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- 09:43, 27 May 2020 diff hist +61 N Operating Instructions Created page with "Advanced Vacuum PECVD.pdf" current Tag: Visual edit
- 09:40, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 09:36, 27 May 2020 diff hist 0 N File:Advanced Vacuum PECVD.pdf current
- 09:31, 27 May 2020 diff hist +1 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
- 08:50, 8 May 2020 diff hist -151 PECVD Recipes →ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 17:16, 22 April 2020 diff hist +1 PECVD Recipes →SiN deposition (PECVD #1)
- 17:16, 22 April 2020 diff hist -29 PECVD Recipes →SiN deposition (PECVD #1)
- 17:08, 22 April 2020 diff hist -37 PECVD Recipes →SiO2 deposition (PECVD #1)
- 16:57, 22 April 2020 diff hist +57 PECVD1 Wafer Coating Process Tag: Visual edit
- 16:54, 22 April 2020 diff hist +18 Wafer Coating Process Traveler current Tag: Visual edit
- 16:53, 22 April 2020 diff hist -18 Wafer Coating Process Traveler link to recipes Tag: Visual edit
- 16:52, 22 April 2020 diff hist +54 Wafer Coating Process Traveler Tag: Visual edit
- 16:50, 22 April 2020 diff hist +1,475 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:48, 22 April 2020 diff hist -8 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 16:47, 22 April 2020 diff hist +724 Wafer Coating Process Traveler →Standard oxide deposition Tag: Visual edit
- 16:43, 22 April 2020 diff hist -7 Wafer Coating Process Traveler →STD LS Nitride2 at 300C Tag: Visual edit
- 16:42, 22 April 2020 diff hist -3,906 Wafer Coating Process Traveler Replaced content with "There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition,..." Tags: Replaced Visual edit
- 16:38, 22 April 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:38, 22 April 2020 diff hist -9 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:37, 22 April 2020 diff hist +78 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit