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- 22:56, 3 July 2018 diff hist +117 Tool List →Vacuum Deposition: categories Tag: Visual edit
- 22:51, 3 July 2018 diff hist +18 m Tool List →Inspection, Test and Characterization: styled table Tag: Visual edit
- 22:50, 3 July 2018 diff hist -112 m Template:Announcements deleted icp2
- 16:41, 3 July 2018 diff hist +34 m Wet Benches →General Information: how to label glassware Tag: Visual edit
- 16:39, 3 July 2018 diff hist 0 m Bill Mitchell code/typo Tag: Visual edit: Switched
- 16:38, 3 July 2018 diff hist +47 Bill Mitchell →Tools: link to ALD Tag: Visual edit
- 16:38, 3 July 2018 diff hist +4 m Atomic Layer Deposition (Oxford FlexAL) →ALD Recipes: link to bill mitchell Tag: Visual edit
- 16:37, 3 July 2018 diff hist +774 Atomic Layer Deposition (Oxford FlexAL) →About: explained dual-chamber setup, added 50nm restriction Tag: Visual edit
- 16:10, 3 July 2018 diff hist +178 m Calculators + Utilities →CAD Layout Programs: credits fo L-edit tutotiral Tag: Visual edit
- 15:58, 3 July 2018 diff hist +1,382 N Suss MA-6 Backside Alignment QuickStart Demis' backside alignmetn quick-start instructions Tag: Visual edit
- 15:48, 3 July 2018 diff hist +45 Contact Aligner (SUSS MA-6) →Documentation: Link to Backside ALignment quickstart Tag: Visual edit
- 15:47, 3 July 2018 diff hist -159 Contact Aligner (SUSS MA-6) →Documentation: combined 4 pages into one PDF Tag: Visual edit
- 15:38, 3 July 2018 diff hist +788 Calculators + Utilities →Scripts + Programs: added CAD/L-Edit/KLayout info Tag: Visual edit
- 14:59, 3 July 2018 diff hist +259 Tool List →Inspection, Test and Characterization: added categories Tag: Visual edit
- 14:27, 3 July 2018 diff hist +131 m Wet Benches →Detailed Specifications: split temps into separate benches Tag: Visual edit
- 14:25, 3 July 2018 diff hist +495 Tool List categories for lithography tools Tag: Visual edit
- 17:00, 26 June 2018 diff hist 0 m Thermal Evaporation Recipes moved In to bottom of table current
- 16:47, 26 June 2018 diff hist +106 ICP Etching Recipes →Ti Etch (Panasonic 1): link to elecrochem paper Tag: Visual edit
- 08:46, 26 June 2018 diff hist -111 Template:Announcements ICP2 up
- 16:23, 25 June 2018 diff hist 0 m Template:Announcements Update timestamp
- 16:20, 25 June 2018 diff hist +124 Template:Announcements ICP he
- 10:04, 25 June 2018 diff hist -137 Template:Announcements icp2 update
- 22:19, 23 June 2018 diff hist +236 Template:Announcements icp2 vac error
- 17:00, 22 June 2018 diff hist 0 m Frequently Asked Questions minor reorg Tag: Visual edit
- 16:56, 22 June 2018 diff hist +634 Lab Rules OLD 2018 →Wet Bench Housekeeping: added descriptions of how to dispose of soaked wipes, for solvent and corrosive. Tag: Visual edit
- 16:49, 22 June 2018 diff hist +195 Lab Rules OLD 2018 →Nanofab Wipes: Non-shedding by request only, s/Pec described particulates a bit. Tag: Visual edit
- 16:46, 22 June 2018 diff hist 0 m Frequently Asked Questions →Can I add equipment reservations to my phone/computer/online calendar?: puncutation Tag: Visual edit
- 16:44, 22 June 2018 diff hist +45 m Frequently Asked Questions →General NanoFab Questions: record issues in tool logbook Tag: Visual edit
- 15:29, 22 June 2018 diff hist 0 Thermal Evaporation Recipes fixed table syntax, which caused both tables to land Outside the expected section
