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- 22:45, 6 November 2017 diff hist 0 m MediaWiki:Sidebar calc testing
- 22:44, 6 November 2017 diff hist -1 m MediaWiki:Sidebar calc tests
- 22:43, 6 November 2017 diff hist +11 m MediaWiki:Sidebar fixed calc link
- 22:43, 6 November 2017 diff hist 0 m MediaWiki:Sidebar moved calculators into recipes/data
- 22:41, 6 November 2017 diff hist +24 MediaWiki:Sidebar Added Calculators section
- 22:37, 6 November 2017 diff hist -24 m Sputtering Recipes unbolded titles Tag: Visual edit
- 08:11, 2 November 2017 diff hist +191 Sputtering Recipes →Sputter 5 (Lesker AXXIS): Noted that this tool has been replaced by an AJA sputter Tag: Visual edit
- 14:41, 31 October 2017 diff hist 0 Vacuum Deposition Recipes fixed C bgcolor color
- 14:39, 31 October 2017 diff hist +6 m Sputter 3 (AJA ATC 2000-F) →Detailed Specifications: reworded Tag: Visual edit
- 14:37, 31 October 2017 diff hist +8 m Sputter 4 (AJA ATC 2200-V) →Detailed Specifications: reworded Tag: Visual edit
- 14:36, 31 October 2017 diff hist +6 m Sputter 4 (AJA ATC 2200-V) bolded signupmonkey link Tag: Visual edit
- 14:36, 31 October 2017 diff hist +153 Sputter 4 (AJA ATC 2200-V) added singupmonkey link for currently installed targets Tag: Visual edit
- 14:34, 31 October 2017 diff hist +161 Sputter 3 (AJA ATC 2000-F) Added link to signupmnkey page for currently installed targets Tag: Visual edit
- 17:31, 12 October 2017 diff hist +1 m Thermal Evaporator 1 added missing { current
- 21:23, 8 October 2017 diff hist +13 m PECVD Recipes →OTHER recipes: LS SiN and SiOxNy deposition (PECVD #1): added "low stress' text Tag: Visual edit
- 22:06, 7 October 2017 diff hist +46 m PECVD Recipes →LS SiN deposition (PECVD #2): added text “low stress” for clarity and google searches Tag: Visual edit
- 00:55, 7 October 2017 diff hist +10 m ICP Etching Recipes →SiO2 Etching (Panasonic 2): referred "SiOVert" Tag: Visual edit
- 00:54, 7 October 2017 diff hist +40 m ICP Etching Recipes →SiO2 Etching (Panasonic 1): referred to "SiOVert", the colloquial name for this "std." provided recipe. Tag: Visual edit: Switched
- 00:50, 7 October 2017 diff hist +1 m ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): >>1µm Tag: Visual edit
- 00:49, 7 October 2017 diff hist +15 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) minor
- 00:46, 7 October 2017 diff hist +28 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: link to ICP Etching / recipes section Tag: Visual edit: Switched
- 00:39, 7 October 2017 diff hist +357 ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): added basic info about bosch process, including new IBD Al2O3 etch selectivity info. Tag: Visual edit
- 22:26, 3 October 2017 diff hist -2 m Template:Nav processes --> recipes
- 14:18, 22 September 2017 diff hist +3 m Dry Etching Recipes Added "A" for GaSb, InP Tag: Visual edit
- 14:16, 22 September 2017 diff hist 0 m Dry Etching Recipes moves Si into proper alphabetical row Tag: Visual edit
- 14:14, 22 September 2017 diff hist +71 Dry Etching Recipes Added Ta2O5 etching, described in paper by Blumenthal Group. Tag: Visual edit
- 14:05, 22 September 2017 diff hist +26 m Dry Etching Recipes removed spurious column |- text, alphabetizing.
- 13:59, 22 September 2017 diff hist 0 m Dry Etching Recipes alphabetized mostly Tag: Visual edit
- 13:52, 22 September 2017 diff hist -2 m Dry Etching Recipes partially alphabetized and removed one spurious row Tag: Visual edit: Switched
- 13:44, 22 September 2017 diff hist -12 m E-Beam Evaporation Recipes →ITO deposition (E-Beam 2): removed bold titles Tag: Visual edit
- 13:44, 22 September 2017 diff hist +22 m E-Beam Evaporation Recipes →Materials Table (E-Beam #1): updated Carbon rates Tag: Visual edit
- 13:42, 22 September 2017 diff hist +57 m E-Beam 1 (Sharon) included "electron beam" & "deposition parameters" to boost in google search Tag: Visual edit
- 16:45, 19 September 2017 diff hist +116 ICP Etching Recipes →SiO2 Etching (Panasonic 2): linked to ICP#1 params Tag: Visual edit: Switched
- 16:42, 19 September 2017 diff hist +127 m ICP Etching Recipes →SiO2 Etching (Panasonic 1): added etch rate, unknown selectivity Tag: Visual edit
- 15:25, 19 September 2017 diff hist +6 E-Beam Evaporation Recipes →Materials Table (E-Beam #1): (minor) Carbon, bolded formatting Tag: Visual edit
- 15:24, 19 September 2017 diff hist +8 m E-Beam Evaporation Recipes added "carbon" for search engines Tag: Visual edit
- 08:48, 19 September 2017 diff hist 0 Vacuum Deposition Recipes fix row color?
- 08:46, 19 September 2017 diff hist +657 Vacuum Deposition Recipes fixed table row color
- 08:42, 19 September 2017 diff hist +517 Vacuum Deposition Recipes Added Carbon on EBeam #1 Tag: Visual edit: Switched
- 19:58, 8 September 2017 diff hist +14 m High Temp Oven (Blue M) removed "8 steps" Tag: Visual edit: Switched
- 19:57, 8 September 2017 diff hist +276 High Temp Oven (Blue M) added description of processes etc. Tag: Visual edit: Switched
- 19:54, 8 September 2017 diff hist +130 Tool List →Thermal Processing: added ovens from "lithography" section
- 17:13, 7 September 2017 diff hist 0 m Spin Rinse Dryer (SemiTool) tool template @ top
- 17:13, 7 September 2017 diff hist +295 Spin Rinse Dryer (SemiTool) added description + capabilities, Tag: Visual edit: Switched
- 10:14, 5 September 2017 diff hist +2 Lithography Recipes →E-Beam Lithography Recipes: testing visual editor Tag: Visual edit: Switched
- 09:37, 5 September 2017 diff hist +159 E-Beam Evaporation Recipes added Carbon, bolded "use with permission only" on oxides. Tag: Visual edit: Switched
- 13:05, 1 September 2017 diff hist +32 Lithography Recipes →General Information: linked to PR/EBL datasheet sec
- 13:03, 1 September 2017 diff hist +11 m Lithography Recipes →General Information: nanoimprinting recipes section title correctly
- 13:02, 1 September 2017 diff hist +6 Lithography Recipes →General Information: bolded "holography"
- 13:00, 1 September 2017 diff hist +573 Lithography Recipes →General Information: link to PhotoLitho recipes + equipment
- 12:56, 1 September 2017 diff hist +8 Lithography Recipes →Low-K Dielectric Recipes: added "Sppin-On" to title
- 12:55, 1 September 2017 diff hist +7 Lithography Recipes →Low-K Dielectric: added Recipes
- 12:55, 1 September 2017 diff hist +7 Lithography Recipes →Nanoimprinting: added recipes
- 12:54, 1 September 2017 diff hist +23 Lithography Recipes →Chemical Datasheets: BCB+SOG --> "Spin-On Dielectrics"
- 09:59, 1 September 2017 diff hist -1 m Lithography Recipes →Chemical Datasheets: extra ]
- 09:58, 1 September 2017 diff hist +3 m Lithography Recipes →Chemical Datasheets: formatting
- 09:58, 1 September 2017 diff hist +92 Lithography Recipes →Chemical Datasheets: 1165 --> Az NMP + link to Microchem page for NMP
- 09:48, 1 September 2017 diff hist 0 m Lithography Recipes →General Information: spelling
- 09:47, 1 September 2017 diff hist +29 m Lithography Recipes →Chemical Datasheets: comment on BCB/SOG for clarity/matching with earlier link text
- 09:45, 1 September 2017 diff hist +17 Lithography Recipes →General Information: BCB/SOG anchor link
- 09:45, 1 September 2017 diff hist +162 Lithography Recipes →General Information: added links to anchors
- 09:39, 1 September 2017 diff hist +340 Lithography Recipes →Chemical Datasheets: Added Anchors for every section
- 09:34, 1 September 2017 diff hist 0 m Lithography Recipes →General Information
- 09:33, 1 September 2017 diff hist +11 m Lithography Recipes →General Information: link to PosPR anchor
- 09:29, 1 September 2017 diff hist +22 Lithography Recipes →Chemical Datasheets: anchor to PosPR
- 12:13, 31 August 2017 diff hist +2 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
- 12:12, 31 August 2017 diff hist 0 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation: reorder
- 11:10, 31 August 2017 diff hist -89 Template:StaffInfo removed table
- 11:08, 31 August 2017 diff hist -7 Template:Tool bugfix - extra {{#ifeq {{{super}}}
- 11:02, 31 August 2017 diff hist +89 Template:StaffInfo wrapped in full table
- 10:18, 31 August 2017 diff hist -14 Template:Tool debugging #ifeq showing on page
- 09:56, 31 August 2017 diff hist +97 Template:Tool added <noinclude> mentioning that this template defines supervisor phone numbers/contact info. Also debugging "{{#ifeq" showing up on page.
