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- 10:30, 3 October 2022 diff hist +210 Wet Benches →About: note about HF apron PPE Tag: Visual edit
- 22:52, 1 October 2022 diff hist +76 Tool List →Wet Processing: link to Wafer_Toxic_Corrosive_Bench Tag: Visual edit
- 22:51, 1 October 2022 diff hist +210 Wet Benches →Detailed Specifications: linked KOH bath to SUM Tag: Visual edit
- 16:54, 29 September 2022 diff hist +22 m Dry Etching Recipes fix incorrect color header cell
- 16:47, 29 September 2022 diff hist +74 m Unaxis VLR Etch - Process Control Data bold + colored header row Tag: Visual edit: Switched
- 16:33, 29 September 2022 diff hist +113 ICP Etching Recipes →ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit
- 16:31, 29 September 2022 diff hist +186 ICP-Etch (Unaxis VLR) link to recipes, reduce headers to "heading level 1" (were "title" level) current Tag: Visual edit
- 15:44, 29 September 2022 diff hist -145 Template:Announcements ASML network update
- 15:43, 29 September 2022 diff hist -26 Template:Announcements GCA stepper 1 PM done
- 14:28, 29 September 2022 diff hist +245 Filmetrics F40-UV Microscope-Mounted →Good Curve-Fitting: explained reasonable vs. perfect curve fit current Tag: Visual edit
- 08:28, 28 September 2022 diff hist -155 Template:Announcements delete stepper 2 up
- 08:28, 28 September 2022 diff hist -48 Template:Announcements →GCA AutoStep Service: PM complete
- 10:54, 26 September 2022 diff hist -42 Template:Announcements AutoStep up.
- 07:34, 22 September 2022 diff hist +197 Template:Announcements corrected EB3 --> EB2, AUtostep down RMS
- 15:40, 21 September 2022 diff hist +122 Template:Announcements EB2 heater down
- 14:27, 21 September 2022 diff hist -8 Template:Announcements SEM#1 UP
- 08:33, 19 September 2022 diff hist +87 Template:Announcements GCA 6300 PM update
- 08:30, 19 September 2022 diff hist -11 Template:Announcements gca autostep 200 PM update
- 01:53, 17 September 2022 diff hist +77 Template:Announcements asml network update
- 15:50, 16 September 2022 diff hist +85 Sputter 5 (AJA ATC 2200-V) Added detailed specs section & ion mill current Tag: Visual edit
- 09:49, 14 September 2022 diff hist -6 m Template:Announcements
- 13:00, 13 September 2022 diff hist +192 Template:Announcements SEM1 down
- 12:52, 13 September 2022 diff hist +41 Ellipsometer (Woollam) updated wafer size Tag: Visual edit
- 10:04, 13 September 2022 diff hist +86 Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX) →Equipment Specifications: addded spot size and glass slides for small samples current Tag: Visual edit
- 10:03, 13 September 2022 diff hist +73 Optical Film Thickness & Wafer-Mapping (Filmetrics F50) Added meas spot size current Tag: Visual edit
- 10:02, 13 September 2022 diff hist +111 Filmetrics F40-UV Microscope-Mounted →Capabilities: added spot size and film thickness limits Tag: Visual edit
- 09:59, 13 September 2022 diff hist +46 Ellipsometer (Woollam) →Specifications: added sample size Tag: Visual edit
- 07:50, 13 September 2022 diff hist -148 Template:Announcements
- 07:50, 13 September 2022 diff hist -49 Template:Announcements aja 4 update
- 09:28, 12 September 2022 diff hist +156 Template:Announcements Sputter 4 down
- 11:05, 9 September 2022 diff hist +26 ICP Etching Recipes →Al2O3 Etching (Panasonic 2): convert to nm/min ER Tag: Visual edit
- 09:58, 9 September 2022 diff hist -683 CC-PRIME OnBoarding 2022-08 linked to QSF video/PDF, removed UCSBNetID requireemnts current Tag: Visual edit
- 09:58, 9 September 2022 diff hist +63 N File:QSF-SOP-020 Policy Guidelines and CHP Rev 2.022.pdf CC-PRIME Onboarding - safety training doc for QSF current
- 19:32, 7 September 2022 diff hist +123 KLayout Design Tips →File Types: Mentioned that MLA150 requires GDS Tag: Visual edit
- 19:30, 7 September 2022 diff hist +370 KLayout Design Tips →File Types: clarify OASIS GDS compatibility Tag: Visual edit