- 15:23, 22 June 2018 diff hist +4 m Thermal Evaporation Recipes corrected materials table subheading --> level 2 (was level 1)
- 15:05, 20 June 2018 diff hist +417 Template:Announcements pecvd1 s/w upgrade
- 13:53, 20 June 2018 diff hist -1 m Sputtering Recipes →Al2O3 deposition (IBD): AlOx recipe name Tag: Visual edit
- 13:31, 20 June 2018 diff hist -361 m Template:Announcements delted old notes
- 18:14, 18 June 2018 diff hist +126 N TEST PAGE testing link to gDrive MSDS folder current Tag: Visual edit
- 17:24, 15 June 2018 diff hist -23 Template:Announcements AFM up
- 17:23, 15 June 2018 diff hist +135 Template:Announcements IBD Update
- 17:22, 15 June 2018 diff hist +197 Template:Announcements RIE5 SiCl4 issue 5min max
- 17:20, 15 June 2018 diff hist +13 Chemical List - OLD 2018-09-05 H2O2 "30%" added Tag: Visual edit
- 15:05, 15 June 2018 diff hist +226 Template:Announcements stepper 2 up
- 15:04, 15 June 2018 diff hist -367 m Template:Announcements PECVD2 deleted
- 16:18, 12 June 2018 diff hist +21 m Template:Announcements pecvd2 retraining required
- 16:17, 12 June 2018 diff hist -185 Template:Announcements rie5 SiCl4 UP, deleted "lab open"
- 16:14, 11 June 2018 diff hist -583 Template:Announcements lab reopened update, deleted DSE wafer removed
- 11:07, 8 June 2018 diff hist +266 Template:Announcements afm down
- 09:33, 8 June 2018 diff hist +9 Template:Announcements dse update, up
- 11:46, 7 June 2018 diff hist +12 Template:Announcements less startling title for lab closed
- 11:45, 7 June 2018 diff hist +489 Template:Announcements lab shutdown Monday june 11
- 09:30, 7 June 2018 diff hist +128 ICP Etch 1 (Panasonic E646V) →About: additional description of Ashing chamber utility Tag: Visual edit
- 09:28, 7 June 2018 diff hist +135 ICP Etch 1 (Panasonic E646V) →Detailed Specifications: added chuck temperatures Tag: Visual edit
- 09:25, 7 June 2018 diff hist +52 ICP Etch 2 (Panasonic E626I) →Detailed Specifications: default chuck temp shown Tag: Visual edit
- 17:18, 6 June 2018 diff hist +15 Template:Announcements bench 7 heated bath update
- 16:19, 5 June 2018 diff hist +18 m Editing Tutorials changed headers to "heading" style Tag: Visual edit
- 16:18, 5 June 2018 diff hist +69 m Editing Tutorials rearrange, minor edits Tag: Visual edit
- 14:37, 5 June 2018 diff hist -211 Template:Announcements deleted rie5 broken wafer
- 17:19, 4 June 2018 diff hist +185 m Calculators + Utilities →Wet Etching: minor description updates Tag: Visual edit
- 17:00, 4 June 2018 diff hist +40 Template:Announcements RIE#5 SiCl4 update
- 16:59, 4 June 2018 diff hist +212 Template:Announcements rie5 wafers in chamber
- 13:41, 4 June 2018 diff hist +4 m Stepper 3 (ASML DUV) →Process Information: italics on sub-bullet Tag: Visual edit
- 13:40, 4 June 2018 diff hist +127 Stepper 3 (ASML DUV) →About: copied info to "process info" Tag: Visual edit
- 12:23, 4 June 2018 diff hist +131 Stepper 3 (ASML DUV) approx maximum wafer bow Tag: Visual edit
- 10:49, 31 May 2018 diff hist +296 ICP Etch 1 (Panasonic E646V) updates, listed SEMI-std. flats Tag: Visual edit
- 20:58, 30 May 2018 diff hist +67 Chemical List - OLD 2018-09-05 →Lithography Chemicals: bolded some stocked chemicals Tag: Visual edit