- 17:02, 24 August 2017 diff hist +7 Lithography Recipes →Chemical Datasheets: New version of UVN-30/renamed from UVN2300
- 17:01, 24 August 2017 diff hist +23 N File:UVN-30 - Negative-Resist-Datasheet - Apr 2004.pdf UVN-30 Datasheet - 2004 current
- 20:30, 15 August 2017 diff hist +1 Stepper Recipes moved 6300-->AutoStep 200 multiplier into GCA 6300 section
- 20:29, 15 August 2017 diff hist +58 Stepper Recipes broke up intro paragraph
- 20:24, 15 August 2017 diff hist +18 Stepper Recipes →Positive Resist (ASML DUV): aka UV6-0.8 (actually written on bottle)
- 20:22, 15 August 2017 diff hist +12 m Stepper Recipes →Anti-Reflective Coatings: formatting
- 20:20, 15 August 2017 diff hist +14 m Stepper Recipes →Anti-Reflective Coatings: aka. for ARC, to aid in searchability
- 20:19, 15 August 2017 diff hist -476 Stepper Recipes →Stepper 3 (ASML DUV): combined ARC section into one section, referenced from pos/neg sections
- 19:52, 15 August 2017 diff hist +83 Stepper Recipes →Positive Resist (ASML DUV): turned ARC into bulleted lists
- 16:16, 15 August 2017 diff hist +26 Stepper Recipes →Positive Resist (ASML DUV): replaced AR2 with DUV-42P
- 23:07, 10 August 2017 diff hist 0 m Demis D. John spelling error
- 14:56, 3 August 2017 diff hist -2 m Template:Recipe current
- 14:56, 3 August 2017 diff hist +1 m Template:Recipe
- 14:54, 3 August 2017 diff hist -2 Template:Recipe format noinclude text
- 14:54, 3 August 2017 diff hist +6 Template:Recipe format noinclide text
- 14:53, 3 August 2017 diff hist +361 Template:Recipe comment help
- 14:43, 3 August 2017 diff hist +86 Template:Recipe added headings, Charact section
- 14:39, 3 August 2017 diff hist +434 N Template:Recipe 1st attempt, using definition list
- 14:08, 3 August 2017 diff hist -145 Editing Tutorials 2017 updates
- 14:00, 3 August 2017 diff hist +81 Frequently Asked Questions linked to Editing_Tutorials
- 11:30, 3 August 2017 diff hist +6 MediaWiki:Sidebar
- 11:29, 3 August 2017 diff hist +7 MediaWiki:Sidebar HR between editing tools
- 11:27, 3 August 2017 diff hist +2 MediaWiki:Sidebar
- 11:27, 3 August 2017 diff hist +16 MediaWiki:Sidebar
- 11:27, 3 August 2017 diff hist -21 MediaWiki:Sidebar
- 11:26, 3 August 2017 diff hist +135 MediaWiki:Sidebar
- 11:25, 3 August 2017 diff hist -135 MediaWiki:Sidebar deleted toolbox etc.
- 09:09, 3 August 2017 diff hist +9 MediaWiki:Sidebar commented out toolbox for now - will reimplement for logged-in users only later