- 18:58, 7 September 2022 diff hist +215 KLayout Design Tips →How to draw circles: better method to convert all Cells to Static Cells Tag: Visual edit
- 18:55, 7 September 2022 diff hist +35 KLayout Design Tips added author credit Tag: Visual edit
- 10:03, 7 September 2022 diff hist -5 m Michael Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +4 m User:Barreraz current Tag: Visual edit
- 10:02, 7 September 2022 diff hist +32 N User:Barreraz linked to staff page Tag: Visual edit
- 08:37, 3 September 2022 diff hist -14 Microscopes →Microscope #1: Olympus BHMJL (removed temporarily): changed to Room 1111 Tag: Visual edit
- 08:35, 3 September 2022 diff hist +1,199 KLayout Design Tips link to QNFCF Youtube videos on Cells Tag: Visual edit
- 06:58, 2 September 2022 diff hist +289 Atomic Layer Deposition Recipes →Oxford FlexAL Chamber #1: Metals: added SiO2 recipes Tag: Visual edit
- 10:15, 1 September 2022 diff hist +250 Template:Announcements added GCA Autostep service (Millerski)
- 10:07, 1 September 2022 diff hist -9 Frequently Asked Questions →Who do I contact for an equipment problem or general NanoFab problem?: updated that it texts the supervisor Tag: Visual edit
- 15:01, 31 August 2022 diff hist 0 m Template:Announcements →Chlorine gasses available
- 14:58, 31 August 2022 diff hist +153 m Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer added to gently DI rinse current Tag: Visual edit
- 10:57, 31 August 2022 diff hist -486 Template:Announcements Cl2 repair
- 14:36, 30 August 2022 diff hist 0 m Template:Announcements →All Chlorine gasses disabled
- 14:35, 30 August 2022 diff hist +66 Template:Announcements Cl2 update
- 08:43, 30 August 2022 diff hist -51 Laser Scanning Confocal M-scope (Olympus LEXT) Corrected name spelling, deleted email/phone
- 15:05, 28 August 2022 diff hist +120 Template:Announcements Updated that tools are up but gas is down
- 12:47, 28 August 2022 diff hist +445 Template:Announcements Cl2 down
- 13:04, 26 August 2022 diff hist +136 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide →During live imaging Tag: Visual edit
- 12:59, 26 August 2022 diff hist +24 m UCSB NanoFab Microscope Training →Measurements Tag: Visual edit
- 12:58, 26 August 2022 diff hist +32 m Measurements and Imaging with Amscope Camera - Quickstart Usage Guide author credit Tag: Visual edit
- 12:57, 26 August 2022 diff hist +905 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide section+screenshots for starting imaging, end session section Tag: Visual edit
- 12:54, 26 August 2022 diff hist +69 N File:Amscope 02 annot camera link.png current
- 12:50, 26 August 2022 diff hist +93 N File:Microscope 4 Nikon - camera shutter - IMG 6249 - right side knobs - camera shutter - 800px.png current
- 12:43, 26 August 2022 diff hist +31 N File:AmScope 01 AmScope Icon.png current
- 12:39, 26 August 2022 diff hist +131 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide →Choosing the Calibration Tag: Visual edit
- 12:37, 26 August 2022 diff hist +672 Measurements and Imaging with Amscope Camera - Quickstart Usage Guide added screenshots Tag: Visual edit
- 12:34, 26 August 2022 diff hist +67 N File:AmScope - Layers Merge - annot.png current
- 12:30, 26 August 2022 diff hist +69 N File:AmScope - 06 chose mic2-150x annot.png current
- 12:27, 26 August 2022 diff hist +64 N File:AmScope - 02 annot.png current
- 12:23, 26 August 2022 diff hist +1,273 UCSB NanoFab Microscope Training measurements section, mostly copy/pasted from parent page Tag: Visual edit
- 12:17, 26 August 2022 diff hist -1 m Microscopes →Microscope Training Guide Tag: Visual edit
- 00:53, 26 August 2022 diff hist +1 Oxford ICP Etcher - Process Control Data added NH4OH dilution Tag: Visual edit
- 00:46, 26 August 2022 diff hist +44 Oxford ICP Etcher - Process Control Data cahnged headings and added TOC Tag: Visual edit
