O3 sputt3 Tag: Visual edit
- 22:00, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 3 (AJA ATC 2000-F): alphabetize table sputt3 Tag: Visual edit
- 19:02, 6 February 2018 diff hist +99 m Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): link to AJA4 Al2O3 page Tag: Visual edit
- 19:01, 6 February 2018 diff hist +40 m ICP Etching Recipes →Al2O3 Etching (Panasonic 2): ack brian markman Tag: Visual edit
- 19:00, 6 February 2018 diff hist +296 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): Al2O3 etch data Tag: Visual edit: Switched
- 18:56, 6 February 2018 diff hist 0 N File:Brian Markman - Al2O3 ICP2 Etch Rates 2018.pdf current
- 18:46, 6 February 2018 diff hist +72 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): unfinished Al2O3 etching on ICP2 Tag: Visual edit
- 18:44, 6 February 2018 diff hist 0 m Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): alphabetize TiN Tag: Visual edit
- 18:43, 6 February 2018 diff hist 0 Sputtering Recipes →Al2O3 Deposition (Sputter 4): alphabetize Tag: Visual edit
- 18:40, 6 February 2018 diff hist +57 Vacuum Deposition Recipes added "R" for Sput4 Al & Al2O3 Tag: Visual edit: Switched
- 18:35, 6 February 2018 diff hist +253 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 Dep sputter 4 + cauchy params Tag: Visual edit
- 18:30, 6 February 2018 diff hist +102 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): Al2O3 addition to table Tag: Visual edit
- 18:18, 6 February 2018 diff hist +84 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): Al2O3 (AJA#4) in 300 MiF Tag: Visual edit
- 12:42, 30 January 2018 diff hist +745 Wet Etching Recipes →The Master Table of Wet Etching (Include All Materials): added HF etch rates for PECVD SiO2, and IBD Al2O3 HF/700-MIF rates Tag: Visual edit
- 08:14, 26 January 2018 diff hist -4 Demis D. John update email addr.
- 18:56, 24 January 2018 diff hist +18 Film Stress (Tencor Flexus) Added model
- 16:27, 24 January 2018 diff hist +734 Frequently Asked Questions Added Nanofiles info. Tag: Visual edit
- 16:20, 24 January 2018 diff hist +125 Calculators + Utilities →General Calculators: link to pyvisa Tag: Visual edit
- 16:18, 24 January 2018 diff hist -16 m Calculators + Utilities →General Calculators: minor italics remove Tag: Visual edit
- 16:16, 24 January 2018 diff hist +1 Tube Furnace (Tystar 8300) fix 'model' typo
- 16:14, 24 January 2018 diff hist +177 Template:Tool added Mike Day & Demis to the staff info template as options. Removed duplicate "model" variable
- 16:06, 24 January 2018 diff hist +89 Template:Tool added Model field
- 16:03, 24 January 2018 diff hist +20 Tube Furnace (Tystar 8300) added model
- 16:01, 24 January 2018 diff hist -55 m Tube Furnace (Tystar 8300) →See Also: fix typo Tag: Visual edit
- 16:01, 24 January 2018 diff hist +307 Tube Furnace (Tystar 8300) →See Also: link to stanford TOX calc Tag: Visual edit
- 15:58, 24 January 2018 diff hist +588 Tube Furnace (Tystar 8300) →Process Information: recipe descriptions, added AlGaAs.001 Tag: Visual edit
- 15:39, 24 January 2018 diff hist +4 m Calculators + Utilities minor italics Tag: Visual edit
- 15:39, 24 January 2018 diff hist +212 Calculators + Utilities →Fabrication Processes & Converters: added Stanford thermal ox calc Tag: Visual edit
- 14:39, 20 January 2018 diff hist +33 m Microscopes →Nikon: make measurements Tag: Visual edit
- 14:38, 20 January 2018 diff hist +101 m Tool List placeholder link for microscope mounted Filmetrics Tag: Visual edit
- 14:36, 20 January 2018 diff hist +24 Optical Film Thickness (Filmetrics) added model
- 08:32, 18 January 2018 diff hist -37 m Wet Etching Recipes update links to master table Tag: Visual edit
- 08:30, 18 January 2018 diff hist +25 m Wet Etching Recipes →Compound Semiconductor Etching: update HLink
- 08:29, 18 January 2018 diff hist +651 Wet Etching Recipes added references section Tag: Visual edit
- 08:44, 17 January 2018 diff hist +210 Atomic Layer Deposition Recipes added "contact bill mitchell" and Added Ru Tag: Visual edit
- 14:36, 16 January 2018 diff hist +22 Optical Film Thickness (Filmetrics) updated tool location & description in template Tag: Visual edit
- 09:49, 12 January 2018 diff hist +177 Chemical List - OLD 2018-09-05 added "1020" to chromium mask etchant to clarify which one we have Tag: Visual edit
- 17:10, 11 January 2018 diff hist +63 Tom Reynolds →Current Work: contact to get lab access Tag: Visual edit
- 13:22, 10 January 2018 diff hist -23 m Template:News fix comment tag
- 13:21, 10 January 2018 diff hist 0 Template:News fix feed tags
- 13:19, 10 January 2018 diff hist +29 m Template:News disabled feedburner link
- 13:19, 8 January 2018 diff hist -1 m Dry Etching Recipes fixed RIE5 GaN link Tag: Visual edit: Switched
- 13:17, 8 January 2018 diff hist +1 Dry Etching Recipes fixed RIE5 links Tag: Visual edit
- 13:15, 8 January 2018 diff hist +19 m Template:Rl/doc arguments heading current
- 13:14, 8 January 2018 diff hist +795 Template:Rl/doc added example, verbose description
- 13:01, 8 January 2018 diff hist +81 Dry Etching Recipes Added "hptotoresist & ARC" row, with A recipes Tag: Visual edit: Switched
- 10:42, 8 January 2018 diff hist +27 Dry Etching Recipes added space to ICP1/2 recipe links, hopefully fixes targeted links Tag: Visual edit
- 11:02, 4 January 2018 diff hist +1 m Template:Announcements typo
- 11:01, 4 January 2018 diff hist +64 Template:Announcements add description