- 17:26, 30 May 2018 diff hist +12 Template:Announcements many updates
- 15:50, 30 May 2018 diff hist 0 m Chemical List - OLD 2018-09-05 →Lithography Chemicals Tag: Visual edit
- 15:50, 30 May 2018 diff hist +200 Chemical List - OLD 2018-09-05 →Lithography Chemicals: links to NMP MSDS/Datasheets Tag: Visual edit
- 15:31, 30 May 2018 diff hist +17 N File:AZ NMP RINSE MSDS.pdf AZ_NMP_RINSE_MSDS current
- 17:53, 22 May 2018 diff hist +232 N Usage Data and Statistics added link to NanoFab usage presenation Tag: Visual edit
- 09:16, 18 May 2018 diff hist +20 Field Emission SEM 2 (JEOL IT800SHL) added 25x25mm Tag: Visual edit
- 09:09, 18 May 2018 diff hist -238 Template:Announcements fab open, maintenance complete
- 21:40, 16 May 2018 diff hist 0 Template:Announcements rie5 date correction
- 21:40, 16 May 2018 diff hist +166 Template:Announcements RIE5 SiCl ETA
- 16:19, 16 May 2018 diff hist -124 Template:Announcements stepper 2 up
- 16:43, 15 May 2018 diff hist +246 Template:Announcements PECVD2 update
- 16:41, 15 May 2018 diff hist +42 Template:Announcements stepper 2 update
- 13:25, 14 May 2018 diff hist +386 Template:Announcements exhaust shutdown
- 11:43, 14 May 2018 diff hist -19 Template:Announcements stepper 2 update
- 19:23, 12 May 2018 diff hist -316 Template:Announcements stepper 2 down, deleted >1 week old annc.
- 20:25, 10 May 2018 diff hist +157 Molecular Vapor Deposition link to nanoimprint FDTS recipe Tag: Visual edit
- 21:07, 5 May 2018 diff hist 0 Lithography Recipes reorder - recipes at top
- 09:44, 4 May 2018 diff hist -1 m Sputter 5 (AJA ATC 2200-V) moved tool info to top
- 15:02, 30 April 2018 diff hist +115 Template:Announcements jeol up
- 10:50, 30 April 2018 diff hist +406 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): old delted recipes ection Tag: Visual edit
- 10:47, 30 April 2018 diff hist 0 m Template:Announcements reorder
- 10:46, 30 April 2018 diff hist +6 m Template:Announcements jeol typo
- 10:45, 30 April 2018 diff hist -204 m Template:Announcements reduce jeol text
- 10:45, 30 April 2018 diff hist +424 Template:Announcements jeol sem service
- 10:27, 30 April 2018 diff hist +12 m Template:Tool formatting
- 10:26, 30 April 2018 diff hist +419 Template:Tool documented available options for super & ToolType
- 10:18, 30 April 2018 diff hist +133 Vapor HF Etch →Recipes: link to general Dry Etching recipes Tag: Visual edit
- 10:16, 30 April 2018 diff hist -4 m Template:Tool change all types to show general recipe link text
- 10:12, 30 April 2018 diff hist -2 Template:Tool change recipes link to state general recipes, not specific to this tool
- 10:03, 30 April 2018 diff hist -52 Vapor HF Etch link to Vapor HF recipes
- 15:01, 27 April 2018 diff hist 0 m Template:Announcements rearrange, newest on top
- 15:00, 27 April 2018 diff hist +88 Template:Announcements RIE5 sicl4 update
- 14:58, 27 April 2018 diff hist +224 m Template:Announcements moved isntructions to bottom of page
- 16:48, 26 April 2018 diff hist -15 Template:Announcements pecvd 2 title
- 16:48, 26 April 2018 diff hist +52 Template:Announcements pecvd2 update
- 16:15, 26 April 2018 diff hist +57 Template:Announcements rie5 sicl4 down
- 12:50, 25 April 2018 diff hist -80 Template:Announcements stepper 2 up
- 16:55, 24 April 2018 diff hist -377 Template:Announcements deleted ADT