- 00:45, 26 August 2022 diff hist +8 Oxford ICP Etcher - Process Control Data forced TOC
- 09:55, 25 August 2022 diff hist +870 N Equipment Group - Video Training Procedures pasted video training from parent page current Tag: Visual edit
- 09:55, 25 August 2022 diff hist -754 Nanofab Staff Internal Pages moving Video Trianing to separate Equip Group pages Tag: Visual edit
- 16:35, 24 August 2022 diff hist +41 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added software login Tag: Visual edit
- 16:34, 24 August 2022 diff hist +273 ASML 5500: Recovering from an Error addl info on unload wafers + reticles Tag: Visual edit
- 16:30, 24 August 2022 diff hist +12 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration Tag: Visual edit
- 16:28, 24 August 2022 diff hist -13 ASML Stepper 3: Wafer Handler Reset Procedure current Tag: Visual edit
- 16:27, 24 August 2022 diff hist +103 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration link to Log window full proc. Tag: Visual edit
- 16:26, 24 August 2022 diff hist +55 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration →Important Warnings: minor updates Tag: Visual edit
- 16:26, 24 August 2022 diff hist +293 ASML Stepper 3 Standard Operating Procedure added to check Warnings window before starting Tag: Visual edit
- 16:21, 24 August 2022 diff hist +1,842 N ASML Stepper 3: Wafer Handler Reset Procedure pasted from gDocs Tag: Visual edit
- 16:18, 24 August 2022 diff hist +16 Stepper 3 (ASML DUV) →Operating Procedures Tag: Visual edit
- 16:17, 24 August 2022 diff hist -874 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration wafer handler reset - link to new page Tag: Visual edit
- 16:13, 24 August 2022 diff hist -626 ASML Stepper 3 Standard Operating Procedure pasted from Word Doc rev. 2022-08-23 DJ Tag: Visual edit
- 11:25, 23 August 2022 diff hist +11 Oven 4 (Thermo-Fisher HeraTherm) added toolid for SUM
- 08:44, 20 August 2022 diff hist +22 Dan Read current Tag: Visual edit
- 08:22, 20 August 2022 diff hist +6 Staff List →Facilities Group: bolded all managers/leads for each group Tag: Visual edit
- 09:36, 18 August 2022 diff hist +377 Template:Publications added Blumenthal: 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides current
- 23:28, 14 August 2022 diff hist +4 E-Beam Lithography System (JEOL JBX-6300FS) added "JBX-" to model # current
- 18:01, 10 August 2022 diff hist +257 Frequently Asked Questions →I can't connect to the Nanofiles FTP server!: winscp - multipel settings locations Tag: Visual edit
- 11:35, 6 August 2022 diff hist -5 m Sputter 3 (AJA ATC 2000-F) changed Documentation --> procedures to match the other tools Tag: Visual edit
- 11:34, 6 August 2022 diff hist +5 Sputter 5 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:34, 6 August 2022 diff hist +9 Sputter 4 (AJA ATC 2200-V) →Procedures: made training video section linkable Tag: Visual edit
- 11:33, 6 August 2022 diff hist +7 Sputter 3 (AJA ATC 2000-F) →Documentation: made training video section linkable Tag: Visual edit
- 14:02, 5 August 2022 diff hist +240 Nanofab Staff Internal Pages added Useful UCSB Pages > Faciltiies work requests Tag: Visual edit
- 12:33, 3 August 2022 diff hist +214 CC-PRIME OnBoarding 2022-08 →Location & Parking: added map and gMaps link Tag: Visual edit
- 12:24, 3 August 2022 diff hist +44 N File:CC-PRIME - Parking Lot 10 and CNSI - Annotated.png current
- 11:59, 3 August 2022 diff hist +8 Sputtering Recipes →Materials Table (Sputter 3): specified Tilt is in mm, since tool has both In & mm listed. Tag: Visual edit
- 11:58, 3 August 2022 diff hist -18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V) Tag: Visual edit
- 11:57, 3 August 2022 diff hist +54 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V): updated Au to 200W dep rate Tag: Visual edit
- 22:39, 2 August 2022 diff hist +7 DUMMY TOOL testing lenvik & Michael Barreraz